AW

70 W 34.5 41 A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 10 14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18

VZ100/300/500

Mounting Screw Tightening Torques M3: 0.8 Nm 4-6-34 35 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 Manifold for Internal Pilot How to Order Applicable solenoid valve VZ512--01 VZ512M--01 VZ522--01 Z522M--01 Applicable blanking plate assembly DXT201-15-4A Type 20/21 VV3Z5 20 05 1 A port A port P/R port thread type Manifold P port Stations 20 21 Type 20 Type 21

Modular Type Filter Regulator Series AW

AW20P-270AS AR20P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N Note) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N Note) Set nut Round 1.0MPa Note 2) Note 3) Pressure gauge Square embedded type Round 0.2MPa Note 3) Square embedded type N.O. N.C.

Base Mounted Metal Seal/Rubber Seal Series VQ

Note 1) 1 station 01 16 stations Note) Number of terminals 16 Note 2) Refer to page 2-4216 for details.

smcmaintenancepartslist

) 04 T-interface Note 6) Note 7) Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Note 1) in part numbers for a round

Table of Contents

CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant to be guaranteed.

4/5 Port Air Operated Valve Series SYJA3000

(Manifold base) SYJ7120-5G-01 2 pcs. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) SS5YJ7-41-03-01 1 pc. (Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

Basic type / Direct mount type Series CY3B/CY3R

-01-04-X214 AS1201FPQ-M5-04-X214 Elbow type/Brass (throttle valve) AS2201FPQ-01-06-X214 AS1201FPQ-M5-06-X214 CY1S With clean One-touch fitting AS2201FPQ-01-08-X214 AS2201FPG-01-04-X214 AS1201FPG-M5-04-X214 Elbow type/ Stainless steel 304 (throttle valve) CY1L AS2201FPG-01-06-X214 AS1201FPG-M5-06-X214 AS2201FPG-01-08-X214 CY1H Note 1) Refer to Back Page 10 (How to Use Clean Series) for the

JXCx-OMT0005CN

DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVON ON)

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(Size: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-06 AS2200-01 70% 100 50 10% 30% 50% 0 CM2 25 200 150 AS2201F -01-06 AS2200-01 100 50 0 SV100 ANA1 -C08 T0604 CM2 32 200 150 AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable related components For details regarding different conditions

•

Calculation of suction flow rate OCalculation 01 Ejector/ average suction flow rate. 01 = ( ~ ~'3) 0 max.

13

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

Air Cylinder Series CM2

53 77 154 154 36 11 10 54 30 55 75 23 27 10 3.2 134 171 44.5 Up to 300 Up to 500 177 188 47.3 143.5 to 500 Up to 300 Up to 300 Precautions on Trunnion Style, Flange Style 1.

0.4

F None Nil IN side port size OUT side port size DIN rail mounting (For manifold) D Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting 01 02 C6 C8 N7 N9 F With bracket Name plate N Note) When two or more symbols are specified

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.