Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Type: A (Air Cushion), Bore: 20mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 200mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewire Connection

Magnet: Built-in Magnet, Mounting: Rod Flange, Type: Air Cushion, Bore: 20mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 200mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewire Connection: 0.5m Cord

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: M5 × 0.8, Auto Switches: M9B, Lead Wire

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Type: A (Air Cushion), Bore: 20mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 200mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewire Connection: L

High Vacuum Angle Valve

CYV Chemraz VMQ FKM for Plasma ULTIC ARMOR Example) XLCV-16-M9NA-1G-XAN1A UA4640 Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

Aluminum High Vacuum Angle Valve

CYV Chemraz Example) XLCV-16-M9NA-1G-XAN1A VMQ FKM for Plasma ULTIC ARMOR Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

Smooth Cylinder/Low Speed Cylinder

Auto switch model Lead wire (m) Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Indicator light Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 3 (L) 5 (Z) 1 (M) M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9N M9P M9B M9NW M9PW M9BW M9NA 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit 5

Air Cylinder

Grommet 2-wire 12 V M9BV M9B V V V v v Connector H7C V V V V Terminal conduit 3-wire (NPN) 5 V, 12 V G39A V IC circuit 2-wire 12 V K39A V Solid state auto switch Relay, PLC Yes 3-wire (NPN) 5 V, 12 V M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v 24 V Diagnostic indication (2-color indicator) 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA

5

*1 M9NAV*1 M9NA*1 v v V v v IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 M9PAV*1 M9PA*1 v v V v v 2-wire 12 V M9BAV*1 M9BA*1 M9BAV*1 M9BA*1 v v V v v Grommet Water resistant (2-color indicator) With diagnostic output (2-color indicator) 4-wire (NPN) 5 V,12 V H7NF F79F V V v v IC circuit 3-wire (NPN equivalent) 5 V A96V A96 A96V A96 V V IC circuit Reed auto switch Yes 200 V A72 A72H

Solid State Auto Switches

Indicator light Standard CE marking, RoHS Precautions Caution Oilproof Flexible Heavy-duty Lead Wire Specifications Auto switch model D-M9NA D-M9PA D-M9BA Fix the auto switch with the existing screw installed on the auto switch body. The auto switch may be damaged if a screw other than the one supplied is used.

Air Cylinder

Perpendicular In-line In-line M9NV M9N IC circuit 3-wire (NPN) G59 5 V, 12 V 3-wire (PNP) M9PV M9P G5P Grommet 2-wire 12 V M9BV M9B K59 Connector H7C Solid state auto switch M9NWV M9NW IC circuit G59W 3-wire (NPN) 5 V, 12 V Relay, PLC Yes 24 V 3-wire (PNP) M9PWV M9PW G5PW Diagnostic indication (2-color indicator) 2-wire 12 V M9BWV M9BW K59W Grommet 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA

ISO Standard Hydraulic Cylinder

Prewired connector Load voltage Lead wire length (m) Indicator light Port on the right, cushion valve on top Special function Type Electrical entry Wiring (output) Applicable load Auto switch model 0.5 (Nil) 3 (L) 5 (Z) 1 (M) AC DC D M9N M9P M9B M9NW M9PW M9BW M9NA 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 24 V Reed auto switch Solid state auto switch Port on the right, cushion

10

Electrical entry Wiring (Output) 3-wire (NPN) 24 V 5 V, 12 V M9N V v v IC circuit 3-wire (PNP) M9P v v 2-wire 12 V M9B v v Terminal conduit 3-wire (NPN) Grommet G39 2-wire 12 V K39 5 V, 12 V Solid state auto switch 3-wire (NPN) 5 V, 12 V M9NW v v IC circuit 3-wire (PNP) M9PW v v 2-wire 12V M9BW v v Diagnostic indication (2-color indicator) Relay, PLC Yes 3-wire (NPN) 5 V, 12 V M9NA

Rotary Actuator

entry Wiring (Output) M9NV M9N V V V v v IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v Relay, PLC Diagnosis indication (2-color indicator) 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA

XM, XY

XMA-16-M9NA-XN1A Barrel Perfluoro is a registered trademark of Matsumura Oil Co., Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates. Chemraz is a registered trademark of Greene, Tweed & Co.

Environment

At this position, 4 mm from the end of the operating range. 506 Water Resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NA(V)/D-M9PA(V)/D-M9BA(V) RoHS Auto Switch Specifications Grommet PLC: Programmable Logic Controller D-M9A, D-M9AV (With indicator light) Water (coolant) resistant type 2-wire load current is reduced (2.5 to 40 mA).

15

D-M9PA(V) D-M9BA(V) 7 13 38 63 D-M9NA(V) 8 14 41 68 Auto switch model 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-M9A Indicator light Slotted set screw (flat point) Mounting screw M2.5 x 4 L Stainless steel 2 24 2.8 500(1000)(3000)(5000) 0.2 3 4 6 Most sensitive position 2.6 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMA-16-M9NA-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 1 Series XMA, XYA Specifications XMA-16 XMA-25 XYA-25 XMA-40 XYA-40 XMA-50 XYA-50 XMA-63 XYA-63 XMA-80 XYA-80 Model Flange (valve) size 16, CF034 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal) Fluid Inactive gas under vacuum Operating temperature C 5 to 60 (High temperature type: 5

ISO Cylinder

Applicable auto switch Description Size Quantity BBA4 Auto switch mounting screw M3 x 0.5 x 15 L 1 BJ2-008S, BJ2-010S, BJ2-012S, BJ2-016S D-C7, C8 D-H7 BM2-020AS, BM2-025AS, BM2-03AS, BM2-040AS 112 C85/C75 Series Rail Mounting Type Mounting Bracket Solid state D-M9N(V), D-M9P(V), D-M9B(V), D-M9NW(V), D-M9PW(V), D-M9BW(V), D-M9NA(V), D-M9PA(V), D-M9BA(V) Reed D-A90

CHKD/CHKG

For details, refer to pages 443 and 445. 273 CHKD Series How to Mount and Move the Auto Switch Solid state D-Y59 , D-Y69 , D-Y7P(V) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) D-Y7BA Reed D-Z73, D-Z76, D-Z80 Solid state D-M9N(V), D-M9P(V), D-M9B(V), D-M9NW(V), D-M9PW(V), D-M9BW(V) D-M9NA(V), D-M9PA(V), D-M9BA(V) Reed D-A90(V), D-A93(V), D-A96(V) A