CQ2

21 25 30 30 40 50 55 M5 X 0.8 M6 X 1 6.3 8.1 7 10 14.6 0.4 0.2 0.2 0 0.4 0.2 0.4 0.2 0.5 0.3 0.5 0.3 0.5 0.3 0.5 0.3 IY-G012 5 5 8 10 10 14 18 22 5 5 8 10 10 14 18 22 12 16 20 25 32, 40 50, 63 80 100 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 10 12 16 20 22 28 38 44 +0.048 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070

SY

stations 2 to 20 stations 20 C44 C46 Note 1) An asterisk () indicates order made products.

Proposals for Energy Saving

across flats 7 Fluoro rubber 26.5 42.5 14 2.5 55 120 50 14.5 27 43 55.5 120.5 2 20 15.5 End pin Conductive fluoro rubber Dimensions for other strokes 12 Conductive fluoro rubber Stroke 20mm 30mm 50mm Y I G +10 +20 +40 H +4 +14 +59 0 1.6 Model INO-3769-2478-06U INO-3769-2478-08U A 6 8 Y 0.8 1 B 7 9 A +25 B Add an appropriate value from the 10mm stroke dimensions table. 149 &RXUWHV\RI6WHYHQ

NCA1

Hundredths Of An Inch Stroke Special Rod Trunnion Location NC A1T (150 ~ 400) * X46US * (in) Z RANGE MIN MAX Bore (in) MM KK A AA B BA C D DD E EA EE G J R TL TM TT UM UV WF Y P LF XI ZB 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1.43 1 2.5 1.18 4.5 2 1 1.71 2.36 3 5/8 2.89 4 3/4 2.87 2.92+stroke 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 9/16 5/16-24

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

36 (45) (37) (4.9) (For mounting) 2 x 3.2 (Light/surge voltage suppressor) (36.7) (40.2) 12.7 20.5 40.4 15 0.8 (20) 28.1 [35.1] + 1.6 (For manifold gasket positioning) 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 L plug connector (L): M plug connector (M): DIN terminal (D, Y): M8 connector (WO): 10-SY5 20-L(-F2) 3 4 5 10-SY5 20-M(-F2) 3 4 5 10-SY5 20(-F2) 3 4 5 10-SY5 20-WO(-F2) 3 4 5

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Size Foot bracket Mounting screws included in foot bracket 30 CRA1L30-Y-1 M5 x 0.8 x 25 50 CRA1L50-Y-1 M8 x 1.25 x 35 63 M10 x 1.5 x 40 CRA1L63-Y-1 80 CRA1L80-Y-1 M12 x 1.75 x 50 100 CRA1L100-Y-1 M12 x 1.75 x 50 Note 1) The part numbers shown above include mounting screw.

Compact 5-Port Solenoid Valve

Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 16 16 stations 02 2 stations Specified layout*2 (Up to 32 solenoids available) 10 10 stations 02 2 stations Specified layout*2 (Up to 20 solenoids available) y SUP/EXH block assembly 24 24 stations 20 20 stations *1 Double wiring: 2-position single, double, 3-position, and 4-position valves can be used

Table of Contents

y y e e r r r u u u Drain Drain Drain Component Parts Material No.

VFS

YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

AC

If it is equipped with an auto drain, check its operation once a day. yWhen the hydraulic pressure of an air-hydro unit must be raised. uWhen the pressure must be raised in an explosion-proof environment. iTo boost the pressure by remote operation, using an air operated type. rExhaust air After operating this product for an extended time in the set state, if the booster valve is switched,

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VV5Z5-21 VV5Z5-21P (EXH port) 2-Rc 1/8 Gasket Gasket Round head combination screw Applicable base VV5Z5-20 VV5Z5-21 ( ) M3 x 10 With spring washer Adapter plate Note) Please contact SMC when using an individual EXH spacer assembly, an individual or an adapter plate assembly on VV5Z5-21P .

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Series CY1L Size: 6, 10, 15, 20, 25, 32, 40 To ensure a permanent path Stable operation is possible, even with an eccentric load, by using ball bushings. When smoother operation is required, even with an eccentric load. Series CY1H Size: 10, 15, 20, 25, 32 The use of a linear guide facilitates a large load, large moment and high precision.

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

22 25 30 UU 118 139 167 202 D (g6) 15 17 20 25 D (g6) 15 17 20 25 H 36 41 50 60 H 36 41 50 60 H 36 41 50 60 UU 134 158 192 232 N 15 17 20 25 D (g6) 15 17 20 25 Size 50 63 80 100 Refer to pages 11-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-

A

D I M E N S I O N S A I R C U S H I O N T Y P E L O N G S T R O K E CG1BA A I R C U S H I O N T Y P E Bore P WA WH Wu (mm) 20 M5x0.8 14 23 30 25 M5x0.8 14 25 30 32 18 14 28.5 25 40 18 15 33 20 50 14 16 40.5 20 63 14 16 47.5 20 80 38 22 60.5 20 100 12 22 71 20 For those dimensions not shown please refer to Rubber Cushion Type.

Series VQ Base Mounted Metal Seal/Rubber Seal

An EXH block base ass'y is used in the blocking position when ordering an EXH spacer incorporated with a manifold No. However, do not order an EXH block base ass'y because it is attached to the spacer. When separately ordering an individual EXH spacer, separately order an EXH block base ass'y because it is not attached to the spacer.

Vacuum Pad

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08