Table of Contents

C D E F Dimensions Part no.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

sides) e (b) Lever D side (a) Bolt (Both sides) Replacement Parts No.

Electric Actuator with Integrated Guide

Motor output (W) Motor model Compatible driver model Power supply voltage (V AC) Motor dimension (mm) 100/115 MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 95 MSM022P1A 200 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation 89 200 HC-PQ23 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yasukawa Electric Corporation 96.5 200/230 SGDE-02AP SGME-02AF12 Refer

smcmaintenancepartslist

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Part No.

V

TAT I O N S 02 2 Stations 20 20 Stations H O W T O O R D E R S E R I E S V Q Z 1 0 0 / 2 0 0 / 3 0 0 B O D Y P O R T E D P L U G L E A D T Y P E V A L V E 2 VQZ P O R T S I Z E 2(A) P O R T S E R I E S C3 One Touch Fitting for 3.2 (VQZ100) C4 One Touch Fitting for 4 (VQZ100/200) C6 One Touch Fitting for 6 (VQZ100/200/300) C10 One Touch Fitting for 10 (VQZ300) M5 M5 Thread (VQZ100/200) 02

NCA1

150 150 2759 200 200 2760 250 200 2760 325 325 2761 400 325 2761 Stroke (In Inches and Hundredths of Inches) Bore 150 200 250 325 400 Note: Quantity is one piece.

CA2

7 i q r e y @2 t !8 !9 !6 !1 !2 !4 !5 !0 !

Vacuum System Peripherals:

e Valve Model SX340 is for internal pilot.

VFS

EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

NCA1

2 4-NT WF G J TN Depth ND E XT SN + Stroke A ZB + Stroke EA E/2 E DD D Bore size (in) MM KK NT TN WF XT Y LF P SN ZB C BA B AA ND A J G EE R 150 (1.5") 5/8 7/16-20 1/4-20 5/8 1 1 15/16 1.71 3 5/8 2 1/4 4 3/4 0.3 1 2 1/4-28 9/16 3/8 1 1/8 1 1/8 2.02 9/32 3/4 1.1 1.26 3/8 1.43 2.36 200 (2") 5/8 7/16-20 5/16-18 7/8 1 1 15/16 1.71 3 5/8 2 1/4 4 3/4 0.3 1 1/4 2 1/2 5/16-24 9/16 3/8 1 1/8 1 1/8

NCA1

MM -X B E/2 20ST KK Data D across flats TS SU SW SW SU US XS SS + Stroke SY Bore size (in) MM KK A B C D DD E EA EE G J LF P R SB SS ST SU SW SY TS US WF XS Y ZB 150 (1.5) 5/8 7/16-20 3/4 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 3.63 2.36 1.43 3/8 2.88 5/8 0.94 3/8 0.94 2.75 3.50 1 1.38 1.71 5.19 200 (2) 5/8 7/16-20 3/4 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 3.63 2.4 1.84 3/8 2.88

2 Phase Stepper Motor/Without Motor Brake Series LXP

D E Model LXPB2BC-50 LXPB2BC-75 LXPB2BC-100 LXPB2BC-125 LXPB2BC-150 LXPB2BC-175 LXPB2BC-200 34 44 52 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

CM2

x 1.5 64 19.5 17 32 6 8 37.5 M10 x 1.25 15 34.5 1/8 40 50 11 16 32 154 14 24 7 M32 x 2 88 21 22 41 8 10 46.5 M14 x 1.5 21.5 42.5 1/4 With Rod Boot l ZZ h Symbol f e B3 Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to

Smooth Cylinder/Low Speed Cylinder

-X 1233 Series CS2Y Dimensions Rod flange: CS2YF Port With rod boot V W G G 4 x J Cushion valve Width across flats KA 2 x P (Rc, NPT, G) 4 x FD MM FY D E E e B H K A AL ZZ1 + l + Stroke h + l l f FT B C N N F FZ FX ZZ + Stroke M S + Stroke (mm) Bore size (mm) Stroke range (mm) B C A AL B D E F FD FT FX FY FZ G J V 125 140 160 50 47 143 145 115 32 71 43 19 14 190 100 230 15 M14 x 1.5 15 Up

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

3/5 E 3/5 2 B 2 B 2 B 2 B 1 P 1 P 78 68.2 63 E 3 P 1 E 3 P 1 Individual EXH spacer 48 7.5 Individual SUP spacer 19.7 Block separation lever L Dimension n: Stations L n 2 135.5 125 106.5 14.5 3 148 137.5 117 15.5 4 160.5 150 127.5 16.5 5 173 162.5 138 17.5 6 173 162.5 148.5 12.5 7 185.5 175 159 13.5 8 198 187.5 169.5 14.5 9 210.5 200 180 15.5 10 223 212.5 190.5 16.5 11 235.5 225 201 17.5 12

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

, 300 10 -X 100, 200, 300, 400, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 20100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 Data 2 axes 1500 32 Note) Please contact SMC if it is used by exceeding the maximum stroke length.

Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

CL

40 200 CLAW Standard CNA E JJ A53 L 200 N 40 CDLAW With auto switch CB CV/MVG Number of auto switches Air cylinder with auto switch S n 2 1 n CXW Double rod Mounting CXS Auto switch B L F T Basic Axial foot Front flange Center trunnion Without auto switch (Built-in magnet) CXT Refer to table below for auto switch model no.