Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

D DDE 202-JU FD BC FA H Q AW (UU) SD BH DF (through) JD AY 2-P BG AX DG Front port (Plugged with a hexagon socket head set screw when side ports are used.) SF AV AU BB (Max. approx.

EXxx-OMO0027

Information Data (AX, AY) Index Name / Meaning Type Value 90x0:0 Slot x: Module identification USINT 10 90x0:01 Address of the module UINT Slot No. 90x0:09 Module PDO group UINT 1 90x0:0A Module ident DINT 32 (AX) 34 (AY) 90x1:0 Slot x: Short circuit USINT 2 90x1:01 Channel 0 BOOL FALSE (Undetected) TRUE (Detected) 90x1:02 Channel 1 BOOL FALSE (Undetected) TRUE (Detected) 90x2:0 1 Slot x:

ITV_D-E

I f suppl y pressure t o t hi s product i s i nt errupt ed or shut of f , w hi l e t he pow er i s st i l l on, t he i nt ernal sol enoi d val ve w i l l cont i nue t o operat e and a hum m i ng noi se m ay be generat ed. Si nce t he l i f e of t he product m ay be short ened, shut of f t he pow er suppl y al so w hen suppl y pressure i s i nt errupt ed or shut of f .

AMX-OM-F005-C

Pl ease underst and t he cont ent s of t hi s operati on m anual Pl ace w here m ore t han 0. 1M Pa Pl ace w here ai r m ay f l ow backw ards pressure pul sat i on m ay be revi sed w i thout not i f i cat i on. FEATU RES N o back f l ow W at er drop cont ai ned i n com pressed ai r i s ef f ect i vel y rem oved j ust by O ver rat ed f l ow i nst al l i ng t hi s.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Fittings & Tubing Air Cylinders Rotary Actuators Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Key Key +4 0 0 0 +4 0 9 y 9 A port B port 0 y A port B port a a w 0 w 1 y y e ay e k k 80 w of of y e e ke 1 g g n n f ay ra a o r n n w ge io io at ey n ot at R ra ot k R Angle adjustment range 3 n of io at e +4 0 ot R ng R ot ra at n 80 io io at 1 n ot R ay ra +4

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

27h8 27.5h8 14H8 8.2 13.5 29.5 XB effective depth XC WF 2 29h8 29.5h8 14H8 9.7 15.5 33.5 3 34h8 33h8 17H8 9.7 15.5 36 7 40h8 39h8 20H8 9.5 16.5 39.5 BD BA PA Vacuum suction port Side port 2 x P 2 x JC DD Depth from bottom (not including JD) JE D (Plugged with a hexagon socket set screw when front ports are used) Effective depth FB DE 2 x JU FD BC FA AW H Q Effective depth 1.2 (UU) SD BH AY

EXxx-OML0010CN

AY(2AO) (EX600-AYA) AM AM(2AI2AO) (EX600-AMB) EX600-SDNEX600-SDNA EX600-SPREX600-SPRA EX600-SMJ EX600-SEN EX600-SEC EX600-SPN SI(8) SI(8SOL) EX600-SDNEX600-SDNA EX600-SPREX600-SPRA EX600-SMJ EX600-SEN EX600-SEC EX600-SPN SI(16) SI(16SOL) SI EX600-SDNEX600-SDNA EX600-SPREX600-SPRA EX600-SMJ EX600-SEN EX600-SEC EX600-SPN SI(24) SI(24SOL) EX600-SDNEX600-SDNA EX600-SPREX600-SPRA EX600-SMJ EX600

Fieldbus Device Handheld Terminal

Unit type Unit symbol Displayed unit symbol Part number EX600-DXB EX600-DXC EX600-DXC1 DX (8DI) Digital input DX EX600-DXD EX600-DXE EX600-DXF DX (16DI) DY (8DO) EX600-DYB DY (16DO) EX600-DYE EX600-DYF Digital output DY DY (24DO) EX600-DYE1 Digital I/O DM DM (8DI8DO) EX600-DME EX600-DMF Analog input AX AX (2AI) EX600-AXA Analog output AY AY (2AO) EX600-AYA Analog I/O AM AM (2AI2AO) EX600-

