Electric Actuator/Slider Type

LL FV M M FV Included parts Flange Body mounting bolt FZ FX 4 x FD FT FT FZ FX 4 x FD Rod/Head Flange [mm] Size FD FT FV FX FZ LL M 25 5.5 8 48 56 65 6.5 34 32 5.5 8 54 62 72 10.5 40 63 9 9 80 92 108 28.4 60 Material: Carbon steel (Nickel plated) The LL measurement is when the unit is in the Z-phase rst detecting position.

Made to Order

(Flange shape and FV-dimensions are only different from the standard type.) Applicable Series Series Description Model Action Vol. no.

15

LEL LL LEM M FV FV M LEY LES Included parts Flange Body mounting bolt FZ FX FZ FX 4 x FD 4 x FD FT FT LEPY LEPS Rod/Head Flange LER [mm] Size FD FT FV FX FZ LL M LEH 25 5.5 8 48 56 65 4.5 34 32 5.5 8 54 62 72 8.5 40 63 9 9 80 92 108 24.4 60 LEY -X5 11LEFS Material: Carbon steel (Nickel plating) * The LL measurement is when the unit is at the retracted stroke end position. 11LEJS 25AA B

Integrated Controller

M FV M FZ FX FT FX FZ 4 x FD FT 4 x FD The head flange type is not available for the EQY32.

MU

12 16 18 21 24 LZ 23 27 31 37 48 LY 56 71 89 109 129 LX 11 12 15 18 22 LT 3.2 4.5 4.5 5 6 LS 79 90 96 116 123 LH 29 37 46 57 67 LD 5.5 6.6 9 11 13.5 Model MUL25 MUL32 MUL40 MUL50 MUL63 CUJ CU CQS LS + Stroke ZZ + Stroke CQM Rod side flange style Head side flange style CQ2 RQ MU D-X 20Data ZZ + Stroke (mm) ZZ 99 106 114 139 145 FZ 24 28 32 39 50 FY 66 82 102 126 148 FX 14 16 18 22 30 FV

Plate Cylinder with Lock Series MLU

(mm) FV FT FX 76 94 118 144 FY 14 16 18 22 FZ 66 82 102 126 ZZ MLUF25, MLUG25 MLUF32, MLUG32 MLUF40, MLUG40 MLUF50, MLUG50 FD Model 8 8 9 12 24 28 32 39 5.5 7 9 11 134 148 158 189.5 FT FZ FX 2-FD Rear flange FY FV FT FZ FX ZZ + Stroke Single clevis Double clevis CDH10 Q + Stroke CX CX -0.2 -0.4 +0.4 +0.2 L Z + Stroke RR -0.1 -0.3 CZ ZZ + Stroke (mm) CX CZ 17 22 27 32 Q RR 143 162 176 209.5

Compact End Lock Cylinder Series CBQ2

size (mm) L L1 A A FV M 80.5 73 7 28.5 32 90 79.5 7 28.5 40 4-FD FT L 92.5 82.5 8 33.5 50 B + Stroke A + Stroke FZ FX 94 88 8 33.5 63 Rod end male threads Dimensions other than A, L and L1 are the same as the front flange type.

3 Position Cylinder Series RZQ

M Bore size (mm) AR AH B FD FT FV FX 100.5 108.5 82.5 5.5 56 8 50 32 110 118 92 5.5 62 8 56 40 L B + Full stroke FX FZ AR + Full stroke 118.5 127.5 96.5 6.6 76 9 67 50 130 139 102 9 92 9 90 63 Bore size (mm) Rear flange type/RZQG FZ L M 4-FD 65 18 34 32 72 18 40 40 90 22 50 50 108 28 60 63 FV M M L B + Full stroke FT FZ AH + Full stroke Double clevis type/RZQD (mm) Double clevis CT Cap bolt

