4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1 Body width of 10 mm, C: 0.22 dm3/(sbar) 2 W C: 0.27 dm3/(sbar) 3.2 W (U type: Large flow) SQ VQ0 VQ4 Clean room specifications available as special.
double Grommet (G), (H): SY3240(R)-01 Scale: 35% G H With interface regulator 141 15 68.5 [75] 65.6 68 32.5 24.5 With plug (12.5) (37) 41 L type plug connector (L): SY3240(R)-L-01 M type plug connector (M): SY3240(R)-M-01 Grommet .
N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.
-16ASUP B L O C K P L AT E P R PR VVQ1000-N5-Station (1-Max. stations) N A M E P L AT E [-N] Direct exhaust [-S] B U I LT I N S I L E N C E R VVQ1000-F-L(VQ1000) E L B O W F I T T I N G S A S S E M B LY I N D I V I D U A L EXH S PA C E R EXH B L O C K B A S E A S S E M B LY VVQ1000-19A(VQ1000) F P L KQPP L A N K I N G P L U G 23 04 06 08 10 01 03 07 2 S TAT I O N S M AT C H I N G F I T T
fitting (A, B port) Applicable tubing O.D.: 6, 1/4" : 8, 5/16" (4.9) 36 (3.6) L plug connector (L) 10-SYJ7123-L-01 (-F) M plug connector (M) 10-SYJ7123-M-01 (-F) M8 connector (WO): 10-SYJ7123-WO-01 (-F) DIN Terminal (D): 10-SYJ7123-D-01 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 65 31.5[38.5] 101 MAX.10 57.5 16.1 46.2 31.1 M8 x 1 36 (Lead wire length) 18.5 42.6[49.6
Flow rate measuring range Minimum set unit PF2 0.5 to 10.5 l/min 0.5 to 10.5l /min 1 to 10 l/min 0.1 l/min 0.1 l/pulse 2.5 to 52.5 l/min 2.5 to 52.5 l/min 5 to 50 l/min 0.5 l/min 0.5 l/pulse 5 to 105 l/min 5 to 105 l/min 10 to 100 l/min 1 l/min 1 l/pulse 10 to 210 l/min 10 to 210 l/min 20 to 200 l/min 2 l/min 2 l/pulse 25 to 525 l/min 25 to 525 l/min 50 to 500 l/min 5 l/min 5 l/pulse IF
Type: General-Purpose/Standard Pressure Gauge, Maximum Indicated Pressure(Mpa): 1, Outer Diameter(φ): 57, Shape: Back side thread, Maximum Indicated Pressure: 1.0 MPa, Connection screw: R 1/8, Option: None, Size: 57, Transparent cover material: Polycarbonate, Special Configurations: None, Attachment: Clear cover has no protrusion (clear cover cannot be removed), Unit Specifications: MPa
" M5 x 0.8 18.3 23.1 12 12.7 7 13.5 AS121F-U10/32-07 AS221F-01-04 9.3 27.5 20.4 4 1/4" 10-32UNF 14.3 17 AS221F-01-01 AS221F-01-06 27.5 27.5 6 20.4 11.6 20.4 36.1 32.1 27.1 13.5 31.1 9.3 1/8" 14.2 12 (12.7) 1/8 16 12.7 AS221F-01-03 AS221F-01-08 32.4 8 20.4 15.2 18.5 19 27.5 25.3 17 9.3 5/32" 12 (12.7) AS221F-01-05 AS221F-01-10 14.2 14.3 40.2 10 23.1 18.5 21 15 21 30.2 36.1 31.1 27.1 33.1 17
50.1 [57.1] + 45 8.5 34.7 21.5 6 6 45.5 17 17 15 1/8 (P, R port) 32 24 L plug connector (L): 10-SYJ5143-L-01 M plug connector (M): 10-SYJ5143-M-01 DIN terminal (D, Y): 10-SYJ5143-01 M8 connector (WO): 10-SYJ5143-WO-01 D Y Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 Max. 10 50.1 [57.1] 75.4 64.1 34.7 M8 x 1 54.6 49 37.1 61.2 [68.2] Approx. 300 (Lead wire length) 6 Pg7
L (10) 8 Dimensions (24) (35) Applicable fittings size d 4 Model A L D 10-KQ2P-04 16 32 6 6 10-KQ2P-06 18 35 8 8 10-KQ2P-08 20.5 39 10 10 10-KQ2P-10 22 43 12 12 10-KQ2P-12 24 44.5 14 10-KQ2P-01 16 31.5 5 10-KQ2P-03 16 32 6 10-KQ2P-07 18 35 8.5 10-KQ2P-09 20.5 39 10 10-KQ2P-11 22 43 11.5 5.5 Rail mounting pitch 12.5 0 1 2 3 4 5 6 7 8 9 No.
