Port Size: 04 (1/2), Differential Pressure Indication: 0 (None), Hydraulic Fluid: 0 (Petroleum), Element: M (Micromesh), Filtration: 020 (20 μm), Bracket: None, Made to Order: X0 (Non-standard Filtration)

Port Size: 04 (1/2), Differential Pressure Indication: 5 (Differential Pressure Indication Switch), Hydraulic Fluid: 1 (Water-glycol, Emulsion), Element: P (Paper), Filtration: 010 (10 μm)

Port Size: 04 (1/2), Differential Pressure Indication: 4 (Differential Pressure Indicator), Hydraulic Fluid: 2 (Phosphoric Ester), Element: M (Micromesh), Filtration: 040 (40 μm), Bracket: None, Made to Order: X0 (Non-standard Filtration)

Port Size: 04 (1/2), Differential Pressure Indication: 0 (None), Hydraulic Fluid: 0 (Petroleum), Element: P (Paper), Filtration: 020 (20 μm)

Port Size: 04 (1/2), Differential Pressure Indication: 4 (Differential Pressure Indicator), Hydraulic Fluid: 0 (Petroleum), Element: P (Paper), Filtration: 020 (20 μm), Bracket: B (With Bracket)

Port Size: 04 (1/2), Differential Pressure Indication: 4 (Differential Pressure Indicator), Hydraulic Fluid: 1 (Water-glycol, Emulsion), Element: P (Paper), Filtration: 010 (10 μm)

Port Size: 1/2, Differential Pressure Indication: None, Hydraulic Fluid: Petroleum, Element: Paper, Filtration: 5 μm, Bracket: -, Made to Order: -

Port Size: 1/2, Differential Pressure Indication: None, Hydraulic Fluid: Petroleum, Element: Paper, Filtration: 20 μm, Bracket: With Bracket, Made to Order: -

Port Size: 1/2, Differential Pressure Indication: Differential Pressure Indicator, Hydraulic Fluid: Petroleum, Element: Paper, Filtration: 5 μm, Bracket: With Bracket, Made to Order: -

Port Size: 1/2, Differential Pressure Indication: None, Hydraulic Fluid: Petroleum, Element: Micromesh, Filtration: 20 μm, Bracket: None, Made to Order: Non-standard Filtration

Port Size: 1/2, Differential Pressure Indication: Differential Pressure Indication Switch, Hydraulic Fluid: Water-glycol, Emulsion, Element: Paper, Filtration: 10 μm, Bracket: -, Made to Order: -

Port Size: 1/2, Differential Pressure Indication: Differential Pressure Indicator, Hydraulic Fluid: Phosphoric Ester, Element: Micromesh, Filtration: 40 μm, Bracket: None, Made to Order: Non-standard Filtration

Port Size: 1/2, Differential Pressure Indication: Differential Pressure Indicator, Hydraulic Fluid: Water-glycol, Emulsion, Element: Paper, Filtration: 10 μm, Bracket: -, Made to Order: -

Battery-less

Make sure workpieces mounted on the table do not interfere with other workpieces or the facilities around the table. 3 Position after returning to origin 4 [ ] for when the direction of return to origin has changed [mm] Model H LEFB25ETST 115.8 LEFB25ETST B 158.8 Dimensions Model L A B n D E LEFB25ET-300m 541.8 306 467 6 2 340 LEFB25ET-500m 741.8 506 667 8 3 510 LEFB25ET-600m 841.8 606

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E F G H Without lock With lock LEKFS25Em-100m 335.5 380.5 106 210 4 100 45 LEKFS25Em-200m 435.5 480.5 206 310 6 2 240 220 LEKFS25Em-300m 535.5 580.5 306 410 8 3 360 340 LEKFS25Em-400m 635.5 680.5 406 510 8 3 360 340 LEKFS25Em-500m 735.5 780.5 506 610 10 4 480 460 35 14 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor LEKFS32E

Support Guide/11-LEFG Series

Note 4) When the suction flow rate is 0 L/min, the particle concentration is measured during operation without suction. 510 A Particle Generation Characteristics 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Particle Generation Characteristics Step Motor (Servo/24 VDC), Servo Motor (24 VDC) 11-LEFS16 Speed 500 mm/s 11-LEFS25 Speed 500 mm/s 10 10 LEF

LEKF-OMZ0035

Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000 500 601 to 700 700 420 210 930 620 310 1410 940 470 Stroke 701 to 800 550 330 160 750 500 250 1140 760 380 Speed [mm/s] Note2) range 801 to 900 610 410 200 930 620 310 Actuator specification 90 to 1000 510

LEH_C

50% 100% 3150 70% 100% 20L , 25L 520 40% 100% 2130 50% 100% [mm/sec] () 2130 50% 100% 520 40% 100% [mm/sec] () 4150 50% 100% 540 40% 100% 3150 80% 100% 1130 60% 100% 510 40% 100% 22 - 150% LEHZJ 1) (SVON ) 2)CN1 EMG() a)SVRE SETONON SVRE OFF SETON ON b) SVREON SVREON c) SVREON 3)CN1 M24V() a) b) (M24V) c) 1) 2) : CW () : CW 3) () 4) 23 - ()0.5m () (

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

(PAT.PEND) MHF MHL Over length L (mm) Gripping moment Weight (g) Bore size (mm) Model MHR (Nm) L MHK Over length L(mm) MHY2-10D 10 0.16 70 Gripping moment 71 Weight (g) Bore size (mm) Model (Nm) MHY2-16D 16 150 0.54 84 MHS L MHY2-20D 20 320 1.10 106 MHW2-20D 68 300 20 0.30 MHY2-25D 25 560 2.28 131 MHC MHW2-25D 510 25 0.73 78 At the pressure of 0.5 MPa 905 MHW2-32D 32 93.5 1.61 MHT Auto

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHY2-10D 10 0.16 70 Gripping moment 71 Weight (g) Bore size (mm) Model (Nm) MHY2-16D 16 150 0.54 84 MHS L MHY2-20D 20 320 1.10 106 MHW2-20D 300 68 20 0.30 MHY2-25D 25 560 2.28 131 MHC MHW2-25D 510 25 0.73 78 At the pressure of 0.5 MPa 905 MHW2-32D 32