5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

Thermo-chiller

Applicable model Min. operating flow rate [L/min] HRL-BP002 HRLE050-m-m CH1: 15/15 (50/60 Hz) CH2: 1/1 (50/60 Hz) HRL-BP001 HRLE090-m-m CH1: 25/35 (50/60 Hz) CH2: 1/1 (50/60 Hz) CH1 Circulating fluid return port Applicable hose I.D.: 19: HRL-BP001 Applicable hose I.D.: 15: HRL-BP002 u q r t i !0 CH2 Circulating fluid return port Applicable hose I.D.: 15 o u !

Thermo-chiller

[W] = 7.3 [kW] T = T2 T1 Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] T1: Outlet temperature 23 Cooing Capacity Calculation Series HRS100/150 Required Cooling Capacity Calculation Example 3: When there is no heat generation, and when cooling the object below a certain temperature and period of time.

energy saving effect

temperature 32C 25 25 Ambient temperature 43C Cooling capacity [kW] Cooling capacity [kW] 24 20 20 Facility water temperature 40C 15 15 Ambient temperature 45C 10 10 5 5 5 10 15 20 25 30 35 0 5 10 15 20 25 30 35 0 Circulating fluid temperature [C] Circulating fluid temperature [C] 170 Thermo-chiller Inverter Type HRSH Series If the product is used at altitude of 1000 m or higher, refer

HRS100/150

= Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 8.4 [kW] HED V 20C After 15 minutes, cool 32C down to 20C.

HRL

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

Lightweight and Compact

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation amount T1: Outlet temperature Thermo-chiller Users equipment T = T2 T1 7325 [W] = 7.3 [kW] Cooling

53

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation amount T1: Outlet temperature Thermo-chiller Users equipment 7325 [W] = 7.3 [kW] T = T2 T1 Cooling

Table of Contents

Description RUN 15 +24V Common The positive common of the input terminal. 1, 14 HOLD 3 The terminal that performs setup operations (actuator starting preparation). 2 Starting preparation STOP 16 SET-UP ALARM RESET 4 The terminal that performs program start. RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed.

Table of Contents

bar absolute, T1 = 297 5K, 0.07 bar P 0.14 bar.

33

of 20%, V 1120 [W] x 1.2 = 1344 [W] After 15 minutes, cool 32C down to 20C.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

VQ5000

A Unused A Unused A Unused A Unused A Unused A B A B A B A B A B A A A B A B A B A A A A 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 6 7 8 9 10 11 12 13 14 15 0 0 1 2 3 4 5 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System ADDRESS NO. STATION NO.

JXCx-OMT0032CN

)IF115.2kbps 2 4.2(CN2SW) TM (CN2SW) Deviceet TM(CN2SW) Deviceet () PC/TB(CN2)(LEC-T1-)(LEC-W2)(LEC) TM(LEC) (CN2SW)Deviceet 15 - 4.3(LEC) (LEC)(LEC-T1-) (LEC-W2)(LEC) (LEC)(LEC)(LEC-T1-) 4.3.1 ID 2(LEC)ID (LEC)IDID112 ID (LEC-W2) Normal Parameter Controller ID () Download (IDID ) 4.3.2 IF(LEC)(LEC-T1) IF115.2kbps (LEC-W2) Normal HELP-Password 16 - Para protectComm speed -1 Para protect

JXCx-OMT0028CN

*(B RATE)0(115.2kbps) *(B RATE)GW 15 - 4.2 (CN2SW) (CN2SW)LEC (CN2SW) (CN2 SW) LEC LED CN2 SW CN2STAT BUS STAT CN3() ON EtherNet/IP CN2(TB/PC ) OFF *(CN2 SW)ON 4.3LEC LEC GW LEC LEC LEC GW GW LEC 1 112 ID [] 5 (LEC-T1) (115.2kbps) 3 (LEC-W2) (38.4kbps) 6 [] (230.4kbps) (LEC-W2) *-5(115.2kbps) * GW (CN2SW) 16 - (1)-ID (LEC-W2) 1)LEC Normal [Parameter] -ID [1]ID [2] ID

Proposals for Energy Saving

4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

OMU0023

(1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150 25 10 Operation mode selection 165 25 10 95 15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication

Title not found

Cable length (L) A1 (17.7) (10.2) 1 2 5 6 (14) (18) 1 3 5 8 A B C 1.5 m 3 m 5 m 8 m A6 B1 B3 A1 A3 B6 (13.5) 1 2 5.7 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 10 m LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 8 A B C 15 m Actuator side Controller side 20 m 5.5 6.3 5.7 (14.2) Connector C (Terminal no.)

Vacuum Equipment

Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.

ZSE1/ISE1

Area: (800) 258-9200-www.stevenengineering.com ZSP 1 2 + ISA2 40 30 40 IS Pressure supply port 2 O-ring Pressure supply port 2 O-ring ZSM 6 5 . 9 6 5 . 9 30 21 21 PF2 27 27 IF 2-M2.5 x 24L Mounting threads 2-M2.5 x 24L Mounting threads Data Connector type: SE1-14C/-15C/-18C/-19C Grommet type: SE1-14/-15/-18/-19 01 T1 01 T1 I Z I Z Pressure setting trimmer Hysteresis setting trimmer Hysteresis