This is a legacy product, and replaced byCJ2KB16-75Z CJ2 ROUND BODY CYLINDER. CYL, DBL ACT, NON ROTATING. ACTUATOR. 16MM CJ2 NON-ROTATING. .24709 lb. GK.

This is a legacy product, and replaced byCDM2RA32-75Z CM2/CM3 ROUND BODY CYLINDER. CYL, RND BODY, DIRECT MT.. ACTUATOR. 32MM CM2 OTHERS (COMBO). 1.10074 lb. LC.

This is a legacy product, and replaced byMLGPM32-75Z-F MLGP ONE-WAY LOCKING CYLINDER. CYL, LOCKING, SLIDE BEARING. ACTUATOR. 32MM MLGP. 9.81057 lb. LM.

This is a legacy product, and replaced byMLGPM32TF-75Z-B MLGP ONE-WAY LOCKING CYLINDER. CYL, LOCKING, SLIDE BEARING. ACTUATOR. 32MM MLGP. 4.18878 lb. LM.

This is a legacy product, and replaced byCM2C32-75Z-XB9 CM2/CM3 ROUND BODY CYLINDER. CYL, R/ BODY, D/ ACT, L/SPEED. ACTUATOR. 32MM CM2 OTHERS (COMBO). 1.01999 lb. LC.

This is a legacy product, and replaced byMDBB32-75Z MB TIE-ROD CYLINDER. CYL, TIE ROD, AUTO-SW. ACTUATOR. 32MM MB DBL-ACT AUTO-SW. 1.59839 lb. LE.

This is a legacy product, and replaced byCDG1BN50-75Z CG/CG3 ROUND BODY CYLINDER. CYL, AIR. ACTUATOR. 50MM CG DBL-ACT AUTO-SW. 2.65359 lb. NE.

Magnet: D (Built-in Magnet), Mounting: U (Rod Trunnion), Type: A (Air Cushion), Bore: 40mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 75mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewire Connection

Magnet: Built-in Magnet, Mounting: Rod Trunnion, Type: Air Cushion, Bore: 40mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 75mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewire Connection: 3m, Number

Magnet: D (Built-in Magnet), Mounting: U (Rod Trunnion), Type: A (Air Cushion), Bore: 40mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 700mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire

15

Motor Mounting: In-line Motor Mounting Diagram Motor type: NZ, NY, NX, NW, NV, NU, NT, NM2 Motor type: NZ, NY, NW, NU, NT [Included parts] Hexagon socket head cap screw/MM (Tightening torque: TT [Nm]) Motor [Provided by user] Motor flange PD Motor side hub Motor flange Motor mounting screw Motor Mounting dimension: FP Motor mounting screw [Provided by user] [Included parts] Motor side hub

High Vacuum Angle Valve

Stainless steel 432 Made to Order XLF Series How to Order Valve 100 XLFR M9N A 1K X Flange type Symbol Nil KF(NW) K(DN) D Temperature specifications Symbol Nil 5 to 60C 5 to 150C H0 Seal material Symbol Nil FKM EPDM Barrel Perfluoro Type Seal material 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Compound No.

Table of Contents

MY1B16/20 Stroke (LL) L PA 2 x 2-B counterbore depth C LD through-hole 4-MM depth M YW QW NW PB PG Q + Stroke Floating bracket mounting thread (2-JJ thread depth from bottom of counter bore KK) PC 1 LW M5 x 0.8 (Port) 2-T counterbore depth E M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

Modular F.R.L. Units

Example) AF30-03B-2R-A-X430 X430 Low temperature X440 High temperature Symbol Description Nq Body size 20 30 40 50 60 Symbol Description Nq Body size 30 40 50 60 Nil Rc N*1 NPT F*2 G + Nw Pipe thread type Nil Rc N*1 NPT F*2 G + Nw Pipe thread type 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Ne Port size Nr Option (Mounting) Nil Without mounting

XM, XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Principle materials Body: SCS13 (Conforms to Stainless steel SUS304) Bellows: Stainless steel SUS316L Bellows holder: Stainless steel SUS304.

2

Example) AC30D-F03DM-SV-1NR-A r t y w Nq Body size 20 30 40 Symbol Description Nw Pipe thread type Nil Rc V V V N NPT V V V F G V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V + Ne Port size Nil Without auto drain V V V C Note 2) N.C. (Normally closed) Drain port is closed when pressure is not applied. V V V D Note 3) N.O.

Aluminum High Vacuum Angle Valve

Stainless steel 432 Made to Order XLF Series How to Order Valve 100 XLFR M9N A 1K X Flange type Symbol Nil KF(NW) K(DN) D Temperature specifications Symbol Nil 5 to 60C 5 to 150C H0 Seal material Symbol Nil FKM EPDM Barrel Perfluoro Type Seal material 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Compound No.

MY1

MY1B16/20 Stroke (LL) L PA 2 x 2-B counterbore depth C LD through-hole 4-MM depth M YW QW NW PB PG Q + Stroke Floating bracket mounting thread (2-JJ thread depth from bottom of counter bore KK) PC 1 LW M5 x 0.8 (Port) 2-T counterbore depth E M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

High Vacuum Angle Valve, XL Series

Valve closed 40 50 63 80 Auto switch type Nil Without auto switch (without built-in magnet) F9N Solid state auto switches F9P D-F9N D-F9P Flange type F9B D-F9B Symbol Type Applicable flange size Nil D KF(NW) K(DN) 16, 25, 40, 50, 63, 80 63, 80 Note 1) The standard lead wire length is 0.5m. For 3m, "L" is added at the end of the part number.