Air Fittings & Tubing

(inch) Thread UNF NPT Min. hole dia. <10-32UNF> (1) <10-32UNF> L2 A M Part No. H (Hex.)

Air Slide Table

(Shock absorber only) MXQ6(A) 29.9 16 3 14 3 10 RJ0603N MXQ8(A, C) MXQ6B 29.9 15 3 13 2.2 10 MXQ12(A, C) MXQ8B 47.3 29 15 29 13 11 RJ0805U-X2300 MXQ16(A) MXQ12B 52.8 31 14 30 13 13 RJ1006U-X2300 MXQ20(A) MXQ16B 52.8 23 8 26 9 13 RJ1007HU-X2300 MXQ25(A) MXQ20B 77.1 46 24 45 24 18 RJ1410U-X2300 For the MXQ6(A, B) and MXQ8(A, C), only the adjustment nut is long.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SX3000-75-1A SX5000-76-5A 10-SY3000 10-SY5000 M2: 0.16Nm M3: 0.8Nm M4: 1.4Nm 463 Base mounted 10-SY3000/5000 Type 45 Dimensions: Series 10-SY3000 Note) [ ]: AC 10-SS5Y3-45Stations DC4,N3 C6,N7 10-SS5Y3-45Stations UC4,N3 C6,N7 (Pitch) (Pitch) P = 10.5 DIN rail release button DIN rail release button 24.8 13.5 21.7 P=10.5 24.8 13.5 11.2 22.2 11.2 R R A A A A A A A A A A 10.2 25.2 22.2 10.2 25.2

Made to Order

Without auto switch magnet Bore size 20 to 32 With auto switch magnet Bore size 32 T G With auto switch magnet Bore size 20, 25 L A + Stroke A G L Bore size (mm) T 125 stroke or more 10 10 10 10 10 125 to 300 stroke 12 22 23 23 25 27 75, 100 stroke 50 56.5 58.5 64 73.5 85 125 to 300 stroke 67.5 77 78.5 80 91 102.5 100 stroke or less 5 5 5 5 5 100 stroke or less 4.5 5 7 17 18 18 20 22

F

Applicable Thread Model H D1 D2 L1 L2 A M Minimum Weight Tube OD UNF (Hex) Hole (g) (Inch) NPT Diameter 1/8 1/16 KQT01-33S 11.11 9.6 10 17.5 21.5 22.5 15.5 2.5 10 1/8 1/8 KQT01-34S 11.11 9.6 10 17.5 21.5 22.5 15.5 2.5 10 1/8 1/4 KQT01-35S 14.29 9.6 10 17.5 25.5 24.5 15.5 2.5 20 5/32 1/16 KQT03-33S 11.11 10.4 10 18 22 23 16 3 10 5/32 1/8 KQT03-34S 11.11 10.4 10 18 22 23 16 3 11 5/32 1/4 KQT03

Table of Contents

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

CXWM/CXWL

For dimensions of 25 stroke, refer to page 8-26-20. 12.5 15 15 10.5 12.5 15 15 10 23 23 12.5 15 12.5 15 15 17.5 15 17.5 15 17.5 15 17.5 9 17.5 14 16 22 23 23 24 22 23 23 24 Note 2) For 25 stroke, the shock absorber is mounted on a single side of the plate.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

) 20 20 20 2-2.6 (For mounting) (2.3) (2.3) 20 (2.3) 23 23 23 23 27 Refer to page 563 for dimensions with connector cable. 519 10-SYJ5000 5 port solenoid valve Series 2 position double [ ]: AC G H Grommet (G), (H): 10-SYJ5223-M5 Built-in One-touch fitting 10-SYJ5223G H C4,N3 C6,N7 G: Approx. 300 H: Approx. 600 (Lead wire length) 87.2[91.6] 43 3.5 11 5 B A B A 19 10 10.6 Manual override

ZP

A r Buffer stroke t Vacuum inlet y Width across flats M Connection thread S 10 91 57 23 20 129 67 51 30 139 77 40 175 87 77 50 185 97 10 13 46 29.9 21 P 10 8 M5 x 04 06 2.5 10 91.5 57.5 0.8 23 20 129.5 67.5 51 30 139.5 77.5 40 175.5 87.5 77 50 185.5 97.5 Applicable tubing O.D.

