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10 114 128 74 8 RZQ T-bracket Dimensions Note) Applicable bore size (mm) Part no.

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H Caution 3.3 L 40 10 H Do not operate with the stroke adjusting unit fixed in an intermediate position.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

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Note 1) Only type E (Reed switch) is applicable as an auto switch when mounting a housing of 10.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Electric Actuators

1 85 90 35 Stroke + 334 2-T-slot 2 90 62 3-8H 10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 67 5.8 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-6.6 92 58 10 10 Stroke + 216 11.5 The body mounting reference plane should be used as a standard when mounting onto equipment.

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VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

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. 3 8 10 stations 10 Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations Symbol Porting specifications (A, B) Passage Symbol R1, R2 P 1 Side 2 Bottom Common Common Caution Option When using an exhaust cleaner, mount it downwards.

CATALOG

T I N G I N D I C AT O R Red LED = Output is OFF Green LED = Output is ON 10 M 5 M S E T T I N G P O I N T 5 M N O Z Z L E T Y P E The detection nozzle should have an I.D. of between 1.0~2.0mm and 2mm in depth.

Electric Actuator/Slider Type

V Servo motor power (V) W Servo motor power (W) U V W 22 Series LECSS-T Control Signal Wiring Example: LECSS2-T For sink I/O interface LECSS2-T 10 m or less Note 4) CN3 5 DICOM CN8 13 MBR RA1 Note 9) Short-circuit connector (Provided as an accessory) Electromagnetic brake interlock RA2 9 INP In position 15 ALM RA3 10 m or less Failure Note 3) Main circuit power supply Note 10) Note 4) CN3

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(End plate) (End plate) t t Series Part no. SX3000-77-1A SX5000-77-1A 10-SY3000 10-SY5000 Series Part no. SX3000-77-1A SX5000-77-1A 10-SY3000 10-SY5000 port EXH port Plug (White) These are inserted in unused cylinder ports and SUP, EXH ports. Purchasing order is available in units of 10 pieces. t 11 15 t 11 15 Series Assembly part no.

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Note) D: Max. diameter Applicable tubing T (with seal) Male Branch Tee: KJT Connection thread (T) UNF NPT 10-32 UNF <10-32 UNF> <10-32 UNF> Applicable tubing O.D.

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1 85 90 35 Stroke + 334 2-T-slot 2 90 62 3-8H 10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 67 5.8 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-6.6 92 58 10 10 Stroke + 216 11.5 The body mounting reference plane should be used as a standard when mounting onto equipment.

ZP

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

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Refer to pages 12-10-4 to 12-10-5 for the details on effective holding force and allowable overhanging distance. Misc. D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

CRB2/CRBU2/CRB1

sizes 10 15 Applicable sizes 10 Shaft types Description Shaft types S, Y J, K, T J, K, T J, K, T J, K, T Symbol Symbol 20 30 40 15 20 30 40 XA39 Shaft through hole Shaft through hole Shaft through hole S, Y K, T J S, Y K, T J XA31 XA33 XA37 XA45 XA47 Shaft-end female threads Shaft-end female threads Stepped round shaft Middle-cut chamfer Machined keyway XA40 XA41 XA42 Shaft through hole

V100

Number No. r t y u i SS070A 01 1A O-ring FKM 10 SS070A-80A-1 VFN Port size Clip Stainless steel 10 SS070A-80A-2 With 3.18/2 barb fitting With 4/2.5 barb fitting 01 02 Metal joint Stainless steel SS070A-80A-3 10 Leaf spring Stainless steel 10 SS070A-80A-4 Mounting bracket Stainless steel 10 SS070A-80A-5 < U Side End Plate Assembly > w U side end plate assembly no.

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Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Note 10) For an actuator with lock, add the power consumption for the lock.

Battery-less

5 r t w q y !6 !