Compact 5-Port Solenoid Valve

Box p. 105 Terminal Block Box p. 106 Lead Wire p. 107 EX600 p. 108 EX245 p. 110 EX250 p. 112 EX260 p. 113 EX120 p. 114 Manifold Exploded View [Common Parts] p. 115 Type 10: How to Increase Connector Type Manifolds p. 115 For the JJ5SY1-10, JJ5SY3-10, JJ5SY5-10/ Manifold Parts Nos.

CL

For stopping accuracy, refer to Series CLJ (P. 9-2-12), Series CLM2 (P. 9-2-20), Series CLG1 (P . 9-2-30), and Series CL1 (P . 9-3-2) respectively. 7. In order to further improve stopping accuracy, the time from the stop signal to the operation of the lock should be shortened as much as possible.

Table of Contents

Series MHSH3 MHSH3-32D to 80D 6-TA, thread depth TB 3-UA thread depth 6 UB P .C.D.R P (Finger operating port) 3-SA, counterbore dia.

VFR

263 4 296 314 5 347 365 6 398 416 7 449 467 8 500 518 9 551 569 10 602 620 L L1 L2 90 Series VFR5000 Manifold Option Parts Assembly Plug-in type, Non plug-in type Interface regulator/P port regulation ARBF5050-00-P-1 (Plug-in type) ARBF5050-00-P-2 (Non plug-in type) Individual SUP spacer VVFS5000-P-04-1 (Plug-in type) VVFS5000-P-04-2 (Non plug-in type) Interface regulator Individual SUP

Secondary Batteries

90-VQ2000-X121 D-sub Connector P.5 P.7 P.7 Plug-in Unit Base Mounted Air Preparation Equipment 3 Port Solenoid Valve Pilot Operated Poppet Type 90-AFF 90-AM 90-AMD 90-IDG 90-SFD 90-AMP 90-VP300/500 P.42 P.43 P.44 P.45 P.46 P.47 Main Line Filter Mist Separator Micro Mist Separator Membrane Air Dryer Clean Air Filter Exhaust Cleaner for Clean Room P.8 3 Port Solenoid Valve Pilot Operated Poppet

VFS

Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.

LX

L X P Table displacement (m) Table displacement (m) LXPB-200 LXPB-200 1500 1500 LXPB-175 LXPB-175 1000 1000 LXPB-150 LXPB-150 LXPB-125 LXPB-125 LXPB-100 LXPB-100 500 500 LXPB-75 LXPB-75 LXPB-50 LXPB-50 0 Weight (kg) 0 Weight (kg) 1 2 3 4 5 6 1 2 3 4 5 6 Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

MNB

P-76 (M)

Cylinder with Lock

MPa 0.4 MPa P < 0.5 MPa 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32 32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph m Graph v 0.5 MPa P 0.5 MPa P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning driver Model Allowable Moment (Nm) Allowable dynamic moment Allowable static moment Pitching Yawing 15.7 7.84 LXS Model Load movement direction 1000 m : Transfer load (kg) L : Overhang to work piece center of gravity (mm) a : Work piece acceleration (mm/sec) Me: Dynamic moment L1 (mm) L3 (mm) Pitching a = 1000 to 3000 a m 500 Mep 5 9 0 L1 Transfer load m (kg) 1000 Yawing 500 a

Thermo-chiller/Rack Mount Type

Mounted p. 34 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 With Feet/Without Rack Mounting Brackets p. 35 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 Removed Parts p. 35 HRR012/018/024/030 How to Order VOptional Accessories Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase

Proposals for Energy Saving

(P .E.)

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes [mm] Bore size [mm] Standard stroke [mm] 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Note) Intermediate strokes not listed above are produced upon receipt of order.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Caution 8-21-6 6 Guide Cylinder Series MGG Specifications JIS Symbol MX Standard Stroke Standard stroke (mm) Long stroke (mm) Model Bearing type Bore size (mm) MTS 20 250, 300, 350, 400 75, 100, 125, 150, 200 MY 25 350, 400, 450, 500 MGGM Slide bearing 32 350, 400, 450, 500, 600 CY 40 350, 400, 450, 500, 600, 700, 800 75, 100, 125, 150, 50 350, 400, 450, 500, 600, 700, 800, 900, 1000 MG Courtesy

5

141 P. 155 P. 172 P. 198 P. 212 P. 183 P. 225 P. 233 P. 251 P. 265 P. 285 P. 294 P. 309 -X 137 Smooth/Low Speed Cylinders CQlY/CQlX Series Added compact foot brackets.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Axis 2 INC 500 250.00 1000 1000 1 0 0 20.0 1 Axis 3 INC 500 250.00 1000 1000 1 0 0 20.0 Axis 4 INC 500 250.00 1000 1000 1 0 0 20.0 > > > > > > > > > > > 2046 Axis 4 ABS 200 700 500 500 0 0 0 0.5 Axis 1 ABS 500 0.00 3000 3000 0 0 0 0.5 Axis 2 ABS 500 0.00 3000 3000 0 0 0 0.5 2047 Axis 3 ABS 500 0.00 3000 3000 0 0 0 0.5 Axis 4 ABS 500 0.00 3000 3000 0 0 0 0.5 Movement mode Pushing operation

PF2A/PF2W

Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-

Air Slide Table

(The part number has a P suffix.) Metal Stopper Table Extension stroke end Retraction stroke end C D M B B E M P A C F Metal stopper only M G A D A MXQA-A38 Model Adjuster part no.

3 Port Air Operated Valve

/N.O. 2(A) 3/8 1/2 15.3 Air operated valve (P)1 3(R) VPA300 N.C. 2(A) 1/8 1/4 3.8 (P)1 3(R) N.O. 2(A) VPA500 (P)1 3(R) 1/4 3/8 P. 1564 8.8 For vacuum N.C. 2(A) VPA700 (P)1 3(R) 3/8 1/2 N.O. 15.0 2(A) (P)1 3(R) 1556 VPA300/500/700 Series Model Selection by Operating Conditions w Air Operated Valve: Manifold Series Manifold base model Applicable stations Note) EXH port type SYA VV3PA3-41 SYJA

Electric Actuators

128 116 94 to 300 146 LJ1S202SC 90 130 118 96 to 300 LJ1H101SC to 500 6 48 LJ1H101PB 122 2 110 44 to 600 104 145 LJ1H101NB 4 46 to 600 LJ1H202SC 124 112 16 58 to 500 LJ1S303SC 146 132 120 92 98 to 300 to 300 to 300 LJ1H202PA 8 50 to 500 124 112 106 LJ1H202NA 12 54 to 500 LJ1H303SE 126 114 22 64 to 500 to 500 to 500 LJ1H202PC 10 52 to 1000 to 740 to 930 to 600 to 500 145 124 112 106