Vacuum

:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

Series VQ Metal Seal/Rubber Seal Body Ported

SY SYJ Specifications Max. operating pressure Min. operating pressure SX 0.8MPa 0.15MPa 5 to 50C 2.7mm 2(0.15) 180CPM VVQ1000-FPG-02 1set VQ1000-FPG-C6M5-D 2 pcs.

Stroke Reading Cylinder and Counter

SET MODE Operation keys SD SG RD RS-232C COM S.STOP OUT1 OUT2 OUT3 OUT4 OUT5 100 to 240 VAC Power supply Output terminal Communication terminals Display detail Upper limit Functions (PRESCL, OFFSET, STOP, OUTPUT, INPUT, BACKUP, RS-232, UNIT) Mode indicators COUNT PRESET FUNC. BANK NO.

Rotary Actuator

mark shows the dimensions of the solenoid valve VF3120K-1G1-02-X14. Drawing shows the auto switch mounted on the port side.

Table of Contents

RUN RD SD RUN/ERR ERR. T unit Can be connected with PLC I/O card for serial transmission. EX300-TMB1For models of Mitsubishi Electric Corporation EX300-TTA1For models of OMRON Corporation EX300-TFU1 For models of Fuji Electric Co., Ltd. EX300-T001 For general models Up to 32 points per unit.

CE

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC MVGQ CC Please consult with SMC separately for a BCD cable with connector.

CE

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC MVGQ CC Please consult with SMC separately for a BCD cable with connector.

Thermo-con/Rack Mount Type

Signal contents RS-232C RS-485 1 Unused BUS+ 2 RD Unused 3 SD Unused 4 Unused Unused 5 SG SG 6-8 Unused Unused 9 Unused BUS 8 Contact b for output cutoff alarm (closed when alarm occurs) 3 9 Contact a for upper/lower temp. limit alarm (open when alarm occurs) 10 Common for upper/lower temp. limit alarm 4 11 Contact b for upper/lower temp. limit alarm (closed when alarm occurs) 12-14 Unused

DOC1003626

Terminal resistance Terminal resistance 2 2 2 7 5 7 5 7 5 SDSD+ SDSG SD+ SD+ SD+ SG SDSG SDSG Controller This product (First device) This product This product (31st device) (Second device) Do not connect any wire to other PIN numbers.

AC Servo Motor Driver (Pulse input type/Positioning type)

COM3 15 LA Encoder A-phase pulse (differential line driver) Y004 CR 5 16 LAR (Note 15) COM2 17 LB Encoder B-phase pulse (differential line driver) 18 LBR X INP 10 19 LZ Encoder Z -phase pulse (differential line driver) 20 LZR X X RD 11 21 14 LG SD Control common OP LG Plate 14 SD Plate (Note 7) (Note 3, 5) Forced stop CN1 EM1 8 Servo-on SON 4 Reset (Note 10, 11) RES 3 Forward rotation stroke

CE

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 AC100~240V Separate arrangements should be made for the BCD cable with connector.

Body Size: 3/8 Basis, Control Method: Meter-in, Thread: R(PT)/Rc(PT)/Meter Thread (M5), Port Size: 1/4, Sealant: Sealant

Body Size: 3 (3/8 Basis), Control Method: 1 (Meter-in), Thread: R(PT)/Rc(PT)/Meter Thread (M5), Port Size: 02 (1/4), Sealant: S (Sealant)

Table of Contents

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Port size 1/4 02 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors In the case of alone Terminal block Sub-plate 02 PW VQ2000 Dimensions 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <

0.4

Rc N NPT VQZ T NPTF F G SQ In the case of alone Sub-plate Terminal block Port size VFS 02 PW VQ2000 1/4 02 VFR Dimensions VQ7 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1-02 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <76.7> 70.7 3 R2 R1 5 X 12 P 1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Port size 1/4 02 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors In the case of alone Terminal block Sub-plate 02 PW VQ2000 Dimensions 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <

Mechanical Valves Series NVM, NVFM, NVZNI

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

IIIIIII

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Keyway dimensions l b Model Port size Rc A B C F H J K S U W BA BB CA CB SA SB SC SD SE DD (h9) D (g6) CDRA1BS50 CDRA1BS63 CDRA1BS80 CDRA1BS100 5 5 5 5 36 41 50 60 2.5 2.5 3 4 25 30 35 40 8.5 10 12 12.5 25 30 40 45 15 17 20 25 8.5 10 12 12.5 34 34 34 34 46 57 70 85 17 20 23.5 25 33 33 33 33 14 21 29 39 62 76 92 112 48 60 72 85 M8 x 1.25 depth 8 M10 x 1.5 depth 12 M12 x 1.75 depth 13 M12 x