Applicable bore size A1 L L1 MM Y-J010C 10 8 15.2 21 M4 x 0.7 Part no. Applicable bore size B1 C1 d H1 Part no. Applicable bore size B2 C2 d H2 SNJ-010C 10 11 12.7 M8 x 1.0 4 NTJ-010C 10 7 8.1 M4 x 0.7 3.2 Y-J016C 16 11 16.6 21 M5 x 0.8 SNJ-016C 16 14 16.2 M10 x 1.0 4 Part no.
1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Resin/HNBR Spool valve assembly e r t !0 !1 i q q u y For N.O.
L NZ RR1 NX E1 L1 MM U1 ND A1 Cotter pin Polishing ball 12 Y-04C 40 16 +0.3 +0.1 38 M14 X 1.5 12 22 24 55 13 25 55.5 3 X 18l Polishing ball 12 Y-05C 50, 63 +0.3 +0.1 16 38 M18 X 1.5 12 27 28 60 15 27 55.5 3 X 18l Polishing ball 18 Y-08C 80 +0.3 +0.1 28 55 M22 X 1.5 18 37 36 71 19 28 76.5 4 X 25l Polishing ball 20 Y-10C 100 +0.3 +0.1 30 61 M26 X 1.5 20 37 40 83 21 38 4 X 30l 83 Knuckle pins
Note 2) Vacuum grease (Fluorine-based, Y-VAC2) is applied to the external seal of the vacuum components.
0 i y u q o !0 i y Component Parts No. Description Material Note 1 Body A PBT 2 Knob POM 3 Body B PBT 4 Needle PBT 5 Needle guide Stainless steel 6 U-seal HNBR 7 Spacer PBT1 Component Parts No.
1 i y u q o !0 !1 i y q w e Component Parts No. Description Material Note 1 Body A PBT 2 Knob POM 3 Body B PBT 4 Needle PBT 5 Needle guide Brass Electroless nickel plating 6 U-seal HNBR 7 Spacer PBT1 Component Parts No.
KF 45' Female Elbow Y M a l e R u n T e e . . . . . T Male Branch Tee . , T Union Tee , . . . . . . , TF Female Branch Tee E Bulkhead Connector E Bulkhead Union . . , U Male Branch 'Y" . . . U Union "Y" . . . . . . . .
0 y !5 !4 @2 !3 w @4 @3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !6 !7 !8 !1 @1 !2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.
Note Material Aluminum die-casted (SX3000: Zinc die-casted) White Body q Adapter plate White White White Resin Resin w e End plate Pilot body Piston Spool valve assembly Molded coil r Resin t Resin y Aluminum, HNBR Gray u Resin Caution Replacement Parts Part no. SX340 SX540 SX740 Mounting Screw Tightening Torques No.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com a t y Component Parts No. Description Note Part no.
0 y !5 !4 @2 !3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !
Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: C (Analog Communication)
Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: N (NPT Fitting)
Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: CY (C+Y)
Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: NZ (N+Z)
Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: DY (D+Y)
Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: CN (C+N)