CG5-S

0 t !3 w With air cushion !2 !1 i r !3 y o q u e !0 w Parts list Material No. 1 2 3 4 5 6 7 Description Material No.

LEC-OM02704CN

AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .

Micro Mechanical Valve Series VM1000

5 w !3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

VZS

Body type Rc 1 8 Plug-in type VVZS3000-P-01-1 Non plug-in type VVZS3000-P-01-2 Rc 1 4 VVZS3000-P-02-1 VVZS3000-P-02-2 Body type Plug-in type AXT625-12A Non plug-in type Part no. Part no. Body type Plug-in type VVZS3000-22A-1 Non plug-in type VVZS3000-22A-2 Part no.

IIIIIII

) P T 0.079 in (2mm) o.T. 0 059 in (1 smm) T T 0 138 in (3 Smm) .75 PSIG (5 Kgf/cm2) F .

V

Series VT Not Available In The USA BACKGROUND Many current pneumatic solenoid valves are a c t u a l l y o f s o l e n o i d p i l o t c o n s t r u c t i o n . T h e s o l e n o i d d o e s n o t o p e r a t e d i r e c t l y u p o n t h e s p o o l o r p o p p e t w i t h i n t h e v a l v e . W h a t t h e solenoid does is open a very small pilot valve.

0.4

e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2)

Mechanical Valves Series NVM, NVFM, NVZNI

) P T 0.079 in (2mm) o.T. 0 059 in (1 smm) T T 0 138 in (3 Smm) .75 PSIG (5 Kgf/cm2) F .

HRX-OM-W002

(High pump head Rated current of leak voltage x size [Optional]) current (A) [mA] HRR012-A/W-101-phase AC100V (50/60Hz) 15 30 1-phase HRR018-A/W-10AC115V (60Hz) HRR012-A/W-2010 30 HRR018-A/W-203 cores x 14AWG HRR024-A/W-20(3 cores x HRR030-A/W-20HRR012-A/W-20-T 2.0mm2) 1-phase HRR018-A/W-20-T HRR024-A/W-20-T HRR030-A/W-20-T (including 200-230V AC ground) (50/60Hz) 15 30 HRR012-A/W-20-T1 HRR018

Series SV

3-position 0 3 Regulator port P port A port (P port control type A port regulated) B port (P port control type B port regulated) P P port A port (P port control type A port regulated) B port (P port control type B port regulated) P Option A1 A1 With pressure gauge (for odd no. station) With pressure gauge (for even no. station) Without pressure gauge 05 B1 B1 Option 06 00 M1 With pressure

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

Modular Type Filter Regulator Series AW

w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

Vacuum System Peripherals:

q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

CLA

W .TOea TT XIUS ' Z ZZ l ~/ t ~ ~ 20 27 Y. 42 11 20 45 153 8 15 !

VS 8-2/VS 8-4

t q w q t VSR8-2-FG-DVSS8-2-FG-De r e r w q t w q t VSS8-2-DFHG FIG FJG VSR8-2-DFHG FIG FJG e r e r w q t w q t VSR8-2-DFDAG FDBG FDCG e r w q t Replacement Parts VSR8-2-DFDAG FDBG FDCG VSR8-2-DFHG FIG FJG VSR8-2-FG-DVSR8-2-FG-SVSS8-2-DFHG FIG FJG VSS8-2-FG-DVSS8-2-FG-SDescription No.

42

) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

VZ100/300/500

of P port and exhaust air from both sides of R port. 40R-2 Applicable solenoid valve VZ314RVZ324RApplicable blanking plate assembly DXT200-8-3A How to Order VV3Z3 40R 05 2 01 X port R port Stations P/R port Thread type P port A port side 2 stations 02 P port Nil Rc G NPT NPTF M5 01 M5 x 0.8 1/8 A port F N T 20 stations 20 R port Note) For more than 9 stations, supply air to both sides

VM

Cover Gasket NBR Metallic plated Plunger Body y Rolled steel u i w e Zinc alloy Metallic plated Subplate Polyacetal Valve seat o Hexagon socket head plug Rolled steel r NBR Valve t Stainless steel Spring 3.5-12 VM100 Series VM100/Side Piping Basic/VM120-01-00, VM130-01-00 VM121-01-00, VM131-01-00 JIS Symbol 2 port 3 port 20N F.O.F. 0.5MPa supply A L Model 7.5 VM120-01-00 VM130-01-00 32.5