Air Cylinder

60 74 8 90.4 74 46 46 71 Bore size Z 20 24 25 25 32 25 40 27 50 29 63 29 Head Trunnion (T) with Pivot Bracket TS Bracket mounting range B TH TT TW TY 4 x TF TV TX +0.10 0 TE ZZ + Stroke Z + Stroke Male Thread Female Thread (mm) (mm) Bore size B TE TF TH TS TT TV TW TX TY Z ZZ 20 38 10 5.5 25 28 3.2 35.8 42 16 28 93 (101) 114 (122) 25 45.5 10 5.5 30 33 3.2 39.8 42 20 28 98 (106) 119 (127)

Table of Contents

A B C D E F G H J Bracket dimensions Bracket part no.

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'A B C J O E F H:MSxna !H:M6xl ! Y ~..Rat type Rat wfIh rib Deep type Bellows type G I G Flat R a1wi1h.ri!> M. M5 Modol ~ M6 M8 M5 1M6 M8 M5 M6 M8 M4 IM5 M6 M8 ZPR10g 10 12 12 21 29.9 46 5 6 3 1.7 19 20 i''i: '')I {''::''j ,"i'i 1,;,,1 I 19 1 :P>~2 ZPRIl8 , 20 ZF!

Free Mount Cylinder

(mm) DQ HQ HP 2.6 19.5 36.5 4.8 19.5 36.5 7 19.5 36.5 9 19.5 36.5 7 20.5 37.5 9 20.5 37.5 ZPT-B4 ZC(D)UKC10 ZC(D)UKQ10 DQ HQ HP 18 29 50 15 27.5 48.5 12 25 46 9 20.5 42.5 7 20.5 42.5 18 25 46 12 24 45 18 21.5 42.5 15 21 42 12 21 44 9 19.5 41.5 DQ HQ HP 7 19.5 41.5 2.6 19.5 41.5 4.8 19.5 41.5 ZPT-B5 ZC(D)UKC16 ZC(D)UKQ16 12 21 44 15 21 44 18 21.5 44.5 23 23 46 28 23 46 35 23.5 46.5 12 24 47

C85

J 0.04 J 0.09 J 0.27J 0.4 J Allowable kinetic energy Air cushion/Double rod CS1 Air cushion 0.17 J 0.19 J 0.4 J 0.66 J 0.97 J C76 Non-rotating accuracy 1 30' 1 30' 1 1 0 42' 0 42' Non-rotating 0/+1.4 0/+1 Stroke tolerance (mm) C85 Maximum ambient temperature of rod boots only.

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB PA PB PW R Q GC JA JB 25, 50, 75, 100, 125, 150, 175, 200 250, 300, 350, 400 174 210 56.5 52 64 96.5 22 25 91.5 15.5 14.5 202 M12 45.5 55.5 46 56 54 62 7.5 M12 x 1.75 M14 x 2.0 25 31 M12 x 1.75 10.6 17.5 14.5 25.5 32.5 74 89 38 45 25 30 19 23 18 25 80 100 116 66 111.5 19 18

Modular F.R.L. Units

Standard specifications Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) P1 P2 A B*1 C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1 28.5 2 *2 28 29.5 27.8 40 37.5 65 37.5 66 AR25(K)-B 1/4, 3/8 1/8 53

2 Phase Stepper Motor/Without Motor Brake Series LXS

Proximity switch (optional) depth 5 10 7.5 15 pin plug 5H9 +0.030 0 E-M5 x 0.8 thread depth10 Home position switch (optional) 6 Refer to page 100 for connection cables. 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions. (This drawing shows a Tamagawa Seiki, Co., Ltd. motor.)

HRX-OM-X037

[Tips] WN-> A set of thread adapters that converts the connections from Rc to NPT is enclosed as an accessory. For NPT thread, be sure to use this adapter. A set of thread adapters that converts the connections from Rc to G is enclosed as an accessory.

AC Servo Motor Driver (Pulse input type/Positioning type)

When using a maximum of 7 point tables, wiring and input signal allocation of the DI2 must be implemented. 46 - (1) Example of Allocation of a Maximum of 7 Points in current SINK (NPN) Interface Changing pin CN1-7 from Reverse rotation start (ST2) to point table no.

