Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (

V

O Z Z L E D I A M E T E R S High Vacuum Type (-640mmHg / -12PSI) L Low Vacuum Type (-360mmHg / -7PSI) PSI -12 -12 -7 -7 05 0.5mm 07 0.7mm Suction Flow Rate nl/min 7 9 10 18 Air Consumption nl/min 9.5 19 9.5 19 D I M E N S I O N S S E R I E S ZU A P P L I C A B L E T U B E OD 6 A P P L I C A B L E T U B E OD 6 Courtesy of Steven Engineering, Inc. !

ZP

Pad typePad diameter Pad diameter (Symbol) Pad type B04 03 05 06 B06 07 B08 U (Flat) C (Flat with rib) UT (Thin flat) B (Bellows) Dimensions: Pad Unit ZP2-03U ZP2-B04U ZP2-05UT ZP2-06UT ZP2-B06B ZP2-B08B 7 7 7 7 7 7 12 12 12 12 13 13 4 4 0.8 0.5 0.3 0.3 0.8 1.2 1.6 1.6 2.5 2.5 5 6 4 3 4.7 3.3 4.7 6 3.5 8 9 7 9 10 ZP2-B06C ZP2-07C ZP2-B08C Adapter Mounting Dimensions 7 7 7 If an adapter will

LEC-OM02704CN

X1 5 4 6 5 4 6 3.2.3 3 3 7 7 2 2 1 0 9 8 1 0 9 8 SW1 SW 1 3.2.5 (CNP1) 4.1 4.3 12.1 CC-Link L.

Table of Contents

Note 5) Includes 1 l/min (ANR) of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator. Note 6) When highly purified air is required, refer to Caution on Design on page 14-19-7.

4/5 Port Air Operated Valve Series SYJA3000

60.2 [62.4] 59.6 [61.8] 37.5 (DIN 38.7) 38.1 (DIN 39.3) 87.2 [91.6] 103.2 [107.6] R P P R B B B B B 21 7 35 17.5 A A A A A 20.9 (DIN 22.1) (DIN 6.7) 1/8 (P, R port) 3.5 5.5 (Pitch) P = 16 18 Built-in speed controller (Station 1) (Station n) Max. 13.5 47.5 (Light/Surge voltage suppressor) 52.6 [59.6] + + + 37.2 A A 18.5 5.5 24 B B (Pitch) P = 16 23 M5 x 0.8 (A, B port) L plug connector (L

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

: Approx. 600 (Lead wire length) 48.5 A 18 27 34 R P Manual override 2 x 4.5 (For mounting) 40 4 (Light/surge voltage suppressor) + 58 [65] 54.5 42.6 26 X 20 20 1/4, 1/8 (P, R port) 23 15 48 L plug connector (L): 10-SYJ74M-LM plug connector (M): 10-SYJ74M-M01 02 DIN terminal (D, Y): 10-SYJ74MD Y01 02 M8 connector (WO): 10-SYJ74M-WO01 02 01 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead

Mechanical Valves Series NVM, NVFM, NVZNI

(3) 1 0 6 23 9) 1 5 7 (40) 1 7 1 (18) 1 0 6 t?7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: I I I SM.9.

IIIIIII

(3) 1 0 6 23 9) 1 5 7 (40) 1 7 1 (18) 1 0 6 t?7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: SM.9.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

7 1.5 34.7 40 40.2 AS221F-02-08ST AS221F-N02-05ST 16.5 27.2 36.4 3/16" 12.8 25.2 34.5 8 18.5 15.2 42 17.7 42 40.2 AS221F-02-10ST AS221F-N02-07ST 18.3 17 NPT1/4 17.5 18.5 7 1.5 34.7 1/4" 13.2 25.2 34.5 35.3 44.5 10 21 18.5 44 AS321F-02-06ST AS221F-N02-09ST 18.5 5/16" 15.2 27.2 36.4 27.8 39.3 6 17 12.8 73 44 18.3 AS321F-02-08ST AS221F-N02-11ST 21 18.5 35.3 44.5 3/8" 29.5 41 8 18.5 15.2 76

3 Port Air Operated Valve Series SYJA300

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

VQ4000

n Dimensions L n Dimensions 8 263 276 L1 L2 7 238 251 8 263 276 L1 L2 6 213 226 7 238 251 5 188 201 6 213 226 4 163 176 5 188 201 3 138 151 4 163 176 1 2 113 126 3 138 151 1 2 113 126 88 101 88 101 L n L n 9 288 301 15 463 476 14 413 426 13 388 401 12 363 376 11 338 351 10 313 326 9 288 301 16 463 476 15 463 476 14 413 426 13 388 401 12 363 376 11 338 351 10 313 326 16 463 476 L1 L2 L1 L2

SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 L1 L2 L3 L4 98 87.5 70 14 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12 148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12

Free Mount Cylinder

Applicable bore (mm) d H1 B1 C1 Width across flats L 2-P through 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 2.4 4 5 5 6 5.5 7 8 10 13 17 6.4 8.1 9.2 11.5 15.0 19.6 4-T counterbore A' M4 x 0.7 S + Stroke Auto switch M5 x 0.8 Z + Stroke M6 x 1.0 M8 x 1.25 M10 x 1.25 Bore size (mm) A A' B C D E GA GB H J K L MM NN P Q QA 6 10 16 20 25 32 7 10 11 12 15.5 19.5

OMU0023

How to order L A T H 7 1 Cable length 1 1m ii. Dimensions iii. Wiring diagram Insulation color Terminal No. Function White Shield Black (2) Communication cable (between the branch connector and controller) i. How to order L E C C G 1 L Cable length(L) K 0.3m L 0.5m 1 1m ii. Dimensions 70 - (3) Cable between branches (between the branch connectors) i.

Speed Controller with Indicator

In addition, the universal type is only available with 180 setting. 5 Speed Controller with Indicator Series AS-FS Needle Valve/Flow Rate Characteristics AS101FS-M5, AS111FS-M5 AS201FS-01, AS211FS-01 AS201FS-02, AS211FS-02 600 300 AS-FS AS-FSG Uni-AS-FS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate

Rubber seal 5 Port Solenoid Valve Series SYJ7000

+ 64.6 54 42.1 36.5 25.5 20 12 43.6 22 22 11.5 34 18 1/4 (R1, R2 port) 31.5 63 M plug connector (M): SYJ7140-M01 02 DIN terminal (D): SYJ7140-D01 02 M8 connector (W0): SYJ7140-W001 02 L plug connector (L): SYJ7140-L01 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 91 104.2 Max. .10 57.5 [64.5] 83.5 72.2 42.1 62 M8 x 1 57.1 44.5 (Lead wire length) Approx. 300 68.6 [75.6]

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Entry Vertical ~ _~ Connection Male thread Female thread Vacuum ~2~8 Ms x O.8,M6 x l M4 X O.7,MS X O.8 entry Thread 11O ~16 MS X O.8,M6 x l M5 X O.8,M6 x l ,Ys dia. 120-~32 M6 X l ,M8 x l MsxO.8,M6x I ,M8 x l .2S,Y, -140'1S0 M6 X l ,M8 x l M6 Xl,M8 x 1.25, Va Mounting Use connection for vacuum entry NBR(Black!

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(Y): VQZ2l5(R)-lYl01 02 01 02 L plug connecter (L): VQZ2l5(R)-lLlVQZ VZ Indicator light 83(84) 300 VS (Lead wire) Cover dia 1.5 Cross section 0.23mm2 Pg.7 53(56.5) 87 MAX.10 Applicable cord O.D.

Stainless Steel One-touch Fittings Series KG

L B D MS-5H-4 MS-5H-6 15.5 16.5 6.5 8.5 2.1 4.0 2.5 3.7 7 8 7 8 1.8 2.5 Hose elbow: MS-5HLH-4, -6 B Effective orifice(mm 2) Weight (g) Part No.