Cooling Capacity: 15 kW, Cooling Method: Air-cooled, Pipe Thread: N [NPT, (w/Rc-NPT conversion Fitting)], Option: w/Caster Adjuster-foot and w/Fluid Fill Port, Manual Fill

Cooling Capacity: 15 kW, Cooling Method: Water-cooled, Pipe Thread: N [NPT, (w/Rc-NPT conversion Fitting)], Option: w/Caster Adjuster-foot and w/Fluid Fill Port, Manual Fill

Cooling Capacity: 150, Thread Type: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option 1: A + K, UL Certification: -, Option 2: -

Cooling Capacity: 15 kW, Cooling Method: Water-cooled, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460-480 VAC (60 Hz)], Option: w/Caster Adjuster-foot and Fluid Fill Port

Cooling Capacity: 150, Thread Type: Rc, Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option 1: AK (A + K)

Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: N [NPT, (w/Rc-NPT conversion Fitting)], Option: AK (w/Caster Adjuster-foot and w/Fluid Fill Port, Manual Fill)

Cooling Capacity: 150 (15 kW), Cooling Method: W (Water-cooled), Pipe Thread: N [NPT, (w/Rc-NPT conversion Fitting)], Option: AK (w/Caster Adjuster-foot and w/Fluid Fill Port, Manual Fill)

Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: F [G, (w/Rc-G Conversion Fitting)], Option: AK (w/Caster Adjuster-foot and w/Fluid Fill Port, Manual Fill)

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

34.5 17 50 (51) AS32l1FSl-U03-06 6 1/4 19 16.6 AK 10.4 21.8 32.1 28.7 13.3 24.5 28.5 9.3 19.2 36 (37) AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41 (42) AS42l1FSl-U04-10 10 1/2 24 (23.8) VCHC 3/8 19 16.6 55.4 54 50.2 48.8 ASR ASQ 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 60 (59) AS42l1FSl-U04

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Model Metric size Inch size ASP 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS1001F 6, 10, 16, 20 ASN AS2001F 20, 25, 32 AS2051F 20, 25, 32, 40 AQ AS3001F 40, 50, 63 ASV AS4001F 63, 80, 100 AK Flow Rate and Effective Area ASS AS1001F AS2001F AS3001F AS2051F AS4001F Model JIS Symbol Metric size 6 6 8 10 6 8 3.2, 4, 6 4 10, 12 12 ASR Tubing O.D.

Vacuum System Peripherals:

40 e Valve Model Fill in the blanks below with symbols of necessary specifications.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS221F-02 AS231F-02 R 1/4 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" 40, 50, 63 AS321F-02 AS331F-02 R 1/4 40, 50, 63 AS321F-03 AS331F-03 R 3/8 63, 80, 100 AS421F-04 AS431F-04 R 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can be

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASN M5 Nil U10/32 01 02 03 04 AQ N ASV AK Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.

CY1

25 98 7.0+Lo 32 180 8.6+Lo 40 364 10.4+Lo Bore size (mm) 6.

Possible to transfer a workpiece at low-speed.

20 30 40 Size 20 30 40 The figure shows the view from the long shaft end.

REA/REB

Speed 600 mm/s D 20, 25, 32, 40 Attached from top with cap bolt Floating block L LA A Attached from bottom with cap bolt XB WF 2-SS (helical insert thread) Body FG XA LF Bolt size: MD R Note 2) S HL FF Note 1) HB Note 1) High Precision Guide Type REBH Switch rail FC D' Section D-D' (mm) FF Note 1) FE Note 1) FC BA BB CC A Bore size FH HB Note 1) SS FG MD R Note 2) LF XB HL L LA S WF XA 10

Magnetically Coupled Rodless Cylinder

4-MM thread depth J L 0 0.1 H B 2-P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N S + Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Nil 20, 25, 32, 40 TN TF Standard stroke Refer to page 12 for standard stroke.

HRX-OM-X071

] 1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature