Process Pump Series PA3000/5000/PAX1000 Series PB1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

IC

CH kPa 4 3 2 1 SW t e AV y D-IN RUN UP SET P-ON AU DOWN STOP READ r u AF i AR o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com t y u i o IR !

Vacuum Equipment

If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

HRX-OM-X071

For HRR050-AF-20/40G thread adapter set 1 set For HRR050-AN-20/40NPT thread adapter set 1 set 1 In the case of option Z, not included.

Precision Regulator

Note 7) Digital pressure switch is shipped together, but not assembled. 819 IR1000/2000/3000 Series For High/Low Temperature Environments 4 Clean Series 1 10 IR 0 IR 0 T Clean series For high/low temperature environments T L For high temperature For low temperature Specifications Specifications ISO Class 3 With M5 fitting (Applicable tubing O.D. 6) Cleanliness Bleed hole L For low temp. environments

IR1000/2000/3000

IR1000: G33-01 IR2000: G43-01 G Standard part number 80 Stations Ozone resistant specifications 2 stations 2 8 stations 8 4 For High and Low Temperature Environments Body size Standard part number T IR1000 IR2000 10 20 For high/low temperature environments Manifold type regulator T L For high temperature For low temperature Specifications Stations 2 to 8 stations Specifications Common SUP

VER2000/4000

6 q w e r t y u i Block packing !

ALF400 to 900, ALT-5/-9

T0604 How to Order Max. operating pressure Max. operating pressure T 0604 B 20 Length per roll Color Nylon tubing 20 20 m 100 m roll (Black, white only) Operating temperature (C) Symbol Color B W R BU Y G Black White Red Blue Yellow Green Maximum operating pressure is 1/3 max. of burst pressure at 60C, considering the safety ratio. Tube size 100 O.D. 6 I.D. 4 14-13-10

Cooling Capacity: 018 [Cooling Capacity: 1700/1900 W (50/60 Hz)], Pipe Thread: Rc, Option: T (High-pressure Pump Mounted)

Cooling Capacity: 018 [Cooling Capacity: 1700/1900 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: T (High-pressure Pump Mounted)

Cooling Capacity: 018 [Cooling Capacity: 1700/1900 W (50/60 Hz)], Pipe Thread: Rc, Option: High-pressure Pump Mounted

Cooling Capacity: 018 [Cooling Capacity: 1700/1900 W (50/60 Hz)], Pipe Thread: NPT with PT-NPT Conversion Fitting Set, Option: High-pressure Pump Mounted

Ionizer

Balance adjustment trimmer 4 x M4 x 0.7 depth 5 14 19 20 (For mounting, opposite side: Same) 13 17 7 Connection cable IZS31-CF-X210 14.9 16 20 20 52 (Cable length: Refer to the above table.) 65 8P modular jack (Plug for sensor cable) Maintenance detection level selection switch 15 100 4 x M4 x 0.7 depth 5 20 900 Connection cable length L (For mounting, opposite side: Same) 7 16 26 58 80x2

VY511, VYU5

READY POWER OUT VALVE OUTPUT DC24V OV COM SOL.a SOL.b +24V SIG OV 7 10 4 20-M3 x 0.5 65 72 A view 82 0.2 92 87.6 58.4 62 8 35.5 A 1.15-39

, 3.2 kW, 4.2 kW, 5.1 kW, 5.9 kW (at 60Hz); Temperature range setting: 5 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: single phase 200 to 230 VAC, 50/60Hz; Standards: CE, UL, RoHS; Circulating fluid: Tap water or 15% ethylene glycol, 30% Dowcal™100, ControXic 1642, Hexid A4, Coolflow IGE, NALCO®CCL105; SMC recommends Bypass Piping Set HRS-BP001 for Models HRS-012, HRS018

capacities: 1.3 kW, 1.7 kW (at 60Hz); Temperature range setting: 5 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: single phase 100 VAC, 50/60Hz or 115 VAC, 60Hz; Standards: CE, UL, RoHS; Circulating fluid: Tap water or 15% ethylene glycol, 30% Dowcal™100, ControXic 1642, Hexid A4, Coolflow IGE, NALCO®CCL105; SMC recommends Bypass Piping Set HRS-BP001 for Models HRS-012, HRS018

, 3.2 kW, 4.2 kW, 5.1 kW, 5.9 kW (at 60Hz); Temperature range setting: 5 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: single phase 200 to 230 VAC, 50/60Hz; Standards: CE, UL, RoHS; Circulating fluid: Tap water or 15% ethylene glycol, 30% Dowcal™100, ControXic 1642, Hexid A4, Coolflow IGE, NALCO®CCL105; SMC recommends Bypass Piping Set HRS-BP001 for Models HRS-012, HRS018

capacities: 1.3 kW, 1.7 kW (at 60Hz); Temperature range setting: 5 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: single phase 100 VAC, 50/60Hz or 115 VAC, 60Hz; Standards: CE, UL, RoHS; Circulating fluid: Tap water or 15% ethylene glycol, 30% Dowcal™100, ControXic 1642, Hexid A4, Coolflow IGE, NALCO®CCL105; SMC recommends Bypass Piping Set HRS-BP001 for Models HRS-012, HRS018