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

LX

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

Table of Contents

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 46 76 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

8 PP A N W Z + Stroke TW NL (mm) Model A 97 102.5 125 NT 8 8 9 NL 15 15 18 N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16 25 HC 45 53 61.5 HB 33.5 41.5 46 HA 33.5 42.5 46 H 46 54 63 EB 21 22 24 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc 1/8 Rc 1/8 Z 194 205 250

MGP

K FA FB C+stroke E G B+stroke A+stroke MGG MGC MGPM, MGPL/Common Dimensions Standard stroke (mm) Bore (mm) MGF B C DA FA FB G GA GB H HA J K L MM ML NN OA OB PA PB PW R Q GC JA JB 25, 50, 75, 100, 125, 150, 175, 200 250, 300, 350, 400 52 64 174 210 56.5 10.6 17.5 14.5 25.5 96.5 22 25 91.5 15.5 14.5 202 M12 45.5 55.5 46 56 54 62 38 45 7.5 M14 X 2.0 25 31 M12 X 1.75 M12 X 1.75 32.5 74 89 18

ISO Standard Hydraulic Cylinder

K P Y ZZ E GB H M J NA S Z 40 25 to 800 M6 x 1 7.5 M16 x 1.5 46 29 6.5 161.5 22 52 19 40 22 58 12 19 25 33 8 3/8 58 34 16 47 107 132 50 25 to 800 M8 x 1 9 M20 x 1.5 46.5 28.5 8 176 28 65 25 50 28 58 15 24 31 34 11 3/8 65 42 16 59 108 139 63 25 to 800 M8 x 1 9 M27 x 2 46 33 12 198 36 77 32 58 36 66 19 30 38 31 13 1/2 69 50 18 74 115 153 80 25 to 800 10.5 M33 x 2 57 32 15 223.5 M10 x 1.25

CV/MVGQ

Allowable Kinetic Energy RS Q G 40 50 63 100 80 Bore size (mm) RS H A 2.4 J 4.4 J 7.8 J 20.5 J 11.7 J Allowable kinetic energy RZQ Solenoid Valve Specifications V308 Applicable solenoid valve model MI W S Coil rated voltage 100/200 VAC (50/60 Hz), 24 VDC JIS Symbol Allowable voltage CEP1 15 to 10% of the rated voltage Class B or equivalent (130C) Coil insulation CE1 50 Hz 8.5 VA Inrush 60

CV/MVGQ

Allowable Kinetic Energy RS Q G 40 50 63 100 80 Bore size (mm) RS H A 2.4 J 4.4 J 7.8 J 20.5 J 11.7 J Allowable kinetic energy RZQ Solenoid Valve Specifications V308 Applicable solenoid valve model MI W S Coil rated voltage 100/200 VAC (50/60 Hz), 24 VDC JIS Symbol Allowable voltage CEP1 15 to 10% of the rated voltage Class B or equivalent (130C) Coil insulation CE1 50 Hz 8.5 VA Inrush 60

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

56 56 59 62 NN 2 2 2 2 3 3 4 4 4 GA 18 18 18 22 48 73 74 96 118 HA 50 50 50 56 48 56 112 118 124 I 16 16 16 16 18 23 25 18 21 J 46 46 46 56 72 100 155 190 215 K 31 41 51 61 71 96 121 146 171 KA 126 183 211 239 NA 4 4 4 4 4 8 8 8 8 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5 ZZ 132 132 132 142 160 193 250 278 306 13-/22-MXQ20L10 13-/22-MXQ20L20

Fluoropolymer Piping Equipment

Dimensions Panel mount union reducing: LQ1P-R Panel thickness (Max. t) J W1 W2 M1 M2 B side A side H2 H1 E2 E1 L1 L2 Class 4 and 5 Panel hole diameter K Metric Size Model A side B side E1 E2 H1 H2 J K L1 L2 M1 M2 Min. port size t W1 W2 Applicable tubing O.D.