2/3 Port Valve

OAllowable voltage fluctuations is 10% of the rated voltage. OExchange from AC to DC and DC to AC is impossible because of a different core shape. VXD21 0, 22 0, 23 0 are possible to exchange coil from AC to DC, but impossible from DC to AC. (DC may generates hum sound because of a shading coil.)

SQ1000/2000

A 1 () Station 1 SOL. A Station 2 14 () SOL. A Station 3 2 () 1 SOL. A Station 4 14 15 () 2 15 SOL. A 3 3 () Station 5 16 SOL. B 4 16 () 17 5 SOL. A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

1

Construction ZZ CXW 20/32 M L A 10 ZZ 15, 16, 25 (mm) A (Max.)

Table of Contents

M5 x 0.8 (Finger opening port) 15 Auto Switch Mounting Groove Dimensions 10 0 0.05 5 9 10 6.2 23 Auto switch mounting groove 5 For single action, the port on one side is a breathing hole.

ZP

Model A B C D Y Y B C D Flat A Model ZPT10D-B5-A10 10 12 15 24 6 Flat with ribs U C ZPT13 -B5-A10 U C ZPT16 -B5-A10 U C ZPT16D-B5-A10 ZPT10 -B5-A10 16 18 16 25 7 10 12 1.7 12 21 3 13 15 1.8 Dimensions by Stroke 16 18 12.5 21.5 3.5 1.2 10 16 G Model Dimensions by Stroke E F E F 10, 13 16 ZPTD10-B5-A10 35.5 23 71.5 36.5 72.5 G Model E F E F ZPTD20-B5-A10 45.5 109.5 46.5 110.5 51 U C ZPT 20-

ZP

C J H F I Hexagon width across flats 8 M5 x 0.8 J H F Hexagon width across flats 10 Hexagon width across flats 2 Hexagon width across flats 12 M8 x 1.25 Y D C Hexagon width across flats 12 Hexagon width across flats 3 2 A B 3 2 A B Dimensions: 10 mm Stroke (mm) With a stroke of 10 mm A B C D F H I J Y Model ZPT10F10-B5-A10 10 12 10 12.5 27 38.5 74.5 1.5 ZPT13F10-B5-A10 13 15 23 10.5 13 27.5

Hydraulic

W W FY B D E d MA M a NB C F A K NA B S + Stroke FT H FX ZZ + Stroke FZ With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C d F FD FT FX FY FZ G GA GB J K M MA MM NA NB P R D E 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 23 10 60 44 18 25 9 10 77 44 95 14 17.5 9.5 M8 x 1.25 18 16 20 M14

V100

port) VP 35.6 28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

With Rod End Lock With Head End Lock Bore size (mm) Q Bore size (mm) Q L L F B B A A Standard stroke Standard stroke 7 7 8 8 10 20 12 22 12.5 14 14 15.5 18 19 22 23 10.5 11 10.5 15 16 19 23 23 7 7 8 8 10 20 12 22 7.5 8 10.5 10.5 12.5 19 13 23 65.5 75 75.5 77 111 116 120.5 125.5 58 64.5 65.5 71 103.5 116 113 125.5 72.5 82 83.5 85 121 136 132.5 147.5 65 71.5 73.5 79 113.5 136 125 147.5 32 40

C85

D-H7C D-H7W D-H7BAL D-H7NF NCM D-A79W 13.3 13.3 10 A B 26 NCA D-J79C Bore 17 Hs D-X B 8 (5) 2 4 (2) 5.5 (3.5) A B 2 2 (2.5) 3 (4) 9 (6) 3 5 (3) 6.5 (4.5) B 3.5 3.5 (4) 4.5 (5.5) A 2 2 (2.5) 3 (4) A 3.5 3.5 (4) 4.5 (5.5) B 4 4 (4.5) 5 (6) 11 (8) 5 7 (5) 8.5 (6.5) B 3 3 (3.5) 4 (4.5) 10 (7) 4 6 (4) 7.5 (5.5) A 4 4 (4.5) 5 (6) A 3 3 (3.5) 4 (4.5) 1 D-F7V D-F7WV D-F7BAVL 8 10 12 7 23 A B 2015

TABLE OF CONTENTS

A Three Way Valve or a Two Way Normally Open Valve is operating at a high cycle rate (greater than 200 C.P.M.) 4. A Three Way Valve or a Two Way Normally Open Valve is operating at a long duty cycle (such as On Time=1 hour, Off Time = 10 minutes) 5.