1 Drain q r e w t i u y o !0 !
t q e OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Color No.
M5 01 Conduit terminal: VF1120-T-M5 01 DIN terminal: VF1120-DVF1120-YVFN Applicable cable O.D. 6 to 8 Applicable cable O.D.
0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly 10 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !
01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2
Note 3) The flow rate unit is based on 0C and 101.3kPa. 87 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Series PFA Sensor Unit Construction PFA710/750 PFA510/550 q w e r w t w e Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PFA711/721/751 PFA511/521/551 q w e r t y Parts list No. 1 2 3 4 5
e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.
(For type 20 manifold) 10 1 SYJ7 2M 5 M 01 Body ported 10 4M 5 M 01 SYJ7 1 Base mounted Clean series Manual override 3 port Nil: Non-locking push type D: Push-turn locking slotted type Thread type Standard Coil specifications F Nil Rc Nil G N T NPT NPTF With power saving circuit <24 and 12 VDC only> Power saving circuit is not available in the case of "D", "DO" or "W" type.
(For details, refer to page 4-4-25.) 4-4-20 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.
0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !
Fittings & Tubing Air Cylinders Rotary Actuators 3(R2) 1 (P) (R1)5 1 (P) (R1)5 3(R2) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 q t r w 3(R2) 1 (P) (R1)5 (B) 2 (A) 4 3 position exhaust center 2(B) (A)4 3(R2) 1 (P) (R1)5 3 position pressure center u 2(B) (A)4 3
Spacer Y300 Y300 Y400 Y500 Y600 Y600 Y600 Y100 Y200 Note 6) Pressure switch IS1000M-30 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 IS1000M-20 Note 5) 01 (01) (01) (02) Y110-M5 Y210-(02) Y31002 Y31002 Y410(02) Y51003 Y61003 Y610-(03) Y610(03) T-interface Note 6) 03 (04) 04 04 Note 6) 02 VHS40-06 VHS50-06 10 pressure release 04 02 02 01 3-port valve for residual 03
E S W I T C H: S E R I E S IS1000 S W I T C H CHARACTERISTICS E L E C T R I C A L C I R C U I T Up to 100V AC/DC Max Contact Capacity IS1000 01 2V (AC), 2W (DC) Voltage 24V AC, DC or less 48V AC, DC 100V AC, DC P O R T T H R E A D Max Operating Current 50mA 40mA 20mA 01 1/8 PT N01 NPT1/8 Shock Resistance 30G Response Time 1.2ms Set Pressure Range Lead Wire Length *Note.
0 IS1000 No. q w e r t y u i o !
3 t !8 @8 #2 w Actuators Modular F.R.L. Pressure Control Equipment Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
Except for M5 Coil type Standard Nil T With power saving circuit (24 VDC, 12 VDC only) A port size Power saving circuit is not available for D, Y, DO, YO or W types.
Component Parts Replacement Parts No. u i Description Description Sub-plate Pilot valve No. q w e r t y Note Aluminum die-casted Part no.
I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.
VNl Port size 01 02 03 04 VQ 1 8 1 4 3 8 1 2 Refer to table w for configuration. Thread T F N Rc(PT) NPTF G(PF) NPT Refer to p.4.0-15 for ordering coil only. Refer to table q for configuration.