SFOD-OMT0005CN

(P.12) ) INP ON (INP 9.1 (P.32) PLC ) 5 3.(P.12) PLC (PLC) 2 11.4 (P.49) () 10.(P.41) 3.(P.12) -81- 5(P.23) 9.1 (P.32) 3.(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.

Series VQ Base Mounted Metal Seal/Rubber Seal

L, S kit) Manifold block ass'y D side end plate ass'y U side end plate ass'y Housing ass'y and SI unit S kit P kit F kit L kit 1.10-208 Exploded View of Manifold Plug-in Unit/VQ2000 (F, P, L, G, S kit) Manifold block ass'y D side end plate ass'y U side end plate ass'y Housing ass'y and SI unit S kit P kit F kit L kit G kit 1.10-210 Exploded View of Manifold

Rubber seal 5 Port Solenoid Valve Series SYJ5000

length) 87.2 [91.6] With interface regulator 107.5 [109.7] (Light/surge voltage suppressor) 69.6 [76.6] 45 50.1 [57.1] + 54.2 34.7 31.5 6 8.5 21.5 6 43.9 32 24 15 17 17 1/8 (P, R port) 45.5 L plug connector (L): SYJ5240-L-01 M plug connector (M): SYJ5240-M-01 DIN terminal (D): SYJ5240-D-01 M8 connector (W0): SYJ5240-W0-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Approx. 600 (Lead wire length) 31.5 [38.5] 70.6 [72.8] (Light/surge voltage suppressor) 2-3.2 (For mounting) 23.5 10.9 74.2 [76.4] + 28 25 16.1 21 31.5 [38.5] 18 10 (Bracket) 3.6 1/8 (P, R port) R P 28 8 1.6 (PE port) 14.5 16 L plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (M0): SYJ72-W0-01 (-F) Approx. 300 (Lead wire

42

Locking type/Tool required SUP/EXH block plate Push type/Tool required SYJ Restrictor spacer Locking type/Manual External pilot 50/60 Hz 50/60 Hz Manifold SZ Grommet Plug-in VF VP4 VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ P.481 P.482 P.476 P.476 P.477 P.477 P.477 P.477 P.478 P.478 P.479 P.480 (Except S kit) (Except S kit) (Except S kit) (Except S kit) SQ VFS VFR VQ7 P.527 P.522 P.522 P.523

Secondary Batteries

P.33 P.34 Auto Switches D-M9BW(V)SDPC-900 D-M9BW(V)L-900 D-Y7BW(V)L-900 D-A90L-900 D-Z80L-900 P.62 P.63 P.64 P.65 P.65 P.66 Solid State Auto Switch Direct Mounting Style 90-JA 90-JB 90-JS 90-RB/RBC 92-MSQ P.35 P.35 P.35 P.36 P.37 Reed Auto Switch Direct Mounting Style Auto Switch Mounting Bracket Part No. 1 Single Valve/Sub-plate Type IP67 Compliant How to Order 90-SV Series 90 SV W1 00 1

0.4

VQC 4/5 S kit (Serial transmission [Fieldbus system]) EX600 P.562 VQZ VQC1000/2000 SQ S kit (Serial transmission) EX250 P.566 VFS VQC1000/2000 VFR S kit (Serial transmission) EX260 P.567 VQ7 VQC1000/2000 S kit (Serial transmission) EX126 P.570 VQC1000/2000 F kit (D-sub connector) P.572 VQC1000/2000 P kit (Flat ribbon cable) P.574 VQC1000/2000 T kit (Terminal block box) P.576 VQC1000/2000

Modular Type Filter Regulator Series AW

Construction AW20K to 40K A-A i A w t SMC K P q C U O S L H o t OUT (Outlet pressure) IN (Inlet pressure) A Parts list y Material AW20K AW30K AW40K AW40K-06 Description No. Note e Zinc die-cast Aluminum die-cast Platinum silver 1 2 Body r Bonnet Black Polyacetal u Parts no. AW20K Description Material No.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

PF2M7m-m1/2(-L) 48 A Width across flats B 18 OUT1 OUT2 DC(+) 10.2 DC() 1.4 38.5 (30.9) 13 3 2 x Female thread Port size: 1, 2 2 x 3.4 18 [mm] 28 Model A B P PF2M701/702/705/710/ 725/750-01(-L) 66 14 2.8 depth 8.4 8 PF2M701/702/705/710/ 725/750-N1(-L) 68 14 2.8 depth 8.4 2 x P PF2M701/702/705/710/ 725/750-F1(-L) 70 14 2.8 depth 8.4 PF2M711/721-02(-L) 70 17 2.8 depth 6.2 PF2M711/721-N2(-L)

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

HRX-OM-W002

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

JXCx-OMT0005CN

PLC <> 1 1ABS 2INC 2PLC 15ms 30ms 14.2[2] (P.54) No. (01-051) No.

HRX-OM-X084

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

Air Fittings & Tubing

See p.2.2-15. 2.2-10 Series KQ2 Male connector: KQ2H 01-32 KQ2H03-32 07-32 01-32 KQ2H03-32 07-32 Tube O.D. (inch) M Min. hole dia. Thread UNF NPT H (Hex.) (1) Weight (g) Part No.

4/5 Port Air Operated Valve Series SYJA3000

[111.8] R P R 63.8 (DIN 65.1) 63 (DIN 64.3) R P R B B B B B 122 [126.4] 19 19 19 60 31.5 22 A A A A A 1/4 (P, R port) 13.8 (For DIN: 15.1) 4-4.5 (For mounting) (Pitch) P = 20 29 Manual override (Station n) (Station 1) (Light/Surge voltage suppressor) + + + 73 [80] 57.6 A A 10.5 41 30.5 B B 6.5 (Pitch) P = 20 25 1/8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D) M8

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 (A port) 18 8.5 2-4.5 (For mounting) 4 34 Manual override A 24 P R 33.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] (Light/surge voltage suppressor) M5 x 0.8 (X port) 49.6 [56.6] + 34.2 8.5 16.5 21 X 6 32 24 15 17 9 1/8 (P, R port) 42 L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (W0): SYJ54-W0-01 Approx.

5 Port Solenoid Valve SY Series

(-F ) G H 1 2 23 32.3 (A, B port) 1/8 0.8 1.6 16.2 (20) 15 EA P EB 28.1 [32] For manifold gasket positioning 22.2 die-cast hole (P, EA, EB port) 1/8 27.2 32.5 20.5 23 32.3 L plug connector: L SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector: M SY5120-M(-F ) DIN terminal (D): C4, N3 C6, N7 C8, N9 SY5120-W0(-F ) 1 2 M8 connector (W0): C4, N3 C6, N7 C8, N9 1 2 C4, N3 C6, N7 C8, N9 1 2

Speed Controller with One-touch Fitting

-23(S)A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-04(S)A 4 8.2 AS221F-01-06(S)A 6 10.4 10 (9) AS221F-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS221F-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS221F-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2

HRX-OM-X071

min 15/ 23 Rated fiow of option T1 8 L/min 16 Circulating Rated fiow of option T2 8 L/min 24 fluid system Flow display range9 L/min 5 to 40 Electric conductivity display range S/cm 0.1 to 48(For option -DM) Electric conductivity setting range S/cm 0.5 to 45(For option -DM) Particle filter nominal filtration rating10 m 5 Bypass valve10 Installed Tank capacity L Approx.5 Fluid outlet , fluid