8 @5 @3 w !6 !5 !1 !2 !0 Actuators !3 !
AD38 AD38NNote 5) AD48 AD48NNote 5) AD48 AD48NNote 5) Float type Note 4) auto drain N.C. AD27 AD37 AD37NNote 5) AD47 AD47NNote 5) AD47 AD47NNote 5) With back flow mechanism Filter regulator Note 1) Assembly includes a bracket and set nuts. Note 2) in part numbers for a round pressure gauge indicates a type of connection thread.
A 11.3 [5m ] A B-1 2 A A-1 1 L B B-2 6 LE-CP-1 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 S 8 3 4 + B-1 5 A-1 1 + B-3 2 A-3 8 14.2 B1 A1 17.7 2 1 14 18 10.2 6 A6 B6 5 B1 A1 B3 A3 2 1 5.7 15 16 L 11 30.7 11.4 [820m] A B-1 2 A A-1 1 L B B-2 6 LE-CP-1 B A-2 5 8 8m* COM-A/COM B-3 3 COM-B/ A
B-6 9 B A-6 8 3 14.2 2 1 (5.5) 14 B1 A1 5 6 17.7 2 1 18 A6 B6 (6.3) 15 16 11 30.7 44 - 113 [5m ] A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 S 4 B-1 5 A-1 1 B-3 2 A-3 (8) 14.2 B1 A1 17.7 2 1 14 18 6 A6 B6 5 10.2 B1 A1 2 1 B3 A3 (5.7) 15 16 11 30.7 114
C 20m* Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 * A (A-5) 6 B (B-6) * 9 B (A-6) 8 3 (14.2) (2 ) 2 1 ( (14) (1 ) 5.5) B1 A1 5 6 (17.7) (3 ) 2 1 (18) B6 A6 ( 6.3) 16 15 (11) (30.7) 66 - 15.3 [5m ] (1) (2 ) ---A B-1 2 L A A-1 1 B (B-2) 6 B (A-2) 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (3) 5 5m Shiel d Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 B (B-6) 9 B (A-6)
(W) 8) 8/7 22/12 (W) 9) 14 42 19 51 57 61 1) 713 150 LEHS10:30(F.S.),LEHS20:25(F.S.),LEHS32,40:20(F.S.) 2) () 3) 5m 5m 10%(15m 20%) 4) 5) () 6) () 7) () 452000Hz 1 () 8) () 9) 5 - 4.2 LEHS K 16 6N 10 1 3 1 R 3 10 10 D D 2 0 2 0 DIN 1DIN I/O (m) 32 32 40 40 1.5 1 1.5 1 3 3 3 3 L ) L ) 5 5 5 5 )1020 (mm) LECP6 LECP6 () NPN NPN K K PNP PNP LECP1 1 LECP1 () 1 NPN NPN
to 55C (23 to 131F) Note 1) 5 to 55C (23 to 131F) 5 to 55C (23 to 131F) Note 1) 5 to 50C (23 to 122F) Inlet air temperature Ambient temperature 5 to 50C (23 to 122F) 5 to 50C (23 to 131F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 25C (68F) 62 (2.2) 125 (4.4) 250 (8.8) 375 (13.2) 625 (22.1) 900 (31.8) 1190 (42.0) 725 (25.6
Flow rate ln/min* 100 550 550 2000 2000 4000 4000 Max Supply Pressure 1.5MPa / 220PSI 1.5MPa / 220PSI Max Operating Pressure 1MPa 1MPa Pressure Regulating Range 0.05~0.7MPa 0.05 ~0.85MPa / 8~125PSI Port Size for Pressure Gauge 116 18 N/A 18 N/A 14 N/A Ambient and Media Temperature 5 ~ 60C / 40~140F 5 ~ 60C / 40~140F Filtration Standard: 5m Standard: 5m 45 Bowl Capacity cm3 4 15 15 20 45 20
5M(81 25.4 /A 19.0 S(ltl | 6x 1.5 M99018199 orM.35M(B) 25.4 l.r/a 19.0 t 8 SC 20xl.5 M930282171 0[li{.5i,1(B} 38.0N/A 25.4 63 S(l{2Ix3 1t930?83171 OEM].OM(B} 44.5 r{/a 38.0 ? 1 5 S(ll25xl.5 ti930284171orMr.o[lf{BJ 44.5 fl/A 38.1 215 5(ltt35xl.5 M930285171 0Efi _25M 63.J38.0 43.0 2t0 sfitzth-12. 8ffi940 ($)0t[|Vc 49.049.6 )0.)
