C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

CS1

40 90 59 43 14 39 36 40 32 to 1200 3/4 M40 X 1.5 60 63 41 90 115 18.5 204 162 M18 X 1.5 20 17 23 45 70 48 39 44 50 40 to 1200 3/4 1 Lube Non-lube M45 X 1.5 60 63 90 115 18.5 46 20 226 182 M20 X 1.5 17 50 48 44 25 74 39 50 40 to 1200 M56 X 2 71 67 140 25 56 277 225 23 M24 X 1.5 110 60 60 20 55 30 86 49 63 50 to 1200 1 M64 X 2 80 76 65 140 30 330 270 M30 X 1.5 23 130 37 70 96 60 20 49 68 80

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(8.3-2O0OHz) o External Pilot Tape,/ NVJ300R An external pilot supply is required when main valve pressures are lower than 20 PSl.

o

(8.3-2O0OHz) o External Pilot Tape,/ NVJ300R An external pilot supply is required when main valve pressures are lower than 20 PSl.

o

(8.3-2O0OHz) o External Pilot Tape,/ NVJ300R An external pilot supply is required when main valve pressures are lower than 20 PSl.

LEJ-OM004xx

(reference value) 11-LEJS40* Speed 600mm/sec Speed 1200mm/sec 100,000,000 100,000,000 10,000,000 10,000,000 ISOclass8 ISOclass8 0/mi n( AN R ) ISOclass6 1,000,000 1,000,000 ISOclass7 ISOclass7 Particl concentration[Particls/m 3] Particl concentration[Particls/m 3] 100,000 100,000 0/mi n( AN R ) ISOclass6 10,000 10,000 ISOclass5 ISOclass5 50/mi n( AN R ) 20/mi n( AN R ) 1,000 1,000 ISOclass4

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

10 to 16 20 to 50 Pad dia.

3 Way,3 Port Solenoid Valve NVZ Series

-(OG) NW$21-20-(OH) L type plug connec-tor M typ plug connector /NW4Z1-20-(OL) /NW4Z1-20-(OM) 11.91(3m) f]: with indicator light ancj surge voltage suppressor Symbol (intmal pilot tpe) N.C.

NVZseies

-(OG) NW$21-20-(OH) L type plug connec-tor M typ plug connector /NW4Z1-20-(OL) /NW4Z1-20-(OM) 11.91(3m) f]: with indicator light ancj surge voltage suppressor Symbol (intmal pilot tpe) N.C.

High Vacuum L Type Valve

Please note, when selecting a product without an auto switch(es) (excluding those with built-in magnet), it is not possible to mount an auto switch(es) following receipt of the product from an SMC factory. Mounting Caution All models 1. In high humidity environments, keep the valve packed until the time of installation. 2.

！ Contact our sales office for delivery dates and prices since this is a special model. SP157X-014E P TY P.G.Information (Specialized Product ) Step motor (Servo 24 DC) SMC Corporation Absolute Controller 4-14-

Note 3) The temperature is 20 (8hrs/day). When operating temperature rises, battery performance deteriorates and the period for battery replacement shortens. Note 4) This is a guide for normal temperatures (20). If the operating temperature is higher or lower than this, the retention period will be shorter.

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: T1U (T1+U))

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: M (Applicabe to DI Water Piping)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: T (High-pressure Pump Mounted)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: DM (w/Electric Conductivity Control Function, Applicable to DI Water Piping)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: TU (T+U)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: U (Conforming to UL Standards)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: MT (M + T)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: DMU (DM+U)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: DMT (DM+T)