Compact

77 91 Side support B MY-S25B M6 x 1 35 77 8 50 91 A set of side supports consists of a left support and a right support.

Table of Contents

/60 Hz Symbol Option Without sub-plate VP454 2 200 VAC, 50/60 Hz 00 3 110 VAC, 50/60 Hz VP474 4 220 VAC, 50/60 Hz (10A) 3 8 (15A) 1 2 03 04 5 24 VDC VP450 6 12 VDC 06 (20A) 3 4 10 (25A) 1 7 240 VAC, 50/60 Hz 9 Other 12 (32A) 1 4 1 14 (40A) 1 2 1 VP470 Option Note) There is no 3 position type for Series VP470.

VQ7-6/7-8

50 68.5 76.5 145 86.5 155 50 50 68.5 13 (port B) 13 (port A) 13 (port B) 13 (port A) Manual override Manual override B A B A B B 38 50 62 38 50 62 Indicator light R1 P R2 R1 R2 Indicator light 2-6.5 Mounting hole 2-6.5 Mounting hole 42.5 42.5 42.5 42.5 G1/2 (cable 6.8 to 10) G1/2 (cable 6.8 to 10) 125.5 137.5 125.5 137.5 37 93 37 93 25 (port X) 25 (port X) 5 3 3 5 22 22 14 14 1 1 2-Rc3/8

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Function 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Standard type (1W) Energy saving type (0.5W) External pilot Nil Y Note 1) Seal type R Note 2) Metal seal Rubber seal 0 1 1 2 3 Stations D side U side Note1) Applicable to DC specifications. Note2) See page 35 for details on external pilot specifications.

Steam Valve

(mm) Model Flange Note) Kv Conversion Cv Rc VND10D-6A VND10D-8A VND10D-10A VND20D-10A VND20D-15A VND30D-20A VND40D-25A VND50D-32A VND50D-32F VND60D-40A VND60D-40F VND70D-50A VND70D-50F 0.9 1.0 1.1 4.3 4.6 8.6 13.6 1.1 1.2 1.3 5.0 5.4 9.9 16 1 8 1 4 7 0.3 3 8 15 0.6 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 25 1 1 4 1 15.7 18 32 32 1 2 1 32.9 38 40 40 2 53.6 50 62 10.8 50 Note) The companion

3 Port Solenoid Valve/

Made to Order Series Compatible with Secondary Batteries 1 For details about 25A-, refer to the WEB catalog Series Compatible with Secondary Batteries/Series 25A-. X536 X538 X555 How to Order 25AVP 4 5DZ1 Fill in according to How to Order above. Note) Electrical entry can be selected only for D type. Check valve type is available only when the thread type is Rc.

PVC Quick Drain Valve

or less Nitrogen gas Ultrapure water Sulfuric acid (except fuming sulfuric acid) Note 2) Concentration 30% or less Phosphoric acid Concentration 50% or less The material and fluid compatibility check list provides reference values as a guide only.

VND

-25A VND50D-32A VND50D-32F VND60D-40A VND60D-40F VND70D-50A VND70D-50F 1 8 1 4 26 28 31 120 130 240 380 7 0.3 3 8 15 0.6 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 10.8 25 1 VC 1 4 1 440 32 32 1 2 1 VDW 920 40 40 2 VQ 1500 50 50 Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

Table of Contents

amount (mm) Plate displacement amount (mm) MGP MGPA16-250 MGPA16-250 0.35 MGPA -400 50 50 63 63 MGPA -400 50 63 0.6 0.3 50 50 63 63 MGPA -300 0.5 50 63 MGPA -300 MGPA16-150 MGPA16-150 MGPA16-100 MGPA16-75 0.25 0.4 MGP MGPA16-100 50 50 63 63 MGPA -200 50 63 MGPA -200 0.2 MGP MGPA16-75 0.3 0.15 50 50 63 63 MGPA -150 50 63 MGPA -150 50 63 MGPA -100 50 63 MGPA -50 0.2 50 50 63 63 MGPA -100 0.1