8 and @7 20 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P523010-5 Seal kit P391070-5 17 Rotary Table Series MSQ Dimensions/Size 10, 20, 30, 50 WB effective depth WC XB effective depth XC Basic type/MSQBA 8-WD depth WE (Circumference: 8 equivalents) XA 2 WA 2 4-JJ depth 8 45 2-J through JA depth of counter bore JB 22.5 BE WF 2-M5 x 0.8 Piping port (Plugged) BD Effective depth FB
n I CONI w thout Input block (So0) D-sub connector kii l25P) wlh 5 onr cable (2-lCylinder port size .5,r Input block Wlthou Sl uniuinput bock (SO0) Flat 'ibbon cable kl (26P1 with r 5m cabe Flal nbbon cable kt (26P) with 3 0m cab e Flai ribbon cable kl {26P1wrth 5 0m cabe Flal ribbon cable k l(20P) withoulcab e roLer) 11lrg Te'mrnal block box krt r16rn,)o, Lead wre kil ',!
Contact P/A regarding the valves 3 to 5.
Nil W High rigidity direct acting guide H Axial F Cable entry direction Series Cable length Without coupling With coupling 20 21 2m 3m 4m 5m 2 3 4 5 Stroke Lead screw lead Motor specification 10mm 20mm A C Standard motor Matsushita Electric Industrial Co., Ltd.
-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side 3m SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting D side Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D . 1 set: F kit 9 station manifold base SQ1130-5-C6 .
Stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 Bore (mm) 12 16 20 25 A L L1 37 3.5 3.5 4.5 5 14 39.5 44 15.5 18.5 22.5 45.5 Double clevis (mm) Bore (mm) 12 16 20 25 Stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 A B CD CT N RR CL CU CW CX CZ L L1 51.5 55 63 45.5 49 54 M4 X 0.7 28 5 5 8 10 4 4 5 5 6 6 9 10 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 14 M4 X 0.7 30.5 15.5
Straight connector type Angle connector type 15 Series SV EX500 Decentralized Serial Wiring Options 1in = 25.4mm Power cable with connector EX500 AP S 050 Cable length (l) Connector specifications 1m (3.24ft) 5m (16.2ft) Straight Angle 010 050 S A M12 M12 6 6 28.3 18 30 5 50 l 31.3 14.9 30 5 34 50 48 l 5 1 2 1 2 5 4 3 4 3 Socket connector pin arrangement Socket connector pin arrangement
U side 2 3 4 5 D side 1 VQZ2220-5M-C6 VQZ2320-5M-C6 VV5QZ22-05C 1 set (C kit 5 stations manifold base) VVQZ2000-10A-2 1 set (Blanking plate assembly) VQZ2120-5M-C6 1 set (Single solenoid part no.)
SEAL ULTRA HIGH SPEED SOLENOID VALVE VQ2000 2.35 5 PORT METAL/RUBBER SEAL ULTRA HIGH SPEED SOLENOID VALVE VQ4000 2.42 5 PORT METAL/RUBBER SEAL BASE MOUNTED PLUG IN TYPE VQ1000 2.46 5/2, 5/3 SPOOL & SLEEVE, ULTRA HIGH SPEED SOLENOID VALVE Courtesy of Steven Engineering, Inc. !