3-Position Rotary Table

DK (through) DH DI DJ DK DL FE HA UV Size 10 20 30 50 45h8 46h8 20H8 6 15H8 10 18.5 52.5 60h8 61h8 28H8 9 17H8 15.5 26 63 65h8 67h8 32H8 12 22H8 16.5 27 67 DL 75h8 77h8 35H8 13 26H8 17.5 30 76 (mm) AA A AV AW AX AY AZ BA BB BC CA CB CC D DD DE DF DG FA FB FC FD H J JA JB Size 10 20 30 50 D7 24.7 50 14 17 8 1 9.5 60 27 7 7 38 45h9 46h9 20H9 6 15H9 8 4 3 4.5 13 6.8 11 6.5 8 32.4 65 17 18.5

Digital or Analog: AY (Analog Output Unit), Digital Input/Output Type: None, Inputs/Outputs/Channels: A (AX=2 Ch. IN, AY=2 Ch. OUT : Connector: M12, 5 pin, 2 pcs)

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

) Note) AD depth AE AF depth AG S H When open AS When closed AR When closed AT M T D P B R N G Q F E C A 2 x AH thread depth AJ (Mounting thread) AQ AP Finger closing port Vacuum suction port AN Finger opening port 4 x AK through (Thread for mounting attachment) S J O Auto switch mounting groove dimensions U X V AM AL 10 16 to 25 W AZ Finger option: Narrow type (N) AX When open AU AW AV AY

Digital Pressure Switch, PRESSURE SWITCH, ISE50-80, 845, 141 lb

2-Color Display Digital Flow Switch Series PFM

DIN Rail Mounting Bracket (Order Separately) ZS 33 R Stations 1 2 3 4 5 1 station 2 stations 3 stations 4 stations 5 stations DIN rail (supplied by customers) Port size F02: G1/4 cannot be mounted on the DIN rail. 919 Series PFM5 Specifications Model PFM510 PFM525 PFM550 PFM511 Dry air, N2, Ar, CO2 (Air quality grade is JIS B8392.1-1, 1.2 to 1.6.2 and ISO8573.1-1, 1.2 to 1.6.2.)

0.01

C08 C10 C12 02 N02 F02 C04 C06 C08 02 N02 F02 C08 C10 C12 02 N02 F02 C04 C06 C08 02 N02 F02 IN port size IN port size Construction The construction and materials are the same as the standard product. Refer to Construction on page 323. The symbol stands for unavailable combination. The symbol stands for unavailable combination.

PFxx-OMJ0005CN

LED UP) (DOWN) (OUT2) (OUT1) SET) (OUT ) (IN ) (OUT1) OUT1 ON (OUT2) OUT2 ON (SET) INOUT LED (OUT1)/ (UP) ON/OFF (DOWN) ON/OFF DIN -13No.PF-OMJ0005CN-I BAA B BAC 13.2 mm (71) C A A B -14No.PF-OMJ0005CN-I 0.50.05 Nm (ZS-33-M) (ZS-33-MS) M34 1.2 mm (71) DINZS-33-R DIN DIN0.40.05 Nm DIN DIN F02(G1/4)DIN DIN -15No.PF-OMJ0005CN-I () () Rc(NPT)1/8 79 Nm Rc(NPT)1/4 1214

ISE70/75/75H

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

2-Color Display Digital Pressure Switch Series ISE70/75/75H

1 Brown DC (+) 46 60 (31) (38.7) 3.5 35 OUT2 (NPN or PNP) 2 White 3 Blue DC () 24 OUT1 (NPN or PNP) 4 Black Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) 6 726 Series ISE70/75/75H Specific Product Precautions 1 Be sure to read before handling.

PFxx-OMO0004CN

[cm] -70No.PF-OMO0004CN-E PFMB7201-02 PFMB7201-N02 17 2x Rc1/4 NPT1/4 -71No.PF-OMO0004CN-E PFMB7201-02L PFMB7201-N02L 2x Rc1/4 NPT1/4 17 -72No.PF-OMO0004CN-E PFMB7201S-02 PFMB7201S-N02 2x Rc1/4 NPT1/4 -73No.PF-OMO0004CN-E PFMB7201S-02L PFMB7201S-N02L 2x Rc1/4 NPT1/4 17 -74No.PF-OMO0004CN-E PFMB7201-F02 21 2x G1/4 -75No.PF-OMO0004CN-E PFMB7201-F02L 2x G1/4 21 -76No.PF-OMO0004CN-E PFMB7201S-F02

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

DIN rail is not suitable for port size F02 (G1/4).

High-Precision Digital Pressure Switch, PRESSURE SWITCH, ISE50-80, 845, 141.00000 lb