ZP3

type with groove: 4 to 16 Bellows type: 4 to 8 Bellows type with ribs: 10 to 16 Vacuum inlet direction Vertical T Type/ZP3-T ZP3-T(J/K)-B ZP3-TJB-B ZP3-TK(15/20)-B ZP3-T-(02/04/06) ZP3-T-(U2/U4/U6) y o o y t t u u i y t u Component Parts e e No.

Possible to transfer a workpiece at low-speed.

Change of double shaft length Change of double shaft length XA38 K 10, 15, 20, 30, 40 MRQ K J XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination

MY1

head plug) 2-M5 x 0.8 (Hexagon socket head plug) MY1CG MY1CG (mm) LH A B C G GA GB H K J LD L LL LW M MM N NC Model A B C G GA GB H K J LD L LL LW M MM N NC LH 6 16.2 6 M4 x 0.7 MY1C16 22.5 80 3.5 13.5 8.5 40 10 M5 x 0.8 3.6 80 40 54 20 14 7.5 20 7.5 MY1C20 23 100 4.5 12.5 12.5 46 12 M6 x 1 4.8 100 50 58 M5 x 0.8 25 17 (mm) NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW MY1C16 MY1C20 NE NW PA

JXCx-OMU0004

[mm/s] 20 2] 100 [mm/s [mm/s] 20 2] 500 [mm/s [mm] 1 3 LESH**J 20mm/s LESH**K 10mm/s LESH8R LESH16R LESH25R J K J K J K 4 6 15 23.5 43 77 7 10.5 25 39 71.5 128.5 [N] 10 15 35 55 100 180 *20%F.S.

TABLE OF CONTENTS

Housing J Yoke For Leads Y Non-molded coil or Molded Mounting Bracket B Series 20 E.P.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R R 40.7 25 9.3 B B B B B B B B X X P P 18.7 7.7 A A A A A A A A 18.1 P = 10.5 31.5 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 57.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R R 40.7 25 9.3 B B B B B B B B X X P P 18.7 7.7 A A A A A A A A 18.1 P = 10.5 31.5 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 57.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

CY1S15/20/25/32/40 14 (mm) J x K B C D d EA EB FA H HA HG HP HT HS HB GP G FB A L Model CY1S15 CDY1S15 CY1S20 CDY1S20 CY1S25 CDY1S25 CY1S32 CDY1S32 CY1S40 CDY1S40 M6 x 1.0 x 9.5 7.5 9.5 5 16.6 12 6 13 3 40 29 13 39 21 15 1 52 6.5 6 60 M6 x 1.0 x 9.5 10 9.5 5.2 21.6 16 46 36 17 45 20 25.5 4.5 62 8.5 70 M8 x 1.25 x 10 10 11 6.5 26.4 16 8 14 4 54 40 20 53 20 23 9 70 8.5 7 70 M10 x 1.5 x 15

JIS Standard Hydraulic Cylinder

x 1.5 C B-series M6 x 1.0 M8 x 1.25 40 145 115 75 60 E 31.5 30 20 24 M30 x 1.5 dH10 L L M6 x 1.0 M8 x 1.25 40 145 115 75 60 31.5 30 20 24 M39 x 1.5 M8 x 1.25 M10 x 1.5 50 185 145 95 80 40 40 25 26 M48 x 1.5 H +0.4 +0.1 D M5 x 0.8 M6 x 1.0 25 76 60 41 32 16 16 12.5 20 M16 x 1.5 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 20 16 20 M20 x 1.5 B J M6 x 1.0 M8 x 1.25 40 145 115 75 60 31.5 30 20 24 C-series

CL

range (mm) Bore (mm) AL B B1 BN BP BQ C D E F GA GB GC GD GL GR H1 J A Without rod boot to 500 to 600 to 600 to 750 to 750 With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 MXW 40 50 63 80 100 27 32 32 37 37 60 70 86 102 116 96 108 115 129 140 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 113 124 15 17 17 21 21 26 27 26 30 31 54 59 67 72 76 10 13 18

MXS

0 A B NN-M4 X 0.7 thread 8 deep MGG 4 MGC 1 MGF 7 7 6.5 3.2 CY1 A B 11 5.5 5.5 11 MY1 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L