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Bore size (mm) 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

VQ7-6/7-8

50 50 50 Manual override Manual override 13 (A port) 13 (B port) 13 (A port) 13 (B port) A B A B 38 50 62 38 50 62 B A B A R1 (L 500) Cable with connector R2 P R2 R1 P (L 500) Cable with connector Mounting hole 2-6.5 42.5 42.5 Mounting hole 2-6.5 42.5 42.5 Indicator light Indicator light 93 93 25 (X port) 25 (X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 X(PE) port 1/8 R1, R2 port

VQ4000

Seal Metal seal Rubber seal Coil voltage 0 1 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Function 1 2 3 Stations U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) D side (2) Note 1) Applicable to DC specifications. Note 2) Refer to page 2-5-39 for external pilot specification.

SFOD-OMT0009CN

-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 15 No.SFOD-OMT0009CN-B Execute (Apply) 3.6 (2) 16 No.SFOD-OMT0009CN-B (2) 7. 512 2048 / 0 1 0 1 1 4 1 4 11 () 12 () 1 2 1 11 [] 14096 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 1 2 3 800 2.5mm 12 =1 /2 3 =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) 17 No.SFOD-OMT0009CN-B download 18 No.SFOD-OMT0009CN-B

JXCx-OMT0001CN

-) 11-25A-11-25A) 11-LEFSH16A-100BR LEFS16A-100LEFS16A-100 -15No.JXC-OMT0001CN-C Execute()Execute Check box Execute Apply Apply 3.6 (2) -16No.JXC-OMT0001CN-C (2) 9. 512 2048 / 0 1 0 1 1 4 1 4 11 12 1 2 1 [] 11 1 4096 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 1 800 2.55mm 2 3 12 =1 /2 (3 ) =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) -17No.JXC-OMT0001CN-C

AIR CYLINDER

CS2*-OM0237Q PRODUCT NAME AIR CYLINDER MODEL / Series / Product Number 25A-CS2*125160-** 3 2/5 Contents 1. Safety Instructions P.2 2.

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

10

136 41 110 32 60 27 19 97 16 M12 x 1.75 13 27 20 6 M27 x 2 38 1/2 120 50 148 148 17 15 223 With Rod Boot [mm] Bore size [mm] d e f l 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 12.5 25 37.5 50 75 100 125 40 56 41 23 12.5 25 37.5 50 75 100 125 50 64 51 25 12.5 25 37.5 50 75 100 125 150 63 64 51

An analog voltage or current output is available.  25A-PFM5 is IP40 rated, CE and RoHS compliant.  Compatible with the 25A-PFM3 monitor. Flow ranges (lpm): 0.2-10, 0.5-25, 1-50, 2-100; Port sizes: 1/8 or 1/4 (Rc, NPT, G); ø6 or ø8 one-touch fittings; Rated pressure range (MPa): -0.07 to 0.75; Output options: 1-5V or 4-20mA; Accuracy: ±3% F. S.; Repeatability: ±1% F. S.

An analog voltage or current output is available.  25A-PFM5 is IP40 rated, CE and RoHS compliant.  Compatible with the 25A-PFM3 monitor. Flow ranges (lpm): 0.2-10, 0.5-25, 1-50, 2-100; Port sizes: 1/8 or 1/4 (Rc, NPT, G); ø6 or ø8 one-touch fittings; Rated pressure range (MPa): -0.07 to 0.75; Output options: 1-5V or 4-20mA; Accuracy: ±3% F. S.; Repeatability: ±1% F. S.

240

Dimensions [mm] Model L1 L2 A B C D E F G J K LEPS10-25 138 152.5 61.8 20 22 30 29 20 29 39 88.2 LEPS10-50 163 177.5 24 43 34 50 24 50 60 113.2 LEPS10L-25 124 138.5 47.8 20 22 30 29 20 29 39 88.2 LEPS10L-50 149 163.5 24 43 34 50 24 50 60 113.2 394 LEPY/LEPS Series Specific Product Precautions 1 Be sure to read this before handling the products.