1

MY1B P . 8-11-16 MY1M P . 8-11-40 MY1C P . 8-11-56 MY1H P . 8-11-72 MY1CW P . 8-12-14 MY1MW P . 8-12-14 Stroke adjusting unit For applicable symbol, refer to the table below. Note) For MY1H, the parts are packed together when shipped. Stroke Note) Indicates the stroke prior to mounting the stroke adjusting unit.

VZS

Body type Rc 1 8 Plug-in type VVZS3000-P-01-1 Non plug-in type VVZS3000-P-01-2 Rc 1 4 VVZS3000-P-02-1 VVZS3000-P-02-2 Body type Plug-in type AXT625-12A Non plug-in type Part no. Part no. Body type Plug-in type VVZS3000-22A-1 Non plug-in type VVZS3000-22A-2 Part no.

Compressed Air Preparation Filter

10 Micro Mist Separator AMD Series Standard Specifications p. 11 Flow Rate Characteristics p. 12 Activated Carbon Filter AMK Series Standard Specifications p. 19 Flow Rate Characteristics p. 20 AFF AM AMD Construction p. 21 Dimensions p. 23 Modular Connection Example p. 25 Accessories Sold Separately p. 27 International Standard ISO 8573-1:2010 p. 28 Specific Product Precautions

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Reduced maintenance (No need for control or replacement) Positioning repeatability: 0.01 mm*3 *1 Compared with the LEFS *2 Size 40, Mep, Overhang: 300 mm *3 Excludes the lead H Step Motor Controller JXC Series p. 3 Battery-less Absolute Type (Step Motor 24 VDC) MDirect input type MStep data input type LEKFS Series P-E21-6 Electric Actuator High Rigidity and High Precision

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Consult P/A.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55 45 85 Vertical 5 10 10 20 Up to 500 1200 600 1200 600 501 to 600 1050 520 1200 600 601 to 700 780 390 1200 600 701 to 800 600 300 930 460 801 to 900 480 240 740 370 901 to 1000 390 190 600 300 1001 to 1100 320 160 500 250 1101 to 1200 270 130 420 210 1201 to 1300 360 180 1301 to 1400 310 150 1401

5 Port Solenoid Valve Series SV

SV B00 SOL.b SOL.a 3(EB) 5(EA) 1(P) 4(A) 2(B) N.C. valve N.O. valve SOL.b SOL.a 1 2 SV C00 3(EB) 5(EA) 1(P) External pilot specification is not available for 4 position dual 3 port valves.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Refer to p.3.4-14. Auto Switch Mounting Bracket Part No.

HRX-OM-W002

For the function, refer to P.5-29,P.5-30 [Temperature range monitoring function setting example]. HRR Series 5.5 Advanced setting mode 5-31 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions Temperature range monitor start time 24. Press the [] key.

15

400 600 800 1000 1200 1400 1600 Stroke [mm] Stroke [mm] [Graph 7] Allowable load mass by stroke 40 100 y, z + A = 0 y, z + A = 50 Load mass [kg] y, z + A = 100 y, z + A = 200 10 y, z + A = 300 1 0 200 400 600 800 1000 1200 1400 1600 If load center of gravity exceeds the value of y, z + A on the graph, please consult SMC.

KT10

F H J L N P R Option Code Specification Standard (Cv: 0.06) High flow (Cv: 0.12) No code HF O-ring material 1) Not available for material code B.

Interface Regulator for VQ4000 5 Port Solenoid Valve

/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/min X 0.035 = SCFM Pressure Characteristics Conditions Upstream pressure: 0.7MPa (101 psi) Downstream pressure

Slider Type Ball Screw Drive/11-LEFS Series

LEF LEF Lead 6: LEFS25B Lead 6: LEFS25B Lead 12: LEFS25A 25 15 Work load [kg] Work load [kg] Lead 12: LEFS25A 20 Lead 20: LEFS25H LEJ Lead 20: LEFS25H 15 10 A LEL A 10 5 5 LEM 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 LEY Speed [mm/s] Speed [mm/s] LEFS32/Ball Screw Drive LES Horizontal Vertical LEPY LEPS 60 30 Lead 8: LEFS32B Lead 16: LEFS32A Lead 8:

RSH/RS1H

REC RSH20, 32 Graph (1) Graph (2) 1.0 CX RSH20 RSH32 0.9 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 Operating pressure P [MPa] CY 0.8 1300 1300 80 0.7 1200 1200 MQQ M 0.6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1100 1100 0.5 RHC 1000 1000 0.4 900

HRX-OM-X071

For the function, refer to P.5-29,P.5-30 [Temperature range monitoring function setting example]. Temperature range monitor start time HRR Series 5.5 Advanced setting mode 5-31 HRX-OM-X071 Chapter 5 Display and Setting of Various Functions 24. Press the [] key.

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

LG1H

1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.

Guide Cylinder Series MGG

, 1000 200, 250, 300 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 MGGL Ball bushing 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Table of Contents

Actuation Plug Plug (A) 4 (B) (2) Number of solenoids (A) (4) (B) 2 Single 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Manual Override Operation Double Warning 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Light/Surge Voltage Suppressor Handle carefully, as connected equipment can be actuated through manual override operation.

LEF-OM006xx

5 (V) DC2410% LEFB16A LEFB25A (mm) (300) 500 (600)(700) 800 (900)1000 (300) 500 (600)(700) 800 (900)1000(1200)(1500)(1800)(2000) (kg) 1.19 1.45 1.58 1.71 1.84 1.97 2.10 2.39 2.85 3.08 3.31 3.54 3.77 4.00 4.46 5.15 5.84 6.30 (kg) 0.12 0.19 1( ) 23() 452000Hz 1 () 4 5 6 7 8 10 8 W(kg) W(kg) 6 4 LE FB25 LEFB25 2 LE FB16 LEFB16 0 0 500 1000 1500 2000 V (mm/s) -13- 2.3.