5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

L4 L1 L2 L3 L4 L n 12 260.5 250 229 16 L n 12 273 262.5 239.5 17 10 235.5 225 208 14 11 248 237.5 218.5 15 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 33 3 Station table entries In the case

SZ3000

L4 L1 L2 L3 L4 L n 9 223 212.5 197.5 13 L n 9 235.5 225 208 14 10 235.5 225 208 14 11 248 237.5 218.5 15 12 260.5 250 229 16 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 12 273 262.5 239.5 17 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4

Environment

[mm] L3 [mm] L3 [mm] L3 [mm] 600 600 L3 25A1000 1000 Z 400 400 500 500 LEC 200 200 0 0 0 0 LEC S 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] LEC SS-T 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same

VQ7-6/7-8

EXH port) 4-1/8 39 P 21 SMC R2 R1 (R1, R2 port) 4-3/8 9 17 17 26.5 26.5 L Dimension n: Stations 1 2 3 4 5 6 7 8 9 10 Formula L1 107 150 193 236 279 322 365 408 451 494 L1 = 43n + 64 L2 119 162 205 248 291 334 377 420 463 506 L2 = 43n + 76 255 298 341 384 427 470 513 556 599 642 L3 L3 = 43n + 212 (215.5) (258.5) (301.5) (344.5) (387.5) (430.5) (473.5) (516.5) (559.5) (602.5) (645.5) L3 dimensions

VQ7-6/7-8

L3 = 43n + 212 (215.5) (258.5) (301.5) (344.5) (387.5) (430.5) (473.5) (516.5) (559.5) (602.5) (645.5) L3 dimensions inside ( ) are for MP 14 Series VQ7-6 Manifold Options Interface regulator Residual pressure release valve spacer AZ503-82 P A B A B ARB250-00Interface regulator 254 P A B ARB250-00127 SMC SMC 193.5 (165.5) 205.5 (177.5) 195.5 (167.5) 183.5 (155.5) Manual override E R Residual

Series KV2 Fittings

Mounting hole dimensions differ for 5/8: ID-6.3, OD=12.0 Male Double Y KV2UD_ _-_ _S P Applicable Tube (x4) M L2 D1 L1 A 4.2 Hex 8 Thread L3 Q D2 D3 L3 L2 M Min. Flow Dia. A* App.

VCW

Made to Order Specifications Non-leak (10 6 Pam 3/sec), vacuum (0.1 Paabs) specifications VCW X35 A L Oil-free specifications VCW X40 17-2-53 6 Series VCW Construction N.C.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

IN OUT Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts D C B A Applicable air combination model A B C D AC20-D 41.6 43.2 126.4 60.12 AC30-D 55.1 57.2 167.4 73.01 AC40-D 72.6 75.2 220.3 77.01 Combination example w L2 L3 (L3) (L3) L1 Modular mounting type 2-port solenoid valve JSXM21-AN301R-5G-U 4 pcs. Spacer with bracket Y200T-D 3 pcs.

KR

(mm) Note) Weight (g) D1 D2 L1 L2 A M L3 KGV04-M5 KGV04-01 KGV06-M5 KGV06-01 KGV06-02 KGV08-01 KGV08-02 KGV08-03 KGV10-02 KGV10-03 KGV12-03 KGV12-04 M5 x 0.8 2.9 6 14 26.5 18.5 3.8 3.8 14.5 22.5 9.8 20.5 11 15 4 10.4 13.4 22 16 8 2.9 1 8 M5 x 0.8 7 15 26 24 30 47 40 49 63 80 Reference dimensions after R thread installation.

