CL

to 400 301 to 450 301 to 800 GB GB TB GB ZZ ZZ 210 227.5 230.5 255 ZZ ZZ 206 223 226 250 ZZ ZZ 206 223 226 250 20 25 32 40 186 201 204 230 149 159 162 178 12 12 12 13 20 25 32 40 190 205.5 208.5 235 149 159 162 178 12 12 12 13 125 135 136 151 186 201 204 230 149 159 162 178 12 12 12 13 14 14 14 15 201 to 350 301 to 400 301 to 450 301 to 800 11 11 11 12 20 25 32 40 9-2-32 Series CLG1 Fine

Table of Contents

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

Electric Actuators

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

Tie-rod Type Hydraulic Cylinder

B5/B64/B59W Note 1) BD1-10M CHS BA-08 BA-10 BA-05 BA-04 CH2 Note 1) The auto switches listed below cannot be mounted on 63.

Series IDG

IDG60S to IDG100S IDG3 to IDG50 IDG3H to IDG50H IDG30L/ IDG50L Port size With separator regulator Symbol Bore Size 3 5 10 20 30 50 60 75 100 V IDG60 to IDG100 IDG60H to IDG100H IDG60L to IDG100L 01 1/8 02 1/4 IDG60S to IDG100S Note) Note) 03 3/8 04 1/2 Note 1) Specifications with element service indicator are also available. See the order made section on page 33.

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

Metric size Type (recommended flow rate) Symbol Tubing size Applicable model 04 ZFC100 ZFC100 ZFC200 ZFC200 4 Flow rate l/min (ANR) (SCFM) Symbol Tubing size 100 200 101 201 Max. 20 (0.70) Max. 50 (1.75) Max. 20 (0.70) Max. 50 (1.75) Metric size (release button: light gray) 06 6 08 8 Inch size (release button: orange) Inch size Symbol 03 Applicable model ZFC101 ZFC101 ZFC201 ZFC201 Tubing

Refrigerated Air Dryer

308 309 310 311 312 Symbol 200 Note 1) 201 Note 1) 202 203 204 205 Note 1) In the case of option S, model no. will be differed.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Tube I.D. 32 to 80: 0 mm, Tube I.D. 100: 5 mm, Tube I.D. 125: 10 mm l h Bore size (mm) 901 1 51 101 151 201 301 401 501 601 701 801 901 1 51 101 151 201 301 401 501 601 701 801 L2 L9 H d e f to to to to to to to to to to to to to to to to to to to to to to to to 1000 25 50 100 150 200 300 400 500 600 700 800 900 1000 50 100 150 200 300 400 500 600 700 800 900 32 40 50 63 80 100 125 75 250

MNB

to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 32 40 50 63 80 100 36 23 12.5 25 37.5 50 125 86 98 111 75 136 100 161 73 186 300 326 350 376 426 476 526 41 23 12.5

MNB

to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 32 40 50 63 80 100 36 23 12.5 25 37.5 50 125 86 98 111 75 136 100 161 73 186 300 326 350 376 426 476 526 41 23 12.5

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

Air Suction Filter With One-touch Fittings Series ZFB 1

How to Order ZFB 100 04 IN/OUT applicable tubing O.D.

PF2D

Channel scan function (PF2D200, 201 only) Peak hold, Bottom hold display function (PF2D200, 201 only) The maximum or minimum value can be held in the case where the real-time flow rate display mode is selected during the initial setting. The hold value is reset when the power supply turns OFF or the hold is released.

MB

(mm) l ZZ Note) h Bore (mm) e f 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 1 to 50 1 to 50 51 to 100 51 to 100 101 to 150 101 to 150 151 to 200 151 to 200 201 to 300 201 to 300 301 to 400 301 to 400 401 to 500 401 to 500 501 to 600 501 to 600 601 to 700 601 to 700 701 to 800 701 to 800 801 to 900 801 to

70astamb1

to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 32 40 50 63 80 100 36 23 12.5 25 37.5 50 125 86 98 111 75 136 100 161 73 186 230 256 280 306 356 406 456 41 23 12.5

mb1

to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 32 40 50 63 80 100 36 23 12.5 25 37.5 50 125 86 98 111 75 136 100 161 73 186 230 256 280 306 356 406 456 41 23 12.5

10

CJ1 CJP TX TX LY LH 4 x LD CJ2 JCM X Y X Y TT LT CM2 LS + Stroke ZZ + Stroke LX LZ CM3 Rubber Bumper [mm] CG1 Bore size [mm] LS ZZ Bore size [mm] LD LH LS LT LX LY LZ TT TX TY X Y ZZ CG3 32 134 168 40 138 176 50 156 198 63 156 201 80 184 240 100 188 244 125 222 294 32 7 30 128 3.2 32 53 50 17 48 49 22 9 162 40 9 33 132 3.2 38 59 55 22 55 58 24 11 170 50 9 40 148 3.2 46 72.5 70 22 68 71 27

Cylinder with Lock

Bore size d H B C D NT-03 32 M10 x 1.25 6 17 19.6 16.5 NT-04 40 M14 x 1.5 8 22 25.4 21 NT-05 50, 63 M18 x 1.5 11 27 31.2 26 NT-08 80 M22 x 1.5 13 32 37 31 NT-10 100 M26 x 1.5 16 41 47.3 39 Double Acting, Single Rod Double Acting, Double Rod Lock Unit Made to Order Auto Switch *1 Split pins and flat washers are included.

MB1

to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 32 40 50 63 80 100 36 23 12.5 25 37.5 50 125 98 111 75 136 100 161 73 186 230 256 280 306 356 406 456 86 41 23 12.5

MNB

to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 32 40 50 63 80 100 73 98 23 12.5 25 36 37.5 50 125 86 111 136 75 161 100 186 300 326 350 376 426 476 526 81 106 23