Series: 25A-PF3W7, Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 04 (1/2), Output Specification/Temperature Sensor: D (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Series: 25A-PF3W7, Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 04 (1/2), Output Specification/Temperature Sensor: D (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Series: 25A-PF3W7, Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 04 (1/2), Output Specification/Temperature Sensor: D (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VFRA4211-03 VFRA4211-04 VFRA4311-03 VFRA4311-04 VFRA4411-03 VFRA4411-04 VFRA4511-03 VFRA4511-04 3/8 1/2 3/8 1/2 3/8 1/2 3/8 1/2 3/8 1/2 13 15 14 15 13 14 13 14 13 (5.0) 15 (5.3) 0.30 0.30 0.31 0.30 0.32 0.28 0.31 0.30 0.27 (0.42) 0.22 (0.42) 3.2 3.8 3.4 4.0 3.2 3.5 3.2 3.7 3.2 (1.3) 3.7 (1.5) 1.1 1/8 Single 2 position 1.2 1/8 Double Closed center 1.2 1/8 Exhaust center 1.2 1/8 3 position

VPA4

VVPA4 5 0 04 04 1 Thread type Nil Rc G NPT NPTF VP 5 port Air operated manifold F N T 5 Base size Rc A, B Port size Rc 3 4 6 1 VVPA450 Symbol 04 Port size VVPA460 1 2 3 4 Mixed 1 06 10 M (2) Piping Note 2) In the case of mixed specifications, indicate M and specify port location sparately on a manifold specification sheet.

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

VVPA4 5 0 04 04 1 Thread type Nil Rc G NPT NPTF VP 5 port Air operated manifold F N T Base size A, B Port size 5 3 4 6 1 Symbol 04 Port size VVPA450 VVPA460 1 2 3 4 Mixed 1 06 10 M (2) Piping Note2) In the case of mixed specifications, indicate M and specify port location sparately on a manifold specification sheet.

Body Size: 40, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 04 (1/2), Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Unit: Name Plate and Pressure Gauge in Imperial Units; MPa

Body Size: 40, Backflow: w/Backflow Function, Thread: Rc, Port Size: 1/2, Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Unit: Name Plate and Pressure Gauge in Imperial Units; MPa

3 Port Air Operated Valve VPA3145/3165/3185 Series

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 03 04 1 2 1 4 6 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

Without sub-plate 00 VPA4 54, 4 74 JIS Symbol (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 03 2 position double 2 position single Body size VPA4150/4170 VPA4250/4270 04 06 10 0 1 VPA4 5 Piping standard 3 4 standard 11 4 Side ported Bottom ported W/o sub-plate 5 7 0 1 12 14 0 1 VPA4 7 4 Option Side piping only 3 position exhaust center 3 position closed center VPA4350 VPA4450

Body Size: 40, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 04 (1/2), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 40, Backflow: w/Backflow Function, Thread: Rc, Port Size: 1/2, Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

rep-modular-e

AR20K AR25K AR30K AR40K AR50K AR60K Assembly 3) Confirm two O-rings is mounted to body side. If not, mount it to the body. 4) Insert convexes on check valve into O-ring insert holes on body. Orientation of the check valve body assembly 5) Mount check valve cover. Rotate two screws clockwise by Phillips head screw driver to fix check valve cover.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

AR20K AR25K AR30K AR40K AR50K AR60K Assembly 3) Confirm two O-rings is mounted to body side. If not, mount it to the body. 4) Insert convexes on check valve into O-ring insert holes on body. Orientation of the check valve body assembly 5) Mount check valve cover. Rotate two screws clockwise by Phillips head screw driver to fix check valve cover.

Body Size: 40, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 04 (1/2), Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa, Exhaust Mechanism: Relieving Type, Flow Direction: R (Right to Left), Knob: Downward, Pressure Unit: Name Plate and Pressure Gauge in Imperial Units; MPa

Body Size: 40, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 04 (1/2), Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Unit: Name Plate and Pressure Gauge in Imperial Units; MPa

Body Size: 40, Backflow: w/Backflow Function, Thread: Rc, Port Size: 1/2, Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa, Exhaust Mechanism: Relieving Type, Flow Direction: Right to Left, Knob: Downward, Pressure Unit: Name Plate and Pressure Gauge in Imperial Units; MPa

Body Size: 40, Backflow: w/Backflow Function, Thread: Rc, Port Size: 1/2, Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Upward, Pressure Unit: Name Plate and Pressure Gauge in Imperial Units; MPa

VN-OMP0002

1/2 B(12.7) 20A 311 500-06 3/4 B(19.1) 25A 411 600-10 1 B(25.4) 2 32A 511 800-12 1 1/4 B(31.8) VNA01 VNA02 VNA03 VNA1 40A 611 900-14 1 1/2 B(38.1) (P1) () 12 50A 711 900-20 2 B(50.8) (P2) () 10 (),12(P1) 10(P2) EXH , 6 VN-OMP0002 1 2 3 () 4 P2 5 6 7 8 9 10 11 O O 12 13 14 7 VN-OMP0002 No. 1 2 3 4 5 , 6 7 8 9 10 11 P2N.C.

IR1000/2000/3000

In addition, the product for the following specifications is also available: Prefix (10-): Clean series Prefix (25A-): Secondary battery compatible Prefix (80-): Ozone resistant (Fluororubber specification) IRM: Manifold specifications (For IR1000 and IR2000 series only.