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(Example) CS2L160-500 28 to 30 160 I 3/4 BaSIC weight . 12.45 (kg) Additional weight .. .. 2 23 (kg!1 00 mm) Cylmder stroke .. 500 (mm) 3.

CL

40 CLS CLQ Bore (mm) Z Y ZZ M8 x 1.25 PH P PG PL S PW X 21 N NA LZ MM NN K LH LC LD LS LX LT 55 1/8 1/8 1/8 1/4 M20 x 1.5 196 8 20 38 127 20 22 19.5 3.2 40 167 6.8 24 15 4 25 5 20 MLGP M26 x 1.5 M10 x 1.25 210 8 25 20 41 137 24 27 24 55 3.2 40 177 6.8 30 15 4 28 5.5 25 M26 x 1.5 M10 x 1.25 212 8 25 20 41 139 24 27 24 55 3.2 40 179 6.8 34.5 15 4 28 5.5 32 RLQ M32 x 2 M14 x 1.5 250 10 27 23

Dedicated Controller

READY 23 System ready signal General purpose input/output terminal: CN2 Indicates that the SET-UP operation (start ready operation: return to home position after servo ON) is complete when ON. The state in which the program can be run. SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

Chamfer RR1 C NDH10 NDH10 MM C1 Chamfer A B E1 E1 NX NZ NZ NX U1 A1 A1 U1 L1 L1 Part no.

MXW

: Moment center position distance compensation amount L3 C1 MXW8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 (mm) (mm) MXW8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 L1 A1 MXW8 MXW12 MXW16 MXW20 MXW25 10 10 14 20 28 Mr My Mp W L2 B2 W W C2: Moment center position distance compensation amount My L1 A2 L3 C2 (mm) B2: Moment center position distance compensation amount MXW8 MXW12 MXW16 MXW20 MXW25 23

CXS

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

CXS

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

Compact Type Dual-Rod Cylinder Series CXSJ

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

Compact Cylinder with Air Cushion Series RQ

17 M6 x 1.0 10 5 28 23 43.5 Refer to page 9 for details on rod end nut and accessories.

Vacuum System Peripherals:

Section code Note) Mounting SUP/EXH block assembly When the location is non-standard, indicate both SUP/EXH block assembly part no., quantity and manifold part number. 13-14-23 23 Date issued: Photo copying this page is recommended.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

(mm) D H Bore size B GA L LB GC GB C A LX LH MM NB Y X NA Z S LD 3.5 through, 6.5 depth of counterbore 4 9.5 28 8 M4 x 0.7 12 4 8 31.5 85 65 10 15 12 14 16 5 11 20 23 16 4.5 through, 8 depth of counterbore 5 5 9.5 16 15 18.3 20 16 5 11 20 26 20 8 28 M5 x 0.8 10 16 31.5 86 66 Specific Product Precautions Be sure to read before handling. Caution on mounting Caution 1.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators d C2 C1 B2 H2 B1 H1 Material: Carbon steel (mm) Material: Carbon steel (mm) Part no. Applicable bore size Part no.

MXW Series Long Stroke Slide Table

L2 B1 Pitch moment Mp=W (L1 + A) A1: Correction value for moment center distance Yaw moment My=W (L2 + B) Roll moment Mr=W (L3 + C) (mm) B1: Correction value for moment center distance C1: Correction value for moment center distance 39 48 58 75 97 MXW 8 MXW12 MXW16 MXW20 MXW25 L3 C1 (mm) (mm) L1 A1 MXW 8 MXW12 MXW16 MXW20 MXW25 10 10 14 20 28 23 29 37 49 63 MXW 8 MXW12 MXW16 MXW20 MXW25 Mr

CRB2/CRBU2/CRB1

(If not specifying dimension C1, indicate "" instead.) C1 = C (mm) (mm) D1 L1 max. X D1 = Shaft type Size Y L2 max.

CJP

Panel Mounting Style CJPB M5 x 0.8 Exhaust port 5: C0.5 10, 15: C1 Hose nipple Refer to page 6-2-13. Mounting dimensions of CJ-5H-6. ( ) denotes the dimensions of CJ-5H-4. Rod end nut (Refer to page 6-2-13.)

CJP

Panel Mounting Style CJPB M5 x 0.8 Exhaust port 5: C0.5 10, 15: C1 Hose nipple Refer to page 6-2-13. Mounting dimensions of CJ-5H-6. ( ) denotes the dimensions of CJ-5H-4. Rod end nut (Refer to page 6-2-13.)

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

For more information, please refer to page 8-14-23.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Chamfer Cf7 NDH10 NDH10 MM C1 Chamfer E1 E1 B NZ NZ NX A NX U1 A1 A1 U1 L1 L1 Part no.

17

23 to 34.5 0 to 12 12 to 24 24 to 36 0 to 16 16 to 32 32 to 48 Stroke adjustment range by Intermediate fixing spacer (mm) MY1 W Stroke adjustment range is applicable for one side when mounted on a cylinder.

Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.