No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled refrigeration, Circulation fluid: clear water, deionized water, Main tank capacity: approximately 15 , Circulating fluid recovery tank: approximately 16, Compressor for HRZ008-L(1)-F, REFRIGERATED THERMO-COOLER, 737

No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled refrigeration, Circulation fluid: clear water, deionized water, Main tank capacity: approximately 15 , Circulating fluid recovery tank: approximately 16, Tank Cover R for HRZ008-L(1)-F, REFRIGERATED THERMO-COOLER,

No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled refrigeration, Circulation fluid: clear water, deionized water, Main tank capacity: approximately 15 , Circulating fluid recovery tank: approximately 16, Tank Cover L for HRZ008-L(1)-F, REFRIGERATED THERMO-COOLER,

No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled refrigeration, Circulation fluid: clear water, deionized water, Main tank capacity: approximately 15 , Circulating fluid recovery tank: approximately 16, Tank Insulation for HRZ008-L(1)-F, REFRIGERATED THERMO-COOLER

CLK1

Ht BY IA 43 25 40 Max.Wc 36 35 13 D 30 Width across flats K Ws Width across flats 44 Clevis width CLK1A: 16.5 R15 0.050 0.093 +0.027 0 Shaft: 12d9 Hole: 12H8 F +0.3 0 +0.4 0 CLK1B: 19.5 Z + Stroke S + Stroke 1.5 27 2 40 57 97 ZZ + Stroke Approx.

Clamp Cylinder with Lock Series CLK1

Ht BY IA 43 25 Max.Wc 40 36 35 13 D 30 Width across flats K Ws Width across flats 44 R15 Clevis width CLK1A: 16.5 0.050 0.093 +0.027 0 Shaft: 12d9 Hole: 12H8 F +0.3 0 +0.4 0 CLK1B: 19.5 Z + Stroke S + Stroke 1.5 27 2 40 57 97 ZZ + Stroke Approx.

SGC200-OMJ0004

(WS (WS (WS VS) VS) VS) VS) M12 M12 M12 M12 ( ( ( ( ) ) ) ) (WS (WS (WS (WS VS) VS) VS) VS) (WZ (WZ (WZ (WZ VZ) VZ) VZ) VZ) (WZ (WZ (WZ (WZ VZ) VZ) VZ) VZ) 8 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series/ / / / M12 M12 M12 M12 IP65() M12 IP65() (0.40.6Nm) IP65 30N IP65 M12 M12 M12 M12 ) M12 M12 M12 M12 M12 (4.5~7) IP65() 4.57()JIS C 3306

High Vacuum L Type Valve

D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa <> 13 XL-OMY0001 7 7-1. 2 2P5P6 14 XL-OMY0001 7-2 1 2 1 3 1 1 2 4 1 0.4MPa G 3 4 2 XLA

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Profile Design ISO/VDMA Air Cylinder Series CP95

(1+ ) FB allowable L1 L2 FB1 allowable 32 62.5 34.5 + st 80 N 40 74.0 39.0 + st 125 N 50 76.0 44.5 + st 195 N 63 91.0 44.5 + st 310 N 80 93.0 53.0 + st 500 N 100 104.0 57.5 + st 785 N e.g. 63mm bore, 100mm stroke, Ws = 20N Ws = (2kgs) 20N 144.5 91 FB1 = 20 (1+ ) = 51.76N Replacement parts: Seal kits 32 includes order No. from to , 40 100 includes from to FB1 = 51.76N 310N (from table)

•

g~ 57 WS I Bore F (mm) ' H IA IB ' L W N S WC ZZ GA GB 40 44 52 52 47 97 58 97 72 97 52 55 -49 58 49 58 37.5 43.5 49.5 37.5 43.5 I 5 7 30 10 30 10 30 12 194 194 194 52 60 52 74 50 55 63 69 49.5 5.5 * Pos$lble to fab(fcate the dImenSIOns of H and L othef than the standafd. N type (Semi-standard) 1 S mba. H L ZZ ~prE! .

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

CNA Vertical (Downward) Vertical (Upward) Horizontal collision CNS CLS Type of impact CLQ MLGP RLQ W 2 g Kinetic energy E1 V2 MLU Thrust energy E2 Fs Ws Fs Fs + Ws ML1C Absorbed energy E E1 + E2 DSymbol V: Impact speed (m/s) g: Gravitational acceleration (m/s2) W: Impact object weight (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) -X Air Cushion Stroke Note) The speed

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

CNA Vertical (Downward) Vertical (Upward) Horizontal collision CNS CLS Type of impact CLQ MLGP RLQ W 2 g Kinetic energy E1 V2 MLU Thrust energy E2 Fs Ws Fs Fs + Ws ML1C Absorbed energy E E1 + E2 DSymbol V: Impact speed (m/s) g: Gravitational acceleration (m/s2) W: Impact object weight (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) -X Air Cushion Stroke Note) The speed

ML1

ML2B Horizontal impact Vertical impact (down) Vertical impact (up) ML1C REA Configuration of impact REC RHC MTS W 2g Oparating energy E1 V2 CC Thrust energy E2 Fs Fs+Ws Fs-Ws Absorbing energy E E1+E2 Symbols V: Impact speed (m/s) g: Gravitational acceleration (9.8m/s2) W: Impact mass amount (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) Note) "Impact speed" means the speed

The AFW is available for US and Canadian customers only.8 threaded models to 1,500 SCFM (3"NPT), Three filtration/coalescing grades available as well as activated carbon, Differential pressure indicator and float type auto drains are standard, Modular connectivity permits compact assembly , 232 psi max. operating pressure, Spinner, AFW400(A)-WS, AFW700(A)-WS, FILTER, 0.1 lb

Cooling Capacity: 003 (320 W), Communication: A (RS-485), Option: FN (F+N)

CLA

Out put A56 A53 853 A54 854 3wire~lem D Grommet Preferred Option Program A67 A64 B64 A33e A33 A34C A34 A44C A44 R"'d Connector 2 wire system DIN Grommet * For completa auto SWllch spocrllcahon please see pgs. 18-20. rore Size A59W B59W F59 G59 F5P G5P J51 I 3 wire sysiernfNPN 3 wire systemfPNP (mm) 40 50 63 80 100 Grommet 2 wire system Foot c;.1 {()4 CAHw CAHOO CA Il '~ CAH10 I Flange CAI fN