Air Cylinder

*1 v v V v v IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 v v V v v Water resistant (2-color indicator) 2-wire 12 V M9BAV*1 M9BA*1 v v V v v G5BA*1 V v v Diagnostic output (2-color indicator) 4-wire (NPN) 5 V, 12 V H7NF V V v v IC circuit Yes 3-wire (Equiv. to NPN) 5 V A96V A96 V V IC circuit 100 V A93V*2 A93 V V V V Reed auto switch No 100 V or less A90V A90 V V IC circuit

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/4 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 2 position double: VFR521 -E, VFR521 -D(Z) 3 position closed center: VFR531 -E, VFR531 -D(Z) 3 position exhaust center: VFR541 -E, VFR541 -D(Z) 3 position pressure center: VFR551 -E, VFR551 -D(Z) [For Rc 3/4] Rc 1/8 External pilot port 209 100 116 [134] 47.5 [43.5] Rc 1/8 (PE port) 9 [20] Rc 1/8 (PE port) 8 Manual override (Non-locking) 2 11 [13] A B 2 [

1

Series CS1 Series MB, Series MB1 Series MGG Bore size (mm) Bore size (mm) Bore size (mm) Port size Port size Port size 125 32 NPT 1/2 20 NPT 1/2 140 40, 50 NPT 3/4 25 NPT 1/8 160 63, 80 NPT 3/8 32 NPT 3/4 180 100 NPT 1/2 40 200 50 NPT 1/4 250 63 NPT 1 300 NPT 3/8 80 NPT 1/2 100 Standard model no.

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) Variations R 1/ 4, NPT 1/4, G 1/ 4 (With M5 male thread) URJ 1/4, TSJ 1/ 4 Port size Leak rate 1 x 10 5 Pa. m 3/ s 1 x 10 10 Pam3/s 100 kPa 1MPa 100 kPa 1 MPa Rated pressure range 0 0 0 0 100 kPa 100 kPa 2 outputs NPN or PNP Output Switch output Output voltage 1 to 5 V Analog output 16-2-27 4 High Precision, Digital Pressure Switch For General Fluids Series ZSE50F/ISE50 How to Order ISE50

10

1) 75 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 95 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 105 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 110 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 125

5 Port Solenoid Valve Series SY3000/5000/7000/9000

/surge voltage suppresser AC ( Hz) 50 60 1 100 VAC 2 200 VAC "YOZ" is not available.

Air Cylinder

8 62 107 116 25 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 62 111 120 32 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 64 113 122 40 7 12 M14 x 1.5 42.5 M32 x 2 1/4 88 143 154 With Rod Boot (mm) B3 e f h l ZZ Symbol Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200

ZP

ZM 4, 6, 8 tube M6 x 1 M8 x 1 ZH 6, 8 tube M6 x 1 M8 x 1 M6 x 1 M8 x 1.25 ZU How to Order ZL Vacuum entry port Mounting thread ZY Pad type Pad dia.

MG

1 CX 12 D-X 20Data 0.1 10 50 100 200 0.1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 100 (7) 50 Stroke or Less, V = 200 mm/s (8) Over 50 Stroke, V = 200 mm/s 300 300 100 100 80 100 100 80 63 50 50 63 50 Load weight m (kg) Load weight m (kg) 40 50 32 40 10 10 32 5 5 1 1 5 100 10 200 1 10 100 50 200 Eccentric distance l (mm) Eccentric distance l (mm) 8-19-13

Series KV2 Fittings

(g) Bag/Box Quantity L 5/32 1/4 3/8 1/2 5/8 5/32 1/4 3/8 1/2 5/8 KV2E03-00 KV2E07-00 KV2E11-00 KV2E13-00 KV2E15-00 1/2-20 9/16-18 7/8-14 1-12 1 1/8-12 17.46 17.46 25.40 28.57 33.33 32.1 34.1 42.1 44.1 50.0 16 17 21 22 25 16 17 21 22 25 13.5 15.0 23.0 26.0 29.0 1.6 3.5 5.4 8.5 9.8 32 30 87 117 191 100/400 100/400 100/100 100/100 50/50 Female Bulkhead Connector KV2E_ _-_ _ L1 L2 M Thread H1

