42

2) x G1/2 Conduit port SYJ M5 x 0.8 Ground screw 10.7 SZ U side 1/4" 4(A), 2(B) port 129.5 106 47 94.7 9 9 71.7 VF VP4 27 36.1 X 12 X 12 n VQ 1/2 B A 8 VQ 4/5 VQ 4/5 2 4 B A 7 VQC 1/2 2 B 2 B 2 B 2 B 2 B 2 B 4 6 A A A A A A B B B B B B VQC 4/5 1/4" Note) 5 SMC SMC SMC SMC SMC VQZ L2 L1 4 SQ 3 VFS VFR 2 P = 25 44 VQ7 1 2 50.5 Stations 38 D side 27 11.7 80.8 47.7 43.2 1/8" External pilot port

VEX1

1 2 AS4000 AN200 T1075 (10) DL10-02 A B T1209 (12) DL12-02 C AS420 AN300 T1209 (12) DL12-03 VEX3 2 3 4 D AS420 AN400 SGP elbow 90 1 2 B SGP B 1 2 E AS420 AN400 90 elbow F G AS500 AN500 AN600 SGP B 90 elbow 90 elbow 90 elbow VEX350 3 4 SGP1B SGP1B AS600 VEX30 Port VEX31 VEX32 External pilot External pilot H AS600 AN600 I VEX370 External pilot Pilot exhaust Pilot exhaust SGP1 B 90 elbow 90

Prevents Micro-Bubbles

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com N B A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(7.5) (5.5) 26 C8: One-touch fittings for 8 C6: One-touch fittings for 6 (4) 44.5 Mounting holes Grommet (G) C10: One-touch fittings for 10 02: Rc(PT)1/4 U side DIN rail clamp screw n Manual override 5 A A A A 2 4 B 4 4 4 4 (L4) (L3) 2 L2 L1 3 B 2 2 P=19 B 2 1 SMC B 21 Stations 6 D side 9 9 10.5 10.5 58 37 95 (Single) (C6, C8) 17.5 10.5 (C10) 116.5 (Double) 130 (3 Position) 300 (Lead

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side ported 1/8 (A) 4 (B) 2 Side ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type (A) 4 (B) 2 S D Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24 VDC FIG 12 VDC

Hand Valve Series VH 1

Model JIS Symbol 2 position Port size Rc Number of positions Piping direction Model Effective area (mm2) Weight (kg) Series Body mounted Panel mounted (A) 2 (B) 4 VH210-02 VH200-02 3 (Closed center) 4 0.42 VH2 1 (P) 3 (R) VH211-02 VH201-02 3 (Exhaust center) 7.5 1/4 2 VH212-02 VH202-02 2 (Position) 3 1 Closed center VH300-02/03 VH310-02/03 3 (Closed center) (A) 2 (B) 4 4 3 VH301-02/03 VH311

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Rubber seal 5 Port Solenoid Valve Series SYJ7000

center (A) 4 (B) 2 (A) 4 (B) 2 In common between 110 VAC and 115 VAC, and between 220 VAC and 230 VAC.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

16.2 34 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 P 1 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" M5 x 0.8 [4(A), 2(B) port] Applicable D-sub connector: equivalent { } JIS-X-5101 MIL-C-24308 (L4) L3 (3.2) 101.2 Switch

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

/pressure centre L plug connector (L) 20 2 x M4 x 0.7 Threads depth 6.5 (For bracket mounting) 3 7 52-SY7420-L-02 (-F2) 5 52.8 39.8 Insulation: Black () B 13.6 Manual override Insulation: Red (+) A 2 x 4.2 (Mounting holes for manifold) 20 42 2 x 1/4" {A (4), B (2) port} (52) (2 x 4.2 Mounting holes) 44 (For E type) 0.3 mm2 (42.5) (49.5) 40 40 24.5 14.7 1.55 (1.2) L 180.8 (Lead wire length

Hand Valve Series VH

Models Symbol Model Weight (kg) Body mounted Panel mounted 2 Position Number of positions Piping direction Effective area (mm2) (Cv factor) Series Port Size (A) 2 (B) 4 VH210-02 VH200-02 3 (Closed center) 1 (P) 3 (R) 4 3 (Exhaust center) 7.5(0.4) 0.42 VH211-02 VH201-02 1/4 VH2 Closed center 2 2 (Position) VH212-02 VH202-02 (A) 2 (B) 4 3 1 3 (Closed center) VH300-02, 03 VH310-02, 03 1 (P)

0.4

None (Non-polar) Nil E Note1, 2) 2(B) 4(A) 2(B) (A)4 Metal Rubber B Note) VQ 4/5 Note 1) Not applicable to the S kit.

Speed Controller with One-touch Fitting

Model Port size Seal method Metric size Inch size Elbow type Universal type 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 Gasket seal Note 3) AS121F-U10/32AS131F-U10/32 10-32UNF Note 3) AS221F-01 AS231F-01 1/8 Note 3) AS221F-02 AS231F-02 1/4 Note 3) Note 3) R NPT Note 1) Sealant AS321F-02 AS331F-02 1/4 AS321F-03 AS331F-03 3/8 AS421F-04 AS431F

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

3 Port Air Operated Valve Series SYJA300 1

Change of fluid passage Flow Characteristics Flow characteristics 1 2 (P A) C [dm 3/(sbar)] 27 38 Port size 2 3 (A R) C [dm 3/(sbar)] 27 40 2 1 (A P) C [dm 3/(sbar)] 25 40 3 2 (R A) C [dm 3/(sbar)] 26 38 b 0.38 0.30 b 0.37 0.32 b 0.36 0.22 b 0.37 0.20 Cv 7.0 9.8 Cv 7.4 9.8 Cv 7.3 9.8 Cv 6.8 9.6 1/2 3/4 N.C. N.O.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Flow Rate Characteristics/Weight Flow rate characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Grommet Valve model C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 0.58 kg (For AC) 0.63 kg (For DC) VO325 4.1 0.24 1.0 4.4 0.18 1.0 4.5 0.15 1.0 4.3 0.23 1.0 VO325V (Vacuum spec. type) Precautions Changing from N.C. to N.O.

ZP

Adapter connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 2 10 to 16 3 A14 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [q Adaptor] S ZP 06 B5 R [w Type R adaptor] Buffer connection thread B5 Symbol S Pad dia. 02 to 16 Pad dia.

Air Fittings & Tubing

T (M) L2 L1 M Nylon Urethane 1 4 13 13 M12 X 1 3.2 KQ2E23-02 3.4 2.9 17 14 14 31.5 15 15.5 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 M12 X 1 4 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 15 35 KQ2E04-02 17 KQ2E06-01 11 28 31.5 30 15 17 M14 X 1 19 KQ2E06-03 17 33.5 29 KQ2E06-02 15 6 13.1 10.4 17 17 17 KQ2E08-01 7.5 27.5 28 26.1 18.0 8 18.5 19 KQ2E08-02 13 33 27 17 M16 X 1 19 KQ2E08

4/5 Port Air Operated Valve Series SYJA3000

2) [ ]: Denotes normal position Note 3) ( ): Without sub-plate Note 4) 5 port base mounted without sub-plate: SYJA40 5-2-27 Series SYJA7000 Dimesions: Body Ported Dimensions: Base Mounted 01 02 2 position single: SYJA7120-01(-F) 2 position single: SYJA714060 2-4.3 28.3 M5 x 0.8 (For mounting) (Pilot port) 1 B A 13 3 A B 1 1 34 27 M5 x 0.8 17 B 2-3.2 A (Pilot port) 35 2-4.5 (For mounting)