2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

N1, N2, F1, F2 Straight Symbol Port size Rated flow range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight w Flow adjustment valve/Piping entry direction valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight

4/5 Port Solenoid Valve

(One-touch fitting for 6) P, R port M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8

SZ3000

Note C6: With 6 One-touch fitting Supply/exhaust block assembly C6 C8 SZ3000-50-2A1 C8: With 8 One-touch fitting For D side End block assembly SZ3000-53-3A SZ3000-53-4A SZ3000-114-3A SZ3000-114-1A VZ1000-11-12 For U side End block assembly 3 Bushing assembly 4 Bushing assembly 5 DIN rail Refer to page 6. 6 Manifold Station Expansion Station expansion is possible at any position. 1.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note C6: With 6 One-touch fitting Supply/Exhaust block assembly C6 C8 SZ3000-50-2A1 C8: With 8 One-touch fitting For D side End block assembly SZ3000-53-3A SZ3000-53-4A SZ3000-114-3A SZ3000-114-1A VZ1000-11-12 For U side End block assembly 3 Bushing assembly 4 Bushing assembly 5 DIN rail Refer to page 7. 6 Manifold station expansion Station expansion is possible at any position. 1.

SZ3000

Note C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 L6: With One-touch fitting for 6 (Elbow fetching upward) L8: With One-touch fitting for 8 (Elbow fetching upward) B6: With One-touch fitting for 6 (Elbow fetching downward) B8: With One-touch fitting for 8 (Elbow fetching downward) q SUP/EXH block assembly SZ3000-50-2Aw e r t y SZ3000-53-8A SZ3000-53-7A SZ3000-114-3A SZ3000

SZ3000

Note C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 L6: With One-touch fitting for 6 (Elbow fetching upward) L8: With One-touch fitting for 8 (Elbow fetching upward) B6: With One-touch fitting for 6 (Elbow fetching downward) B8: With One-touch fitting for 8 (Elbow fetching downward) q SUP/EXH block assembly SZ3000-50-2Aw e r t y SZ3000-53-8A SZ3000-53-7A SZ3000-114-3A SZ3000

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Load weight (kg) Dm1 -X 20m2 m3 Moment (Nm) Data M3=F3 x L3 F3 F2 M1=F1 x L1 F1 M2=F2 x L2 L2 L1 L3 1.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

) P=10.5 13.5 (L3) 3 L2 6 .5 L1 2 1 16 .5 Station 5.5 D side 2.3 2-M5 X 0.8 External pilot port (Only external pilot style(R)) 7.8(C3, C4, C6) 21.6 (M5: 5.7) 35 5.5 53 300 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (Top piping) 39.5 7.8 42.5 P R 1 3 15 8 2-M5 X 0.8 PE port 13.4 2-Rc(PT)1/8 R(EXH) port 16.3 The broken line indicates DIN rail mounted style [-D]. 41.2 2-Rc(PT)1/8 P(SUP)

Table of Contents

Dimensions LLAA--C Stations 4-Mounting hole for W Y Dimensions (mm) A S K Model LLA2A LLA3A LLA4A LLA5A 11.5 L1 24 L2 L3 29 Sensor (Breathing port) U 2-R 34.5 (mm) H G Station 2 3 4 5 Model C Symbol P N L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 E V LLA2A 75 106 137 168 Pitch = B A (OUT) port n-Q 118 149 180 211 P (IN) port 2-Q 74 111 148 185 (Max.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Base mounted (with sub-plate) 53(32) 58(37) M5 x 0.8 54(33) Note) Value for DC.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Digital Flow Switch ( compatible)

PNP (1 output) + Analogue output type PF2MC7###-##-L3/L4#-### -28No.PF-OMZ0002-A Outline of Settings [Measurement mode] Power is supplied The output will not operate for 3 seconds after supplying power.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Aluminum die cast Body q Stainless steel Spool/Sleeve Metal seal w Aluminum/NBR Spool valve Rubber seal Resin Piston e Pilot valve r 2.10-7 VQZ100/200/300 Body Ported Dimensions: VQZ100 Valve single unit C6: One-touch fittings for 6 C4: One-touch fittings for 4 C3: One-touch fittings for 3.2 2-C3, C4, C6, M5 Grommet (G): VQZ115-lGl-C3, C4, C6, M5-PR 10 10 (2) M5: M5 thread 53 13.8 6 A 2

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VFN 4-14-13 Body Ported 14 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ12Stations C Grommet (G) (5.5) (35) (11) 27.5 2-4.5 mounting hole n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P = 10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations Courtesy

Table of Contents

Bracket B Bracket assembly 16-2-53 10 Series ISE70/75/75H Specific Product Precautions 2 Be sure to read before handling. Set pressure range and rated pressure range Caution 1. Set the pressure within the rated pressure range. The set pressure range is the range of pressure that is possible in setting.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L4 4-14-37 Base Mounted 38 Series VQZ100/200/300 Dimensions: VQZ300 VV3QZ35Stations Port size C Grommet (G) (35) (5.5) 2-4.5 mounting hole 43.5 (11) C6: One-touch fitting for 6 n-C6, C8, C10, 02 34 (7.5) (3) DIN rail clamp screw 23.5 C8: One-touch fitting for 8 C10: One-touch fitting for 10 02: Rc1/4 U side n A 2 A 2 5 Manual override 4 (L4) 3 (L3) L2 L1 2 P = 20 P = 20 19.5 1 23 9 Courtesy

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note 3) Refer to page 6 for DIN rail weight. 1 Cassette Type Manifold Series SY3000/5000/7000 How to Order Valves SY 3 1 60 5 L C6 Series 3 5 7 Symbol M5 C4 C6 01 C4 C6 C8 02 C8 C10 SY3000 SY5000 SY7000 A, B port size Port size M5 x 0.8 4 One-touch fitting 6 One-touch fitting Rc(PT)1/8 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Rc(PT)1/4 8 One-touch fitting 10 One-touch

VFR

, C8 (A, B port) Individual SUP spacer Control unit Pressure switch Air release valve Stations Filter regulator Pressure switch Air release valve Pressure switch Electrical entry D side Rc 1/4 Po port 2-Rc 1/8 Pilot EXH port n: Stations Stations L L1 L2 L3 (MP) L3 (AP) Formula L1 = 28 x n + 47 L2 = 28 x n + 56 L3 = 28 x n + 194 L3 = 28 x n + 235.5 3 131 140 278 319.5 4 159 168 306 347.5 5

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

(MP) L3 (AP) 385.5 428.5 471.5 514.5 557.5 600.5 643.5 686.5 L3 = 43 x n + 256.5 L3 = 43 x n + 298 1295 Series VFR4000 Manifold Base Construction: Plug-in Type/Non Plug-in Type End plate (D side) Manifold block End plate (U side) Replacement Parts No. 1 Description Part no.

CRBU

on the type of L3 = 30 3 to 6 L2+3 Y 5 20 7 to 13 5 to 20 3 to 5 X 3.5 L1+2 machining required.