AS-FG/ASD-FG

Dimensions Metric size Inch size Model d Weight g D1 D2 L1 L2 L3 Model d Weight g D1 D2 L1 L2 L3 Max. Min. M1 Max. Min.

Series AS-FM/AS-M/ASD-FM

L2 Metric sizes A M1 L5 Max.

Speed Controller with Uni One-touch Fitting AS Series

Universal Type/Metric Size AQ H D1 Applicable tubing O.D. d ASV (Hexagon width across flats) AK M L3 A VCHC L4 L5 ASR ASQ D3 L1 D2 L2 Connecting thread T T Uni thread H D1 D2 L1 L2 L5 (1) A (2) Max. Min. Max. Min.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

H D1 Applicable tubing O.D. d ASS (Hexagon width across flats) M ASR L3 A ASF L4 L5 D3 D2 L1 Connecting thread T L2 Uni thread H D1 D2 L1 L2 L5 A Max.

AS-FPQ/AS-FPG

AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715

AS-FPQ/AS-FPG

AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

AK 10. For handling One-touch fittings, refer to the Fittings and Tubing Precautions on pages 13 to 17. VCHC 6. Check if PTFE can be used in application. To install/remove the product, use an appropriate wrench to tighten/loosen at the supplied nut on body B. 11.

AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

Vacuum

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

Vacuum

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

ISE7xG.eng

Bracket A Bracket B [F 0] Display units, switch output specifications and diagnostic information selection function ISE70(G): 0.500 MPa/ISE71: 0.800 MPa/ ISE75G: 1.000 MPa/ISE76G: 2.50 MPa/ ISE77G: 5.00 MPa/ISE78G: 8.00 MPa Pressure setting Cross recessed round head screw: Nominal size M4 x 6L Cross recessed round head screw: Nominal size M4 x 6L Item Default setting ISE70(G): 0.050 MPa/ISE71

ISE70_71-AB.eng

Piping specification: -02 and -N02 After hand tightening, tighten the fitting using a spanner on the flat surfaces of the fitting. The tightening torque must be 8 to 12 Nm.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

tubing O.D. d A (2) L5 (3) A (2) Model T D1 D2 D3 L1 L2 L3 L4 M1 L5 (3) Weight Weight (g) (g) T D1 H (1) H (1) D2 D3 L1 L2 L3 L4 M1 Min.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

L3 M1 L4 H(1) A(2) D1 D2 L1 L2 L3 L4 T M1 Weight (g) Model Model Min.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

Vacuum System Peripherals:

Check valve: Series AK 13-14-15 Manifold Specification Sheet 1. For ejector system: Series ZX 13-14-18 2. For vacuum pump servies: Series ZX 13-14-19 3. Series ZM 13-14-20 4.

Speed Controller with One-touch Fittings

2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-FM AS-D AS-T ASP ASN AQ Dimensions ASV Universal type AK Applicable tubing O.D. d VCHC Applicable tubing O.D. d Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 (1) A (2) M1 Max. Min. Max. Min.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF 1.3 1.3 ASV220F-U10/32 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

PSxx-OMV0008CN

-*309(0x0135) ISE75G-*-L2-*320(0x0140) ISE76G-*-L2-*321(0x0141) ISE77G-*-L2-*322(0x0142) ID ISE78G-*-L2-*362(0x016A) 1(0 ms) 2 3 ISE70G/ISE75G MPa/kPa ISE76G/ISE77G/ISE78G MPa 490 5https://www.smcworld.com 6 02 N02 F02 Rc1/4 NPT1/4 G1/4 Al2O3(96) ISE70GC3604()FKM+ ISE75G/ISE76G/ISE77G/ISE78GC3604()FKM ISE70G 179 g 178 g 175 g ISE75G/ISE76G/ISE77G 184 g 183 g 181 g M12 139 g -87No.PS-OMV0008CN-E