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270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2 1 1 2 1 1 1 1 2 2 3 1 1 1 4 14-15-8 1 Air Tank Series AT Model/Standard Specifications AT11C AT22C AT37C AT55C AT75C AT125C AT150C (1) AT220C (1) AT6C Model Fluid Tank capacity (l) 400 500 700 Compressed air 1000 1500 2000 3000 100 200 Max. operating pressure (MPa) Port size

CL

range (mm) A Bore (mm) 40 50 63 80 100 BF AL B B1 BN BQ C FD FT FY GA GB BP D FX FZ GC E GD FV GL GR H1 W/o rod boot to 500 to 600 to 600 to 750 to 750 W/ rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 22 27 27 32 41 100 110 130 160 180 8 11 11 13 16 71 81 101 119 133 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 96 108 115 129 140 44

TABLE OF CONTENTS

AC DC PORTS PORTS 1/32 1/32 3/64 1/16 1/16 1/16 1/16 3/32 3/32 3/32 1/8 3/32 1/8 1/8 3/16 3/32 3/16 1/8 1/4 3/32 1/4 1/8 .024 .024 .052 .095 .095 .095 .095 .156 .156 .156 .284 .156 .284 .227 .500 .156 .500 .227 .700 .156 .700 .227 400 150 (200) 100 (135) 100 (135) 75 (100) 50 (70) 35 (40) 20 20 15 15 400 150 (200) 100 (135) 100 (135) 75 (100) 50 (70) 35 (40) 20 20 E23GG7DCCM E23HJ7DCCM

Cylinder with Lock

2 (Different surfaces) 60 65 75 80 85 2 (Same surface) 90 95 100 105 110 D-G39 D-K39 D-A3 n (Different surfaces) 60 + 30 (n 2) (n = 2, 4, 6, 8)1 65 + 30 (n 2) (n = 2, 4, 6, 8)1 75 + 30 (n 2) (n = 2, 4, 6, 8)1 80 + 30 (n 2) (n = 2, 4, 6, 8)1 85 + 30 (n 2) (n = 2, 4, 6, 8)1 n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8)1 95 + 100 (n 2) (n = 2, 4, 6, 8)1 100 + 100 (n 2) (n = 2, 4,

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Symbol Symbol 3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Port size Rc Valve size 1 to 4 1 2 3 Note) N.C.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 77 77 79 87 102 102 122 122 18 22 22 30 35 35 40 40 13 17 17 19 27 27 32 41 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 20 25 32 40 50 63 80 100

MB

Same side) 105 100 (n4) 2 120 + 55 (n4) 2 (n4) 2 125 + 55 (n4) 2 130 + 55 (n4) 2 (n4) 2 105 + 55 n = 4, 8, 12, 16 100 + 55 140 + 55 n (Same side) D-F5NTL n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 100 140 105 120 125 130 2 (Different sides or Same side) 1 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7 W 95 100 105 80 85 90 (n4) 2 (n4) 2 (n4) 2 (n4) 2 100 + 40 (n4)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 L = 100 mm Max. speed = 200 mm/s or less 11LEJS 10 10 LEYG32L LEYG32L 25ALEYG32L LEYG32L Load mass m [kg] Load mass m [kg] LEYG25L LEYG25L LEC LEYG25L LEYG25L 1 1 LEC S LEC SS-T 120 125 120 125 0.1 0.1 Stroke [mm] 100 1000 40 35 10 Stroke [mm] 100 1000 40 35 10 LEC Y LEC Y !1 L = 50 mm Max. speed = Over 200 mm/s !

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

C95

2 2 1 100 200 300 400 500 1000 1 100 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 6-12-28 29 Series C95N Specific Product Precautions 1 Be sure to read before handing.