Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting), Option 3: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting), Option 3: K (Operation Manual, Calibration Certificate)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: None, Option 3: K (Operation Manual, Calibration Certificate)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting), Option 3: K (Operation Manual, Calibration Certificate)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting), Option 3: K (Operation Manual, Calibration Certificate)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter), Option 3: K (Operation Manual, Calibration Certificate)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: D (Panel Mount Adapter + Front Protection Cover), Option 3: K (Operation Manual, Calibration Certificate)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: None, Option 3: K (Operation Manual, Calibration Certificate)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting), Option 3: K (Operation Manual, Calibration Certificate)

44

Component materials have met apparatuses and containerpackages standards. ( ( 320 Stainless Steel 316 Insert Fittings KFG2 Series Variations Male Connector KFG2H Bulkhead Union KFG2E Metric Inch P. 323 P. 329 Metric Inch P. 325 P. 330 KQ2 KQB2 KS KX KM KF Male Elbow KFG2L Union Elbow KFG2L Metric Inch P. 323 P. 329 Metric Inch P. 325 P. 330 M H/DL L/LL KC KK KK130 DM Male Branch Tee KFG2T

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT1/8), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: NPT1/8, Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Operation Manual, Calibration Certificate

Dual Speed Controller with One-touch Fitting Series ASD 1

min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area

Series AS-FM/AS-M/ASD-FM

Max. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 12.7 9.6 22.1 12.3 17.3 8 7 30.1 25.1 28.8 33.8 10-32UNF 16.5 13.5 26.1

AS-FG/ASD-FG

P-77.5 (YG)

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

41.2 1/8 NPTF P(SUP) port 46.5 L type plug connector (L) M type plug connector (M) (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 66 300 (Lead wire length) Indicator light 300 61 Indicator light 49 55.5 Cover diameter 1.5 Cross sectional area 0.23mm2 P R 1 3 P R 1 3 Dimenisons n : Stations (Max. 20 stations) Equation L1=10.5n+9.5 L2=10.5n+22.5 L n 2 30.5 43.5 75 85.5 16

PFxx-OMJ0005CN

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

Micro Mechanical Valve Series VM1000

P.T. 5.5 25 (L) (A) 3 port (A) 2 12 10 1 (P) 3 (R) 14.5 14.5 2 x 1/8 17 44 25.4 2 x 4.6 mounting hole * 0.5 MPa supply Model L A VM120-01-00A 32.5 7.5 F .O.F .* 26 N VM130-01-00A P .T. 1.5 mm VM121-01-00A 28.5 3.5 O.T. 1.5 mm VM131-01-00A T.T. 3 mm Roller lever VM121-01-01A VM131-01-01A VM121-01-01SA VM131-01-01SA Symbol 2 port 10 Polyacetal or hard steel roller (A) 2 12 10 1 (P) 29.2 45.5

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

11 5.5 M3 x 0.5 8 L 12 7 M4 x 0.7 8 10 A 15 8.5 M5 x 0.8 1214