Series: 25A-ZSE20, Rated Pressure Range: A (0 to -101 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)

VXD21/22/23

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

VNB

indicator light: DL) Main port Rc A B C D E F G H I J K L M N P Q R S T U V W Model VNB2V-10A VNB2V-15A VNB3V-20A VNB4V-25A 3 8 1 2 3 4 1 63 42 28 14 72.5 80.5 75 87 97 114 126.5 170.5 173.5 180.5 52 26 4.5 24.3 2.3 25 34 55 80 90 50 60 35 40 17.5 20 84 100 92 108 80 81 92 93 102 103 125.5 141.5 138 154 182 198 185 201 192 208 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 60.5 73 17-

Coolant Valve

2 3 4 6 5 0 1 2 3 4 5 Flow velocity (m/s) Flow velocity (m/s) Calculating the Flow Velocity v = 21.2 x Q/d2 (Symbol) v: flow velocity (m/s) Q: flow rate (L/min) d: piping inner diameter (mm) 626

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

Series: 25A-ZSE20, Rated Pressure Range: B (0 to -101 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specifications: M (SI Unit Only), Piping Specifications: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ZSE20, Rated Pressure Range: B (0 to -101 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specifications: M (SI Unit Only), Piping Specifications: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

70pvvna

32A to 50A VO301-00 Grommet, Grommet terminal Conduit terminal DIN terminal LVN Grommet, Conduit DIN terminal Other (Option) Electrical entry TI/ TIL Coil rated voltage (V) AC (50/60 Hz) 100 V, 200 V, Other voltage (Option) 24 V, Other voltage (Option) 15% to +10% of rated voltage Class B or equivalent (130C) JIS Symbol PA DC Valve type Style N.C.

Process Valve

(60 Hz) 1.8 W (without light), 2 W (with light) 4 W (without light), 4.2 W (with light) DC 12 (P1) 10 (P2) 12 (P1) Allowable voltage fluctuation SGC 50C or less (When rated voltage is applied.)

VNC

Not required (Use turbine oil Class 1 ISO VG32, if lubricated.) 5 to 50C (Air operated type: 60C) PA AC (50/60 Hz) DC VNC1 VNC Applicable pressure range 100 V, 200 V, Other voltage (Option) Coil rated voltage (V) 2 4 PAX 24 V, Other voltage (Option) 15% to +10% of rated voltage Class B or equivalent (130C) 1 4 VNC Allowable voltage fluctuation Coil insulation type Pressure VNC2 PB External

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread

Electromagnetic Digital Flow Switch

Symbol Rated flow range 1 0.5 to 20 L/min 2 2.5 to 100 L/min 3 5 to 200 L/min Symbol Description X8 Piping connection parts: Stainless steel 304 Output specifications Option Symbol OUT1 OUT2 A NPN NPN B PNP PNP C NPN Analog 1 to 5 V D NPN Analog 4 to 20 mA Symbol Lead wire and M12 connector (Length 3 m) Bracket Display unit Nil V L/min 1 L/min 2 V V L/min 3 V L/min 4*1*2 V gal/min 5*

LEY-OM007

12250 6125 [mm/s 2] 3,000 [mm/s] 6) 50 35 30 [mm] 0.02 [mm] 10 5 2.5 12 6 3 16 8 4 [m/s 2] 7) 50/20 + LEYG* M L_ LEYG* M LD LEYGM,LEYGL [] 540 [%] 90 RH ) 28 42 56.4 (DC24V) A/B 800 / [V] DC2410% [W] 8) 23 40 50 [W] 9) 16 15 48 [W] 10) 43 48 104 11) [N] 20 39 78 78 157 294 108 216 421 [W] 12) 3.6 5 5 [V] DC2410% LEYG 16M _ LEYG 25M _ LEYG 32M _ [mm] 30 50 100 150 200 30 50

VXR21/22/23

LQ LVN Table(1) Connection Size and Applicable Model Table(2) Rated Voltage-Electrical Entry-Electrical Option Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) TI/ TIL Applicable model VXR2150-04 VXR2150-06 VXR2260-10 1 VXR2270-12 1 VXR2380-14 2 VXR2390-20 Size Class B Class H G PA 1 2 3 4 C D, T G, C T S L,

Fluoropolymer Piping Equipment

Connection threads R/NPT A A E E H L L M W N Min. port size W LVA M N LQ3H11-M 4 1/8" 29.5 28.5 10 9 11 33.5 32.5 14 10 4 2.5 LQ3H12-M 3 2 LQ3H21-M 6 1/8" 39.5 38.5 17 16 16 43.5 42.5 20 14 4 4 LQ3H22-M 1/4" 37.5 36.5 6 LQ3H31-M 10 1/8" 51 48 LVH (E, E) Port size R (NPT) LVD LVQ 4.4 4.4 LQ3H32-M 8 LQ3H33-M 10 1/4" 49 46 6.4 6.4 LQ3H34-M 8 LQ3H35-M 10 3/8" 48.5 45.5 10 7.5 LQ3H36-M 8 10 6.4

PF-OMN0009_C

1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L N P PF3W504 3/8 70 50 30 45.6 40.6 15.2 24 14 35 26 18 13.6 2.7 14 PF3W520 3/8 1/2 78 54 30 45.6 40.6

Air cylinder (Series compatible with secondary batteries)

(See page 15, Table 8.) < Applicable Auto switches > Solid state auto switch D-M9N(V)-900M9P(V)-900M9B(V)-900 D-M9NW(V)-900M9PW(V)-900M9BW(V)-900 Reed auto switch D-A90-900 Fig 4. How to Mount and Move the Auto Switch Fig 4.

Series: 25A-ZSE20, Rated Pressure Range: 0 to -101 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specifications: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specifications: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter, Operation Manual: