High Vacuum Angle Valve

Refer to maintenance parts 7-1 7-2 8 9 Refer to part no.

Aluminum High Vacuum Angle Valve

Refer to maintenance parts 7-1 7-2 8 9 Refer to part no.

XL

(actuation port [2]-(7) is released) Conversely, by applying pressure to actuation port [2]-(7), the piston (8), sealed by the cylinder seal (13) and the piston seal (9), is operated closing the valve (15) which is sealed by the valve seal (14).

Multi-Axis Step Motor Controller

(Refer to page 12.) 7 4-Axis Step Motor Controller (Parallel I/O/ Type) JXC73/83/93 Series JXC92 JXC73/83/93 How to Order Parallel I/O (JXC73/83) JXC 7 3 2 Controller I/O type I/O cable, mounting Symbol I/O cable Mounting 1 1.5 m Screw mounting 2 1.5 m DIN rail 3 3 m Screw mounting 4 3 m DIN rail 5 5 m Screw mounting 6 5 m DIN rail 7 None Screw mounting 8 None DIN rail Symbol I/O type 7

High Vacuum Angle Valve, XL Series

(actuation port [2]-(7) is released) Conversely, by applying pressure to actuation port [2]-(7), the piston (8), sealed by the cylinder seal (13) and the piston seal (9), is operated closing the valve (15) which is sealed by the valve seal (14).

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Environment

(The lock cable is included when the motor with lock option is selected.) *7 Standard cable entry is (A) Axis side. i Cable length [m]*5, *8 o Driver type*5 25A25ANil Without cable 2 2 5 5 A 10 Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to

MY1

7 !

MXW

For details, refer to page 8-30-31. 8-7-22

Title not found

2 1-3/16 1-1/4 1-7/16 1-3/4 1-7/8 2 2-1/4 2-1/2 10 1-3/8 1-7/16 1-5/8 1-7/8 2 2-1/8 2-7/16 2-3/4 15 1-1/16 1-3/4 1-7/8 2-1/8 2-1/4 2-3/8 2-11/16 3 20 2 2 2-1/8 2-3/8 2-1/2 2-5/8 2-7/8 3-1/4 30 2-3/8 2-7/16 2-1/2 2-3/4 2-3/4 2-7/8 3-1/4 3-1/2 40 2-3/4 2-3/4 2-7/8 3 3 3-1/4 3-1/2 3-3/4 50 3-1/8 3-1/8 3-1/4 3-3/8 3-1/2 3-1/2 3-3/4 4 75 3-3/4 3-3/4 3-7/8 4 4 4-1/8 4-3/8 4-1/2 100 4-3/8 4-3/8

Title not found

2 1-3/16 1-1/4 1-7/16 1-3/4 1-7/8 2 2-1/4 2-1/2 10 1-3/8 1-7/16 1-5/8 1-7/8 2 2-1/8 2-7/16 2-3/4 15 1-1/16 1-3/4 1-7/8 2-1/8 2-1/4 2-3/8 2-11/16 3 20 2 2 2-1/8 2-3/8 2-1/2 2-5/8 2-7/8 3-1/4 30 2-3/8 2-7/16 2-1/2 2-3/4 2-3/4 2-7/8 3-1/4 3-1/2 40 2-3/4 2-3/4 2-7/8 3 3 3-1/4 3-1/2 3-3/4 50 3-1/8 3-1/8 3-1/4 3-3/8 3-1/2 3-1/2 3-3/4 4 75 3-3/4 3-3/4 3-7/8 4 4 4-1/8 4-3/8 4-1/2 100 4-3/8 4-3/8

Environment

0 #3 #4 #3 #2 #1 @7 !6 o !7 !8 y t q w e r i u @2 #6 #5 When rod end male thread selected Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

MXW Series Long Stroke Slide Table

113 84 187 335 200 275 60 67 MXW25-250 1 640 7 138 109 210 360 225 300 65 80 MXW25-275 1 690 7 163 134 232 395 245 320 60 60 52 MXW25-300 2 740 8 188 159 153 MXW Series Long Stroke Slide Table Auto Switch / Suitable Mounting Position at Stroke End Detection Reed switch: D-A90 (V), D-A93 (V), D-A96 (V) Switch operation range Stroke (mm) Model 25 50 75 100 125 150 175 200 225 250 275 300

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

7 !

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Applicable bore size C1 d H1 C2 d H2 B1 B2 4 SNJ-010B 6 11 12.7 M8 x 1.0 4 3.2 NTJ-006A 6 5.5 6.4 M3 x 0.5 2.4 SNJ-016C SNKJ-016C 10 16 NTJ-010C NTJ-015C 10 16 14 17 16.2 19.6 M10 x 1.0 M12 x 1.0 7 8 8.1 9.2 M4 x 0.7 M5 x 0.8 4 4 The applicable mounting nuts are different from those for standard cylinders. 694 CJ2W-Z Series 10-/1121-/2210, 16 Double Rod Cylinder RoHS How to Order Clean series

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

1 ZQ 4 Lock nut 2 pcs. included for male thread mounting (Not included for female thread mounting) y ZR 5 Lock pin 6 Check valve ZB 7 Lock plate !5 ZA Replacement Parts ZX No. Description Part no.

Oil-Free / External Parts Copper-Free Pressure Gauge / With Limit Indicator G46E Series that uses air as the operating fluid.FeaturesIndication precision ±3% F.S. (full span).· Fluid contact part cleaning Wetted parts degrease washing.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Applicable bore size SNJ-016C SNKJ-016C 10 16 C1 d C2 d B1 B2 H1 H2 14 17 16.2 19.6 4 4 7 8 8.1 9.2 3.2 4 M10 x 1.0 M12 x 1.0 M4 x 0.7 M5 x 0.8 The applicable mounting nuts are different from those for standard cylinders. 7 B CJ2W-Z Series 10-/1121-/22Double Rod Cylinder 10, 16 How to Order Clean series 10 11 Relief type Vacuum suction type M9BW Z 60 16 L W 2 J D C 10 B M9BW Z 60 16 L

Display Pressure: 10 (1.0MPa), Connection Thread: 01M (R 1/8, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 15 (1.5MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten)