Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

Table of Contents

PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.

Vacuum Unit

Note Example Symbol Type E J K L P W Nil Without option V V V V B With DIN rail mounting bracket4 V V V V ZK2C10R5NC1A-08 ZK2C07R5NC1A-08 D With common release pressure supply (PD) port V V V 5 V Cannot be selected ZZK204A-A1P-B when r is N L Manifold individual supply specification V V V 5 V Individual supply port 1 2 3 Stations D side U side 3 When more than one option is selected

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

J79W F7BA 200 V 100 V Relay, PLC Yes 2-wire 12 V Connector 24 V Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Yes Relay, PLC 24 V Water resistant (2-color indication) 12 V 2-wire Grommet With diagnostic output

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing

SMC Basic Pneumatics

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

SZ3000

26 pins) 2n1-M5 x 0.8 [4(A), 2(B) port] With external pilot 4One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8 13.3 (Pitch) P = 10.5 13.3 24 24 16.2 16.2 17 36.7 SV 34 34 B 2 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 SZ P 1 P 1 P 1 P 1 A 4 A 4 A 4 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 SY 2n2One-touch fitting [4(A)

%silltr

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

LEC-OM07605CN

B1 B1 VAR U B DC24V VAR U B DC24V B2 B2 B1B2(VAR) (2) (3) (a) R[]:() L[H]:() Vb[V]: DC24V U Vs[V] N () 14.1.2 14 2 14.

CJ2

V 100 V 2-wire Yes Yes 12 V Relay, PLC Connector 24 V With diagnostic output (2-color indication) A79W Grommet 3-wire (NPN) 3-wire (PNP) F79 F7P J79 F79W F7PW J79W F7BA F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 5 V, 12 V IC circuit Relay, PLC Diagnostic indication (2-color indication

SX

0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) FG SG B A FG SG B A FG SG B A SG B A 24 V 0 V Power supply FG Transmission line Twisted pair wire with shielding Master unit SI unit SI unit Terminal resistor Terminal resistor FG DG DB DA FG DG DB DA DG DB DA SLD FG b) 3-wire type Twisted pair wire with shielding Type 3 ground Type

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

2/3 Port Valve

) V, R R (Non-leak) T Aluminum, Silver Insulating oil A Polyacetal B Non-leak (105atm cc/sec or less) V, R Aluminum, Copper V(Non-leak) X Perchloroethylene A H Stainless steel Brake oil B Helium V Note 1) Grease has been applied to the core part of option symbol "D" and "Standard".

LEC-OM02704CN

AED ( () 150 1. 2. ) 15.12.5 (A37)(A37) 1 Spd Acc Dec 15 112 16. 16 .2 16.1 .2 16.1.1 .2 16.1.2 .4 16.2 .5 16.3 .5 16.4 .5 16.5 .6 16 1 16. 16 16.1 16.1.1 ( ) (1) (B1B2) B1 B1 DC24V DC24V VAR U B V VAR U B DC24 V DC2 4 B2 B2 B1B2 (2) (3) (a) R[]:() L[H]:() Vb[V]: U DC24V Vs[V] N () 16.1.2 16 2 16.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

15

SANMOTION R R2 V V OMRON Corporation Sysmac G5 R88M-K V V Panasonic Corporation MINAS-A4 MSMD V V MINAS-A5 MSMD/MHMD V V FANUC CORPORATION is V V (1 only) V NIDEC SANKYO CORPORATION S-FLAG MA/MH/MM V V KEYENCE CORPORATION SV SV-M/SV-B V V FUJI ELECTRIC CO., LTD. ALPHA5 GYS/GYB V V FALDICGYS V V ORIENTAL MOTOR Co., Ltd.