VFR5000-OMN0001

(1) B+(3) B-(4) A B VFR510 A COM A B VFR520 A COM B 3 A COM B VFR5 40 5 8 VFR5000-OMN0001 VFR5000 Series/ (VFR500) (VFR510) VFR500 VFR510 () () 2.8Nm ) AC DC24V 3 (AB) (N.C.)

VFR2000-OMM0001

(N.O.)3 3 B 1.VFR200 2.VFR210 P8 0.9Nm -10No.VFR2000-OMM0001 ) ARBF2000 P 1.0MPa 1) 0.05to0.83MPa 2) -5to60oC ()3) M5X0.8 (kg) 0.16 PA 5.5 (mm2) P1=0.7MPa,P2=0.5MPa S PB 5.1 DIN DIN DIN DIN / / / / AEA 12 (mm2) DIN 180 P2=0.5MPa S BEB 11 )0.9MPa ) )50oC )2 ) P A B -11 No.VFR2000-OMM0001 01C 01T COM A (A B B AB ) COM AB+ BVFR2100 A COM VFR2200 A COM B 3 400 5 A COM

VFS4000-OMY0001

(1) 5 No.VFS4000-OMY0001 (2) 6 No.VFS4000-OMY0001 3 VF4000-9A B 4 () () 7 No.VFS4000-OMY0001 5 1) DIN DIN (+,-) AC DC100V DC24V 810 3 1.25Y-3L1.25-3.5S1.25-4M 0.6Nm 0.6Nm COM (DIN No.3), 8 No.VFS4000-OMY0001 2) , , 1.25-3.5M1.25Y-3L1.25-3M +0.6Nm 3) 1.25-31.25-3S1.25Y-3N1.25Y-3S +0.6Nm 9 No.VFS4000-OMY0001 /01 A+ AB+ BVFS4100 A A VFS4200 A A B

Size: 1/8, Reverse Flow Function: Standard, Thread: M Thread, Rc(PT), Port Size: 1/8, Accessory 1: C [Float Style Auto Drain (N.C.)], Accessory 2: None, Option 1: Metal Bowl, Option 2: None, Option 3: Flow Direction: Right->Left

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Process Pump

Diaphragm Assembled in a clean room.

Precision Regulator

Fluororubber is used for rubber seal materials. 80 IR 0 Ozone resistant X170 IR 0 Compatible with modular connection brackets Modular Combination Example Description Applicable model IR100--X170 AF20-A AFM20-A Y200-A Y200T-A IR20--X170 AF30-A AFM30-A Y300-A Y300T-A IR30--X170 AF40-A AFM40-A Y400-A Y400T-A qRegulator wAir filter eMist separator rInterface tInterface with bracket Note 1) The

rep-modular-e

Hold the element with a spanner to rotate it counterclockwise and remove the element. Spanner Nominal: 7 AFM20 AFD20 Assembly 3) Mount the element. Hold the element with a spanner to rotate it clockwise and mount the element. Refer to the Check item for the tightening torque. Tightening torque: 0.35 0.05 Nm Spanner Nominal: 7 4) Remove the bowl assembly.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Hold the element with a spanner to rotate it counterclockwise and remove the element. Spanner Nominal: 7 AFM20 AFD20 Assembly 3) Mount the element. Hold the element with a spanner to rotate it clockwise and mount the element. Refer to the Check item for the tightening torque. Tightening torque: 0.35 0.05 Nm Spanner Nominal: 7 4) Remove the bowl assembly.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

This is a legacy product, and replaced byAFM20-01C-C-A, MIST SEPARATOR, MODULAR, AIRLINE EQUIPMENT, AFM MASS PRO, CA, AFM 1/8INCH MODULAR (PT), .44431 lb

This is a legacy product, and replaced byAW20-01C-C-B, FILTER REGULATOR, MODULAR, AIRLINE EQUIPMENT, AW MASS PRO, CA, AW MASS PRO 1/8 MODULAR (PT), 0.79366 lb

This is a legacy product, and replaced byAFM20-01C-D AFM MASS PRO. MIST SEPARATOR. AIRLINE EQUIPMENT. AFM 1/8INCH MODULAR (PT). .60478 lb. CA.

Series: AFM, Body Size: 20, Thread: Rc, Port Size: 01 (1/8), Mounting: w/o Mounting Option, Float Type Auto Drain: C [N.C. (Normally Closed)], Bowl Type: Polycarbonate Bowl, Bowl Guard: C (w/Bowl Guard), Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -