XL

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

High Vacuum Angle Valve, XL Series

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Connector structure ZSE/ISE40, 80 Series Available Mounting Options Series IP40 IP65 20 20A 20B(-L) 20C With waterproof cover (20B, 20C) Lead wire Mounting Available Mounting Options Series Bracket A Bracket B Bracket C Panel mount 20 20A 20B(-L) 20C The bracket configuration allows for mounting in four orientations.

Digital Flow Switches

Flow rate conversion NO OFF n-2 n-1 High flow rate Basic state: 0C, 101.3kPa Standard state: 20C, 101.3kPa, 65%RH (ANR) Switchable between these states.

Fluoropolymer Piping Equipment

25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 12 x 10 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 19 x 16 19 x 16 6 x 4 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1/8" x 0.086" 3/8" x 1/4" 3/8" x 1/4" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/4" x 5/32" 1/2" x 3/8" 1/2" x 3/8" 1/8" x 0.086" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3

Title not found

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

SZ3000

Response Time Note) Based on JISB8375-1981 dynamic performance test (with coil temperature of 20C and at rated voltage).

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

104.2 85.3 [87.5] 94.2 86.8 80.3 22 22 22 22 64.3 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5 3.2 3.2 3.2 3.2 11.5 11.5 11.5 11.5 12 12 12 12 25.5 25.5 25.5 25.5 Refer to page 375 for dimensions with connector cable. 349 5 Port Solenoid Valve 10-SYJ7000 2 Position Double [ ]: AC G H 01 02 Grommet (G), (H): 10-SYJ7243Directional Control Valves Air Grippers Modular F.

SYJ3000/5000/7000

] 94.2 86.8 80.3 22 22 22 22 64.3 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5 3.2 3.2 3.2 3.2 11.5 11.5 11.5 11.5 12 12 12 12 25.5 25.5 25.5 25.5 Refer to page 1-5-79 for dimentions with connector cable. 1-5-58 59 5 Port Solenoid Valve Rubber Seal Series SYJ7000 2 Position Double [ ]: AC G H 01 02 Grommet (G), (H): SYJ724022 12 SV SZ SY G: Approx. 300 H: Approx. 600 (Lead wire length) 63

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

[131.4] Approx. 300 83.4 75.9 64.6 Max. 10 145.2 65.4 35.2 50.6 [57.6] 49.5 55.1 37.6 M8 x 1 (Lead wire length) Approx. 300 61.7 [68.7] Pg7 107.4 [111.8] 97.4 28 18 18 18 18 28 18 18 28 18 18 28 125.2 110.4 147 9.5 22 9.5 22 22 9.5 22 9.5 Note) Refer to page 176 for dimensions of connector types. 65 Base Mounted 10-SY3000/5000/7000/9000 Dimensions: Series 10-SY5000 [ ]: AC 3 position closed

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Dimensions page 22 (Single unit) 16 17 Series VX21/22/23 For Air /Manifold (Inert gas, Non-leak, Medium vacuum) Solenoid Valve for Manifold/Valve Specifications N.C. N.O.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

22 22 22 2-Rc(PT)1/4 31.5 18 18 31.5 (R1, R2 port) 63 63 [ ] for AC Other dimensions are the same as the grommet style

AC

Model Port size Applicable model A B C E10-M5 AC100, AW1000 AF1000, AR1000, AL1000 E20-01 E20-02 E20-03 E30-02 E30-03 E30-04 E40-02 E40-03 E40-04 E40-06 E30-02 M5 X 0.8 16 14 17.5 1/8 1/4 3/8 AC200 AF2000, AR2000, AW2000 AL2000, AFM2000, AFD2000 23 22 22 1/4 AC250, AC300 AF3000, AR3000, AW3000 AL3000, AFM3000, AFD3000 Piping adapter 26 29 34.2 3/8 40 29 34.2 1/2 1/4 AC400 AF4000, AR4000,

3

(Variation: 10%) Note 2) The value at ambient temperature of 20C and when the rated voltage is applied. The value depends on the ambient environment. This is for reference. Note 1) The value at ambient temperature of 20C and when the rated voltage is applied.

VQC

B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special wiring specifications (options) COM () (+) 26 Positive COM spec. Negative COM spec. COM COM 25 26 COM COM 23 24 Note) When using the negative COM specification, use valves for negative COM. 21 22 Mixed single and double wiring are available as options.

VQ5000

Insulation resistance Mkm, 20C (68F) 5 or more 16 44 8 SMC Connector manufacturers Fujitsu Ltd. Japan Aviation Electronics Industry, Ltd. J. S. T. Manufacturing Co., Ltd.

New

14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

32.8 44.3 20.9 17.9 12 3/8" 21 59 AS421FG-04-10 AS421FG-N04-11 33.6 47.9 100 21 33.6 47.9 18.5 17.9 10 3/8" 21 100 NPT 1/2 23.8 25.4 28.6 50.1 57.6 25.4 24 49.6 57.6 50.1 49.6 42.1 42.1 R 1/2 28.6 AS421FG-04-12 AS421FG-N04-13 35.2 49.5 101 22 34.6 48.9 20.9 21.7 12 1/2" 22 101 Reference dimensions of M5 x 0.8, R threads after installation.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

" 1/4" 5/16" 3/8" 3/8" 1/2" 8.4 9.3 11.4 12 9.3 11.4 13.2 11.4 13.2 15.2 13.2 15.2 17.9 17.9 21.7 12.7 12.7 10.5 10.5 13.5 12.7 13.5 17 18 17 18 21 22 21 22 16.5 13.7 12.7 16.5 17 16.5 17 18 17 18 21 21 22 22.4 25.2 6.2 12.3 27.6 28.6 29.5 29.6 30.5 27.6 33.3 34.1 35.3 43.5 44.9 32.6 33.6 34.5 34.6 35.5 32.6 38.3 39.1 40.3 51 52.4 5.2 6.2 7.1 6.2 7.1 8.1 7.4 8.2 9.5 10.3 11.6 12.3 15.5 15.5

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Type 60P Flat Ribbon Cable Type (26 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 26 26 26 Positive pin (Common) Positive pin 25 25 25 Station 12 SOL.b 24 24 24 Negative pin Negative pin (Common) SOL.a 23 23 23 Station 11 SOL.b 22 22 22 Unused terminal Unused terminal SOL.a 21 Station 20 21 Station 20 21 20 20 6 6 SOL.b Station 5 SOL.b