Table of Contents 10) D1 E B D2 A Model S C S C S C S C 0.016 0.043 MHZ2-10 K 7 12f8 52.8 11 15 Applicable tubing End boss assembly MHZ2-16 K 0.016 0.043 10 16f8 58.7 15 20 MHZ2-20 K 0.020 0.053 D2 12 20f8 70.5 19 22 0.020 0.053 MHZ2-25 K 15 25f8 82.9 24 25 D1 MHZ Other dimensions and specifications correspond to the standard type.
-X CXS -R 10 15 20ZZ SS Z Data (Z) Manual lever insertion 1.7 K KK Hexagon (O) (Z) (mm) O K Model CXS10-R CXS15-R Width across flats 12 6.5 8.5 Width across flats 13 (mm) Symbol ZZ Z SS KK Stroke 50 40 30 20 50 10 10 50 40 30 20 40 30 20 10 10 20 50 40 30 Model CXS10-R CXS15-R 24.5 40 50 142 132 117 107 125 30 115 100 80 19.5 97 90 45 Dimensions other than those listed above are the same
LVC Select an option mark in page 17-3-10 by Applicable Fluids Check List for special fluids outside of the standard. LVA VXP2130: Option C, K, Q, S only.
(mm) Size Size Q1 = M 15 20 30 40 Q1 = M 15 20 30 40 Thread Shaft type K T K T K T K T Thread M3 x 0.5 2.5 2.5 2.5 2.5 M3 x 0.5 2.5 2.5 2.5 2.5 L1 = L1 = M4 x 0.7 3.3 3.3 3.3 L1 M4 x 0.7 3.3 3.3 3.3 L1 M5 x 0.8 4.2 4.2 M5 x 0.8 4.2 4.2 Q1 Q1 62 Series CRBU2 (Sizes: 10, 15, 20, 30, 40) Made to Order XC1, 2, 3, 4, 5, 6, 7, 30 Shaft type Standard W J K Refer to page 36.
K 20 m roll 100 m reel TUS1208 TUS0425 TUS0604 TUS0805 TUS1065 Model M Tubing O.D.
Standard stroke (mm) Bore size 12, 16 20, 25 Standard stroke 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Double acting Action D Built-in Magnet Cylinder Model If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch.
@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.
H G I J K L A B C D E F M R Size Tolerance +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 9 9 16 16 +0.027 0 +0.027 0 +0.027 0 +0.027 0 36 38 55 55 16 18 22 22 9 9 12 12 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 12 30 30
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
10 20 20 20 20 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy Stainless steel Nil W
20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.
239 K 20 P 90 Q 520 S 227 SS 279 Z 506 ZZ 534 CXWM20-225 CXWM20-250 CXWM20-275 CXWM20-300 107 264 20 90 570 252 304 556 584 119.5 289 20 90 620 277 329 606 634 132 314 20 90 670 302 354 656 684 Model F 38 L 240 K 28 P 220 Q 543 S 227 SS 296 Z 523 ZZ 563 CXWM32-225 CXWM32-250 38 265 28 245 593 252 321 573 613 CXWL series: 16, 25 (mm) Model F 115.5 L 239 K 41 P 90 Q 560 S 227 SS 321 Z 548
Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.
(mm) Bore size A AL B1 CD CI CX D E F FL G H H1 I K KA L MM NA NN 20 18 15.5 13 8 20 12 8 20 0 0.033 13 10.5 8 41 5 28 5 6 12 M8 x 1.25 24 M20 x 1.5 25 22 19.5 17 8 22 12 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 12 M10 x 1.25 30 M26 x 1.5 32 22 19.5 17 10 27 20 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 15 M10 x 1.25 34.5 M26 x 1.5 40 24 21 22 10 33 20 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12
(The SI unit type is provided for use in Japan.) 20 30 40 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Option (3) Applicable model AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) AW20(K) to 40(K) Description With bracket Float type auto-drain (N.C.) Float type auto-drain (N.O.)
OUT) port B A B 2 x Port size 1(IN), 2(OUT) port WN: M12 connector D F K C J E IN A B 2 x Port size 1(IN), 2(OUT) port [mm] Size Port size A B C D E F Glossary of Terms 20 1/4 28.1 40 69 36 12.5 18 3/8 48 G3/8 72 14 30 1/4 28.1 40 78 42 12.5 21 3/8 48 G3/8 81 14 Size Port size DIN terminal DIN terminal without connector M12 connector J K L J K J K 20 1/4 47.9 55.3 67 47.9 31.3 46.7 41.1
For details, refer to pages 3-7-19 and 3-7-20.
DL DM HR K Q Q M 20 20 21 28.5 40 B + Stroke L 25 21 21 29.5 41 E A + Stroke With rod end lock DM End lock mechanism Manual release Non-lock type ) ( 24 11 2-M5 x 0.8 4-N through D 1 Flat washer F Q B + Stroke L A + Stroke Rod end male thread H1 Bore size (mm) L1 H1 C1 X Standard stroke 18.5 10, 15, 20, 25 14 12 M8 x 1.25 28.5 20 50, 75, 100 32.5 M10 x 1.25 22.5 10, 15, 20, 25 C1 17.5 15
(G or L) LW53KK8XGB (G or L) 215 215 135 70 55 120 120 10 55 85 70 55 50 50 35 135 120 50 35 30 70 50 35 30 40 35 30 30 30 20 215 120 40 30 25 120 40 30 25 40 30 25 30 25 25 135 65 30 20 15 65 30 20 15 30 20 15 20 15 15 G 132 G 132 DE-ENERGIZED ENERGIZED G 132 H 364 G 132 J 116 G 132 V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564
25 Double-ported type MXQA 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC