Electric Actuators

a program/step with no commands. 37 Invalid movement command 38 Trying to execute a command other than MOVA, MOVI, or ASET with a step (position movement) designated operation.

Intrinsically Safe Valve

type 53-SY7000 Nil F N T Rc Thread piping A, B port size 2-position single only 53-SY9000 G NPT Symbol Port size Applicable series Type of actuation NPTF 01 02 02 03 53-SY5000 1/8 2-position single (A) 4 2 (B) 53-SY7000 1/4 1 1/4 53-SY9000 1 (P) (EA) 5 3 (EB) 3/8 One-touch fitting (Metric size) Note) 2-position double F2: With side bracket 2 (B) (A) 4 Symbol Port size Applicable series 2

Speed Controller with Indicator

48.3 44.2 42.8 13.3 21.5 24 7.8 16.2 23 (24) AS221FS-02-04 (S) 4 8.2 AS221FS-02-06 (S) 6 10.4 23.4 32.7 (32.8) AS221FS-02-08 (S) 8 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-10 (S) 10 15.9 26.9 36.2 (36.3) 15.6 25 (26) AS321FS-02-06 (S) 6 1/4 17 (17.5) 13 13.3 10.4 21.8 32.1 36.4 63.1 61.7 57.9 56.5 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-08 (S) 8 13.2 22.7 33 14.2 AS321FS-02-10 (S) 10

VQ7-6/7-8

03 C10 02 03 C12 Enter only when using for a 2 position single or double.

LEC-OM07605CN

A b . A b . A 1 2 3 1 b012 Ab. 0 1 b b . A b .

Table of Contents

+ Stroke B + Stroke Dimensions GB 40 63 100 A B Bore size (mm) 36.5 58 48.5 GB 38 73 61.5 38 78 66.5 Dimensions other than the above are the same as standard products.

LEC-OM02704CN

B CCW CW A A 0 B B A A 1 B B 0 1 2 2PA15 PC20 *SNO RS-422USB 11 0 0 31 PC21 *SOP RS-422 RS-422 0h 0 0 RS-422 09600[bps] 119200[bps] 238400[bps] 357600[bps] 4115200[bps] RS-422 RS-422 0 1 800s RS-422 0 1800s PC22 *COP1 C-1 0h 0 0 0 02 14 LE-CSE-2, LE-CSE-5, LE-CSE-A 2 1(A16) 2(A20) 02 14 4 MR-EKCBL30M-L MR-EKCBL30M-H MR-EKCBL40M-H MR-EKCBL50M-H 2 1(A16) 2(A20) 6 24 6 PC23

Proposals for Energy Saving

06 VM230-02-06S Polyacetal roller Hard steel roller Cross roller plunger VM230-02-07 VM230-02-07S Toggle lever VM230-02-08 VM-30AR Red VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y Push button (Mushroom) VM-30AB Black VM-30AG Green VM-30AY Yellow VM-32AR Red VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y Push button (Extended) VM-32AB Black VM-32AG Green VM-32AY Yellow A set of

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP This is used when changing piping location.

44

Stainless Steel 316 Fittings KFG2 Series RoHS Compact and Light Compact and Light Compact and Light KQ2 KQB2 Approx.44% KS KX New New Current model Shorter Dimensions KM KFGL0806-02S KFG2L0806-02 KFG2L0806-02 31.2 mm 17 .4 mm KF Approx.37% M Lighter Weight H/DL L/LL KFG2L0806-02 KC 38 g 24 g KK KK130 Material DM KDM KB Grease-free/Can be used with steam.

Series SV

connector 51 22 9.5 18 18 5-Rc 1/4 (Piping port) 28 93 Series SV Single Valve/Sub-plate Type Dimensions: Series SV3000 1in = 25.4mm 2 position single/double [M12 waterproof connector type] SV300(R)-W-02, 03 21 22.5 13.5 86.2 M5 x 0.8 (External pilot port) 71.9 10.4 2-4.3 (Mounting hole) M5 x 0.8 (Pilot EXH port) 21 21.5 A B PE 38 46 SMC A B A B B A X Manual override

HEC-OM-S008

31 32 35 30 30 03 3F 38 0D Answer 25.0 deg.C. 31 Temperature setting (without writing FRAM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38

VFS

A A A B B B P P P 1.0 MPa 1.5 MPa Set pressure range (1) 0.1 to 0.83 MPa 0.05 to 0.83 MPa Ambient and fluid temperature 5 to 60C (No freezing) Port size for connection of pressure gauge Weight (kg) Effective area at supply side (mm2) (2) S at P1 = 0.7 MPa, P2 = 0.5 MPa Rc 1/8 M5 x 0.8 0.16 5.5 5.1 P A P B 12 11 A EA B EB 0.83 38 40 11 12 26 24 32 31 21 18.5 35 31 44 38 90 77 0.46 18.5

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

VQ7-6/7-8

2-3/8 P port 1/4, 3/8 VFN 2 position double : VQ7-6-FG-D-SC double (Reverse pressure): VQ7-6-YZ-D-SC 3 position closed center : VQ7-6-FHG-D-SC exhaust center : VQ7-6-FJG-D-SC pressure center: VQ7-6-FIG-D-SC 145 155 76.5 68.5 68.5 86.5 50 50 50 50 Manual override Manual override 13 (A port) 13 (B port) 13 (A port) 13 (B port) A B A B 38 50 62 38 50 62 B A B A R1 (L 500) Cable with connector

2/3 Port Valve

Insulation Electrical entry Options 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) 5 (24V) 6 (12V) Class B Class H G S L, Z S L, Z 1 (2mm) 2 (3mm) 3 (4.5mm) 4 (6mm) C D, T G, C S T (1) VX22 VX23 VX21 01 ( ) 02 ( ) 02 ( ) 03 ( ) 02 ( ) 03 ( ) 1 8 1 4 1 4 1 4 38 AC 38 Ordering Example (Example) Series VX22, Orifice size 4.5mm, Rc(PT)1/4, 100V AC conduit (Part number) VX2232-02

VFA3000

port) 3 (Breathing port) 5 x , 14 38 (Piping port) 5 x , 14 38 (Piping port) 3 position closed center/exhaust center/pressure center: VFA3 40-X1 3 4 5 02 03 2 x 4.3 2 x 18 (Mounting hole) (Pilot port) Breathing port 5 x , 38 14 (Piping port) 1766 5 Port Air Operated Valve Series VFA5000 How to Order Port size 02 03 1 4 3 8 Body ported VFA5 1 20 03 Base mounted VFA5 1 44 03 1(P) port location

Compact 5-Port Solenoid Valve

2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

A_HEC-OM-J017

Temperature setting (without writing EEPROM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 31 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38 30 03 3C 3C 0D Answer ERR11 Answer -1.52 deg.C

VM

VM220-02-30B VM-30AG Green VM220-02-30G VM-30AY Yellow VM220-02-30Y VM220-02-32R VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y VM-32AR Red Push button (Extended) VM-32AB Black VM220-02-32B VM-32AG Green VM220-02-32G VM-32AY Yellow VM220-02-32Y With a set of red, black, green, yellow VM-33A Push button (Flush) VM220-02-33 VM230-02-33 VM230-02-34R VM230-02-34B VM230-02-34G VM230-02-34Y