3, Steel ball AXT625-3A-10 Note) A, B ports: 1/8, 1/4 3-8-51 52 Series VFS2000 Light Compact Type Sub-plate/C: 2.8 dm3/(sbar) C: 2.8 dm3/(sbar) C: 2.2 dm3/(sbar) Sub-plate Type L dimension (mm) 25.5 31 Weight (kg) 0.13 0.2 Compact type Standard type L dimension L dimension Compact type Standard type Sub-plate Compact: Plug-in, Grommet (With attachment plug lead wire) VFS200-F-(B) P01 P02
[48.5] + 35.6 28.5 26.1 R1 P R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14
connector (L): SX3240(R)-L-01 M plug connector (M): SX3240(R)-M-01 Manual override (Press and turn for the locking type.)
02 01 02 01 02 01 02 01 02 Light/Surge voltage suppressor (At TZ) Applicable cable O.D. 6 to 8 Applicable cable O.D. 2.3 to 2.8 Light/Surge voltage suppressor (At EZ) Light Light Max. 10 Max. 10 Other dimensions are the same as the grommet type.
Insulation Electrical entry Options 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) 5 (24V) 6 (12V) Class B Class H G S L, Z S L, Z 1 (2mm) 2 (3mm) 3 (4.5mm) 4 (6mm) C D, T G, C S T (1) VX22 VX23 VX21 01 ( ) 02 ( ) 02 ( ) 03 ( ) 02 ( ) 03 ( ) 1 8 1 4 1 4 1 4 38 AC 38 Ordering Example (Example) Series VX22, Orifice size 4.5mm, Rc(PT)1/4, 100V AC conduit (Part number) VX2232-02
(B), 2(A) port 20 14.6 12 10 10 P 7.2 PE port M5 x 0.8 (Not applicable to standard.) 5-Rc 1/8 1(P), 2(B), 3(R2), 4(A), 5(R1) port 13.4 13.4 1.1 M5 x 0.8 external pilot port (Only external pilot type (R)) L plug connector (L): VQZ1150 1(R)-L-01 M plug connector (M): VQZ1150 1(R)-M-01 Cross section 0.23 mm2 Cover diameter 1.5 (Lead wire length) 54 <59> 300 77 (Metal seal) 75 (Rubber seal)
Applicable bore size (mm) Snap ring l l A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m +0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 C type 3.2 C type 3.2 0.030 0.060 +0.048 0 0.030 0.060 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 8 25 M5 x 0.8 6.4 12 14 4.8 22.7 18.3 1.5 0.7 4.8 16.6 12.2 1.5
H N I C A L SPECIFICATIONS 10 Bar = 1 MPa Vacuum Models Pressure Models Pressure Models 1 Bar (14.5PSI) 10 Bar (145PSI) NPN Output ZSE4-01-25L ISE4L-01-25L ISE4-01-25L PNP Output ZSE4-01-65L ISE4L-01-65L ISE4-01-65L Analog Output ZSE4-01-26L ISE4L-01-26L ISE4-01-26L Operating Pressure Range +10 to -101KPa (1.5~15PSI) -0.1~1 Bar (-1.5~15PSI) -1~10 Bar (-1.5~145PSI) Minimum Displayed Unit mmHG
3000 4 4000 5 5000, 6000 Model Port Size Exh Port A B C D E F G H L O C K I N G O P T I O N NVHS2500 1/8, 1/4 1/8 60 20 12.8 40 44 33 28 7.5 0 Standard 5 Lockable NVHS3500 1/4, 3/8 1/4 73 29 12.8 53 53 42 29 7.7 NVHS4500 1/4, 3/8, 1/2 3/8 85 32 12.6 70 64 49 36 10 NVHS5500 3/4, 1 1/2 136 56 32 90 80 65 54 10 I N P U T P O R T S I Z E 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 H A N D L E C O
Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure