Profile Design ISO/VDMA Air Cylinder Series CP95

32 includes order No. from to , 40 100 includes from to FB1 = 51.76N 310N (from table) Therefore, side load is allowable Order No. 32 CS95-32 40 CS95-40 50 CS95-50 63 CS95-63 80 CS95-80 100 CS95-100 1.8-8 ISO/VDMA Air Cylinders Series CP95 Dimensions standard specifications [mm] CP95SB-stroke Stroke end cushioning STROKE STROKE CP95SB-stroke W STROKE STROKE STROKE Bore AM B D EE PL RT

High Vacuum Angle Valve, XL Series

From the formula C=VA/4=(RT/2M)0.5A, the conductance for 1cm is C=11.6A l/sec, at an air temperature of 20C. Valve closing The time from the cut off of power to the actuation solenoid valve until 90% of the valve (XLm) return stroke has been completed is the valve closing response time.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

This time is characterized as =0 exp(E/RT) where R is the ideal gas constant and 0=(approx.) 10-13sec. Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

V

for A-R Direction (Exhaust Flow) Port Size A B C Model 3/8, 1/4 50 25 22 (N)AK2001-N01, 02 1/4, 3/4, 1/2 67 36 36 (N)AK4000-N02, 03, 04 3/4, 1 95 50 50 (N)AK6000-N06, 10 QUICK EXHAUST VALVE SERIES (N)AQ S Y M B O L S High Exhaust Characteristics Port Sizes from M5 ~ 34 PT, NPT High Flow Capacity H O W T O O R D E R S E R I E S (N)AK T E C H N I C A L SPECIFICATIONS B O D Y S I Z E .P O RT

XL

From the formula C=VA/4=(RT/2M)0.5A, the conductance for 1cm is C=11.6A l/sec, at an air temperature of 20C. Valve closing The time from the cut off of power to the actuation solenoid valve until 90% of the valve (XLm) return stroke has been completed is the valve closing response time.

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. -4i -2 .44 -.4 5000 4m0 40 30 m 2500 2000 1500 12.5 1 0 ===-rt=='-t {E -.2-_L-2. d r / .zx. :2. 4 6 (mm) Fig.6.14 Theortical Force of pneumatic cylinders, trom 2.5 to 30 mm (left and top scales) and from 32 to 300 mm (right and bottom scales) for 19,.1-a"ng,5 bg!.

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+$rt Bs[ bushing beadngs and slide bearings are standard for all series Dftnen6ions lor bsll bushing beaing snd sllde batlng6 ana lho sam6. A Adjustable str0ke mnge: 0 to -Smrn reduction: Reduction of more than 6dB is possible.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

plate (Filter, Regulator) 03R VZS 02L 2 1 2 2 2 2 2 2 No. of stations for mounting 03L VFS 02Y 03Y VS4 1(P), 3(R2), 5(R1) port size C6R 1/4 (Down side) 1/4 (Up side) 1/4 (Both sides) 3/8 (Down side) 3/8 (Up side) 3/8 (Both sides) 12 One-touch fitting (Down side) 12 One-touch fitting (Up side) 12 One-touch fitting (Both sides) Mixed 02D C8R VQ7 02U C10R 02B C6L EVS 03D C8L 03U C10L VFN 03B

VQ7-6/7-8

6 (left side) One-touch fitting 8 (left side) One-touch fitting 10 (left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L C8L C10L 1 (P), 3 (R2), 5 (R1) port piping connection Rc1/4 (bottom) Rc1/4 (top) Rc1/4 (both sides) Rc3/8 (bottom) Rc3/8 (top) Rc3/8 (both sides) One-touch fitting 12 (bottom) One-touch fitting 12 (top) One-touch fitting 12 (both sides) Mixed 02D 02U 02B 03D 03U 03B

Stations: 9 Stations, Port Size: N3 (5/32" One-touch Fitting), Cable Length: 0 (w/o Cable 25 Pin), Option 1: D (DIN Rail Mounting), Option 2: RT (External Pilot, Branched P & R Ports on U Side)

Input Specifications: 0 (Voltage Input), Output Specification: RT [2 Outputs (NPN/PNP Switching Type) + Analog Voltage Output], Unit Specification: Units selection Function; for Overseas use only; SI Unit provided for Use in Japan, Lead Wire: L (Power Supply/Output Connection Lead Wire, 2m), Bracket/Panel Mount: A2 (Bracket B, Horizontal Mounting), Sensor Connector: C (Sensor Connector, for

76

RT -RRD-5M

Solid State Auto Switches

D-B35 Reed switch Contacts protection resistance () () Current limiting resistance DDLight emitting diode (LED) Diode 1649 Series D-B3 Dimensions (mm) Terminal conduit type D-B3 Terminal conduit type D-B3J 42 42 500 G 1/2 59 38 59 38 6 41.5 41.5 85 69 35 35 42 8 8 59 1 2 85 Recommended minimum bending radius for lead wire RT : 25 mm or more 120C : 50 mm or more Terminal part Dimensions for

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Not available for S/SQ kit) rt D-side end plate assembly no. y U-side end plate assembly no.

Aluminum High Vacuum Angle Valve

This time is characterized as =0 exp(E/RT) where R is the ideal gas constant and 0=(approx.) 10-13 sec. Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C, it is 2.8 x 10-8 sec, or about 200 times shorter. The objective of baking is to exhaust water with long adsorption residence time more quickly.

High Vacuum Angle Valve

This time is characterized as =0 exp(E/RT) where R is the ideal gas constant and 0=(approx.) 10-13 sec. Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C, it is 2.8 x 10-8 sec, or about 200 times shorter. The objective of baking is to exhaust water with long adsorption residence time more quickly.

REA/REB

2 rt ew u y !3!4 i o q !7 !6 !9 !8 @8 #2 #0 #1 #3 #4 Component Parts Material No. Description No. Description Material Note Note Stainless steel Nickel plated Carbon steel Lock nut B Cylinder tube q !8 Aluminum alloy Hard anodized Aluminum alloy Plate A External slider tube w !

Table of Contents

2 rt ew u y !3!4 i o q !7 !6 !9 !8 @8 #2 #0 #1 #3 #4 Component Parts Material No. Description No. Description Material Note Note Stainless steel Nickel plated Carbon steel Lock nut B Cylinder tube q !8 Aluminum alloy Hard anodized Aluminum alloy Plate A External slider tube w !

25

Ionizer Emitter cartridge One-touch fitting End bracket Intermediate bracket Feedback sensor u 1 2 3 4 5 6 7 8 9 w IZS41/42 series i rt q e o Auto balance sensor [High accuracy type] Power supply cable (for IZS40) Power supply cable (for IZS41/42) w 425 IZS40/41/42 Series Accessories (for Individual Parts) Feedback sensor IZS31-DF Auto balance sensor [High accuracy type] IZS31-DG Power supply

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Not available for S/SQ kit) rt D-side end plate assembly no. y U-side end plate assembly no.