MU

LS 79 90 96 116 123 LX 11 12 15 18 22 X 12 16 18 21 24 Model MUL25 MUL32 MUL40 MUL50 MUL63 LH 29 37 46 57 67 LT 3.2 4.5 4.5 5 6 LZ 23 27 31 37 48 Axial foot MUL25SMU25, #2 (#1+#2+#11) MUL32SMU32, #2 (#1+#2+#11) MUL40SMU40, #2 (#1+#2+#11) MUL50SMU50, #2 (#1+#2+#11) MUL63SMU63, #2 (#1+#2+#11) CU CQS CQ2 MU (mm) ZZ 99 106 114 139 145 FZ 24 28 32 39 50 FY 66 82 102 126 148 FX 14 16 18 22 30 FV

CL

across flats B1 CNG l h + l S + Stroke ZZ + Stroke MNB ZZ + l + Stroke CNA 125 to 160 CNS CLS With rod boot A Rc BP lock-up port Unlocked when pressurized CLQ GC B Rc BP lock-up port 4-FD 4-J 2-Rc P MLGP RLQ BF e MLU ML1C Plug cap 2 positions l h + l ZZ + l + Stroke S + Stroke ZZ + Stroke D-X 20Data Stroke range (mm) Bore size (mm) A AL B B1 BF BX BY C D BP EA EB F FA FD FT FX FY FZ FV

Compact Cylinder

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com LZ Y X M FV 20, 25 32 to 63 (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw Bore size (mm) Bore size (mm) DH11 M FD FL FT FV FX FY FZ L LD LH LT LX LZ M R X Y 20 25 32 40 50 63 20 25 32 40 50 63 7 16 8 22 36 22 4 16 22 6.6 2.8 8

1

(Flange shape and FV-dimensions are only different from the standard type.) Applicable Series Series Vol. no.

CL

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA 125 to 160 CNS CLS With rod boot A Rc BP lock-up port Unlocked when pressurized CLQ GC B Rc BP lock-up port 4-FD 4-J 2-Rc P MLGP RLQ BF e MLU ML1C Plug cap 2 positions l h + l ZZ + l + Stroke S + Stroke ZZ + Stroke D-X 20Data Stroke range (mm) Bore size (mm) A AL B B1 BF BX BY C D BP EA EB F FA FD FT FX FY FZ FV

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

MHF2

My MHR MHK MHS L MHC MHT MHY L: Distance to the point at which the load is applied (mm) MHW Maximum allowable moment Allowable vertical load Fv (N) Model Pitch moment Mp (Nm) Yaw moment My (Nm) Roll moment Mr (Nm) MRHQ MHF2-8D 0.53 0.26 0.26 58 Misc.

MHZ

L MHC MHT MHY L: Distance to the point at which the load is applied (mm) Maximum allowable moment MHW Allowable vertical load Fv (N) Model Pitch moment: Mp (Nm) Yaw moment: My (Nm) Roll moment: Mr (Nm) MRHQ MHZ2-6 0.08 0.04 0.04 10 Misc.

MHF2

My MHR MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS L MHC MHT MHY L: Distance to the point at which the load is applied (mm) MHW Maximum allowable moment Allowable vertical load Fv (N) Model Pitch moment Mp (Nm) Yaw moment My (Nm) Roll moment Mr (Nm) MRHQ

MHZ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mr Mp MHS Fv L MHC MHT MHY L: Distance to the point at which the load is applied (mm) Maximum allowable moment MHW Allowable vertical load Fv (N) Model Pitch moment: Mp (Nm) Yaw moment: My (Nm) Roll moment: Mr (Nm) MRHQ MHZ2-6 0.08 0.04 0.04 10 Misc.

MRHQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mp My Mr MHS MHC Fv L MHT MHY MHW MRHQ L: Distance to the point at which a load is applied (mm) Misc.

MHF2

My L L: Distance to the point at which the load is applied (mm) Maximum allowable moment Allowable vertical load Fv (N) Model Pitch moment Mp (Nm) Yaw moment My(Nm) Roll moment Mr (Nm) MHF2-8D 0.53 0.26 0.26 58 MHF2-12D 1.4 0.68 0.68 98 MHF2-16D 2.8 1.4 1.4 176 MHF2-20D 4 2 2 294 Note) The load and moment values in the table indicate static values.