3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Cylinder ports (1) N1 N3 N7 N9 N11 M5 01 02 Symbol NM External pilot port 3/8 1/8 5/32 1/4 5/16 Mix Applicable tube O.D.(Inch) M5 1/8 1/4 M5x0.8 VQZ1000 V V V V V Cylinder port VQZ2000 V V V V V VQZ3000 V V V V V Note 1) Mixing One-touch fittings and thread types is impossible.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Rubber 12.6 (0.7) VQZ235 20 or less 15 or less 53 VQZ200 Metal 10.0 (0.55) VQZ225 18 or less 14 or less N.O. Rubber 12.6 (0.7) VQZ245 20 or less 15 or less Metal 16.2 (0.9) VQZ315 22 or less 17 or less N.C. Rubber 21.6 (1.2) VQZ335 33 or less 25 or less 77 VQZ300 Metal 15.3 (0.85) VQZ325 22 or less 17 or less N.O.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Thread type Nil F N T Rc G NPT NPTF Rated voltage DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] A, B port size 01 C6 C8 N7 N9 1/8 One-touch fitting for 6 One-touch fitting for 8 Note) Do not remove the factory installed bracket from models with the bracket option.

5 Port Solenoid Valve Series SV

Specification SV2000 SV1000 SV4000 SV3000 Applicable series Manifold type Tie-rod base manifold 1(P: SUP)/3, 5(E: EXH) type Common SUP, EXH Valve stations (maximum) 20 stations Max. number of solenoids 32 points Port size 1(P)/3, 5(E) port C10, N11 C8, N9 C12, N11, 03 C12, N11 C4, C6, C8 N3, N7, N9 C3, C4, C6 N1, N3, N7 C8, C10, C12 N9, N11, 02, 03 C6, C8, C10 N7, N9, N11 4(A)/2(B) port Flow

Plug-in Unit

Note 2) Symbols for inch sizes are as follows: N7: 1/4" N9: 5/16" N11: 3/8" NM: Mixed 0 1 8 With 8 input blocks Note)Max. 4 for EX240 and max 8 for EX250. SI unit COM.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Standard type: 1 W AC High pressure type: 1.0 W Low wattage type: 0.5 W Model (g) Cv Cv b C [dm3/(sbar)] b C [dm3/(sbar)] VQZ100 0.25 VQZ115 0.35 0.46 1.0 0.23 0.87 13 or less 10 or less 22 or less Poppet N.C. valve 25 0.45 VQZ215 0.20 0.17 2.0 0.38 1.7 18 or less 14 or less 34 or less Metal seal N.C. valve 0.80 VQZ235 0.40 0.46 3.0 0.65 2.3 20 or less 15 or less 36 or less Rubber seal 53

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(Inch) N1 N3 N7 N9 N11 M5 02 Symbol M5 thread 1/8" 5/32" 1/4" 5/16" 3/8" thread 1 4 Pressure Specifications VQZ100 2(A) port (2) VQZ100 VQZ200/300 Series VQZ200 Metal seal VQZ300 0.1 to 0.7 MPa (1) External pilot pressure range Note) Metric size of One-touch fittings (C) are also available.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

How to Order Valve T VQZ212 5M N7 Example/Valve VQZ212R 5M C6 External pilot specification Thread (Cylinder ports, and P/R ports) Rc(PT) N NPT External pilot port T NPTF M3 X 0.5 (VQZ200) M5 X 0.8 (VQZ300) F G(PF) Note) R port of VQZ200 is only PF 1/16 Cylinder ports Symbol M5 02 N1 N3 N7 N9 N11 3/8" 1/8" 5/32" 1/4" 5/16" M5 Tube O.D.

90

L Dimension 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 Port size C8 N9 8 one-touch fitting 5/16" one-touch fitting No. L Dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 uSound absorbing material (2 pcs. per set) No. L Dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ZK2 SE2 A 1 No.

Vacuum Unit

No. 11 12 13 14 15 16 17 18 19 20 Exploded View y VVQ1000 51A C8 L Dimension 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 Port size L Dimension 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 C8 8 One-touch fitting N9 5/16" One-touch fitting No. 31 32 33 34 35 36 37 38 39 40 L Dimension 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 33 Exploded

Vacuum Unit Ejector / Vacuum Pump System

Refer to Filter case maintenance on page 53. 2) Flip the ejector, push the release lever again with a finger or precision screwdriver until the release lever stops. -50No. ZK2-OM01301 3) To remove the clip that holds the port plug, insert a precision screwdriver from the release lever notch.

VQ4000

How to Order Manifold VV5Q41 06 N11 SA K VQC Cylinder port SQ N7 N9 N11 1/4" 5/16" 3/8" VQ0 VQ4 VQ5 How to Order Manifold Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ4100 R 5 03 International Thread Standards Other than Rc VQZ Rc specifications are standard

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

How to Order Valve T 5M N7 VQZ2120 SY Example/Valve C6 5M VQZ2120R SYJ External pilot specification Thread (Cylinder ports and P, R ports) SX VK Rc(PT) External pilot port N NPT VZ M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) T NPTF F G(PF) VF Note) R port of VQZ2000 is only G(PF) 1/16 VFR Cylinder ports VP7 Symbol M5 02 N1 N3 N7 N9 N11 Applicable tube O.D.

Table of Contents

(5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2-4-84 Built-in silencer Built-in silencer 2-4-5 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 100 (10000mm, Semi-standard), Manual Override: Non-locking Push Type, A,B Port: N9 (ø5/16" One-touch Fitting, Inch)

Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 10000mm, Semi-standard, Manual Override: Non-locking Push Type, A,B Port: ø5/16" One-touch Fitting, Inch, Thread Type: -, Bracket: -

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SI Unit: QW (DeviceNet), Input Block Stations: 53 [5 Stations/M8: 4 Inputs (3 Pins)], Input Block COM: +COM, Stations: 12 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N9 (5/16" One-touch Fitting), Mounting Method: Direct Mounting, US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 53 [5 Stations/M8: 4 Inputs (3 Pins)], Input Block COM: N (-COM), Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N9 (5/16" One-touch Fitting), Mounting Method: Direct Mounting, US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: 53 [5 Stations/M8: 4 Inputs (3 Pins)], Input Block COM: +COM, Stations: 3 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N9 (5/16" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)