CQ2

W/o auto switch B L L1 With auto switch Bore (mm) 5st 10 A 20 20 20 20 5st 10 5st 10 5st 10 32 48 58 12 33.5 58 68 17 38.5 40 64.5 12 33.5 64.5 74.5 17 38.5 45.5 50 67.5 77.5 18 43.5 87.5 97.5 28 53.5 Rod end male thread Double clevis (mm) A Without auto switch B CL A B CL With auto switch Bore (mm) Double clevis/CQ2D, CDQ2D 5st 10 20 20 20 20 20 20 5st 10 5st 10 5st

MXS Series Air Slide Table

B 11 5.5 5.5 11 H (NN-1) X H G Cross section BB Cross section AA (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5 83.5 99.5 M 42 52 62 84 100 ZZ 48 58 68 90 106 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 67 MXSIL Series Air Slide Table (Symmetric

MXQ

Retraction End E1 D E H H F G B J C A K MXQ-BT20(L) MXQ-BT25(L) MXQ-BT8(L) MXQ-BT12(L) MXQ-BT16(L) (mm) Stroke adjustment range (mm) Applicable size A B C E1 G H J K 1) E D F Model MXQ8(L) MXQ-BT8(L) M8 x 1 M3 x 8 5 40.8 14 12.5 1.4 24.5 12 20 23 8 MXQ12(L) MXQ-BT12(L) M8 x 1 M4 x 10 6 40.8 16 16 1.4 29 12 18 28 10 MXQ16(L) MXQ-BT16(L) M10 x 1 M5 x 12 7 46.7 17 20 1.4 35.5 14 22 33.5 12 MXQ20

Air Cylinder

CS1 CS2 Direct Mount Type (CG1R, CG1KR) (mm) D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-H7lW D-H7NF D-H7BA D-H7l D-H7C Auto switch model D-C7l D-C80 D-C73C D-C80C D-G59F D-G5NT D-B5l D-B64 D-B59W D-A9l D-A9lV Bore size A B A B A B A B A B A B A B 20 12 24 8 20 7.5 19.5 8.5 20.5 4 16 2.5 14.5 5.5 17.5 25 11.5 24.5 7.5 20.5 7 20 8 21 3.5 16.5 2 15 5 18 32 13 25 9 21 8.5 20.5 9.5 21.5 5 17

Vacuum Unit

K V V J V1 R V2 V V V B V None (SI unit only) C V V D V None (SI unit only) E Pressure switch for vacuum 0 to 101 1 Install the release valve or vacuum breaker in the middle of the vacuum piping. 2 Supply valve maintains vacuum by energization (20 ms or more). Stopping the vacuum turns on the release valve. Refer to the precaution on page 44.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

15 17 20 25 118 139 167 202 14 16 19 24 15 17 20 25 Single Shaft Type The dimensions below show pressurization to B port

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

DKeyway dimensions l b D (g6) D (g6) DD (h9) Port size Rc Model Model A B C F H J K S U W BA BB G M N UU L CA CB 20M8 x 1.25 Depth 8 144 (177) CRA1BW50 CRA1BS50 1/8 62 48 46 15 2.5 36 5 98 17 17 8.5 8.5 13 15 11 20 15 118 14 25 5 0 0.030 25 M10 x 1.5 Depth 12 163 (201.5) CRA1BW63 CRA1BS63 1/8 76 60 57 17 2.5 41 5 117 19.5 20 10 10 14 17 13 22 17 139 16 30 6 0 0.030 30 M12 x 1.75 Depth 13

2 Phase Stepper Motor/Without Motor Brake Series LXS

(B contact) S N.C. (B contact) Lead screw lead N.C. (B contact) A B 6mm 12mm N.C. (B contact) N.O. (A contact) N.O. (A contact) Stroke N.O. (A contact) 50 75 100 125 150 50mm 75mm 100mm 125mm 150mm Use a driver with CE marking. N.O.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

H I J K Stroke 5 5 D C 20 +38 +10 +28 I 30 +48 +20 40 +84 +30 +54 50 +94 +40 J H F Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Y 2.5 A B Stroke 20 to 50 mm Dimensions: 10 mm Stroke (mm) A B C D F H I J Y Model ZPT40F10-B01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-B01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional Dimensions by Stroke (mm) I J H Stroke 20 +10 +5.5 0 30