Speed Controller with One-touch Fitting

1) Reference dimensions Note 2) Reference dimensions of threads after installation 559 AS Series For R, NPT thread Dimensions/ Elbow type Seal method: Sealant For R, NPT thread D3 Applicable tubing O.D. d D1 A L4 L3 M T L1 H (Width across flats) L2 Metric Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS221F-01-23(S)A 3.2 7.2 12 19.1

Ejector Valve Unit Series ZYY/ZYX 1

Number of mounting holes (N) = (L3/12.5 + 1): Decimal fractions are truncated DIN rail overall length (L1) = N x 12.5 + 23 [mm] Mounting screw length (L2) = L1 10.5 [mm] Rail length on one side (L4) = (L1 L3)/2 [mm] C1 Value Selection Separate wiring type 45 33 A NA Connector box type 4586 D-sub connector 25 pin type 45F 45P Flat cable type 54 Courtesy of Steven Engineering, Inc.-230 Ryan

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) Y L2 L2 max Size (mm) E3 = E1 = Y = 10 3 to 8 5 ( 8 Y) to (Y 1) Y-1 L1 L3 max X Size L2 = L4 = 10 9 (14 X) to (X 1) 15 3 to 9 6 ( 9 Y) to (Y 1.5) Y-1.5 3 to 14 X 1 L1 = 15 10 (18 X) to (X 1.5) 20 3 to 10 7 (10 Y) to (Y 1.5) Y-1.5 3 to 18 X 1.5 L3 = X = 20 10 (20 Xs) to (X 1.5) 30 5 to 13 8 (13 Y) to (Y 2) Y-2 3 to 20 X 1.5 30 12 (22 X) to (X 2) 40 7 to 15 9 (

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

/32-07A 9.6 9.4 26.5 25.4 23.5 22.4 13.3 6 11.5 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation 673 AS-FG Series For R, NPT thread Dimensions/ Elbow type Seal method: Sealant For R, NPT thread D3 Applicable tubing O.D. d D1 A L4 L3 M T L1 H (Width across flats) L2 Metric Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 1) M Weight [g] Unlocked

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

M5 x 0.8 10/32UNF 8 693 AS-FSG Series Dimensions: Elbow Type Seal method: Sealant For R, NPT thread Indicator window direction: 0 Indicator window direction: 180 D3 W1 W2 X Y Applicable tubing O.D. d A L4 D1 L3 M L2 L1 T H (Width across flats) Metric Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-23 (S

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Base mounted (with sub-plate) 53(32) 58(37) M5 x 0.8 54(33) Note) Value for DC.

Vacuum Unit

Symbol Note L V V Cannot be selected when e is N L1 None V L2 V None Cannot be selected when e is P or T L3 None None 4 For the connector length other than 300 mm, order the connector assembly on page 32 separately. t Vacuum (V) port y Option5 (For details on the Function/Application, refer to page 42.)

LEC-OM02704CN

PD09PD11(MBR) 4 39 4 4.12 (PE)( ) (PE) (di/dtdv/dt) EMCEMC(IB()67303) NFB MC CN2 L1 () L2 L3 L11 U U L21 V V M W W CN3 PE PE (PE) PE .

Series VQ Metal Seal/Rubber Seal Body Ported

Ambient and fluid temperature Effective area (Cv) Max. operating frequency (1) Note 1) As per JISB83751981 (Supply pressure: 0.5MPa) Dimensions Single unit Manifold Dimensions Equation L1=11n+20 n: Station (Max. 24 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 L1 L2 L3 31 50 60.5 86 112.5 123 108 125 135.5 119 137.5 148 141 162.5 173 97 125 135.5 130 150 160.5 152 175 185.5 53 75 85.5

VM

Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9

ISO Cylinder

Auto Switch Made to Order 62 C75 Series Dimensions of Accessories Rod End dH7 45 d3 b1 b3 l l3 d7 d6 h [mm] Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 32 KJ10DA 14 10.5 10 28 19 43 20 15 M10 x 1.5 13 40 KJ12DA 16 12 12 32 22 50 22 17 M12 x 1.75 13 Floating Joint: JA M M U U D F G H B P E A [mm] Bore size Part no.