Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: DM (w/Electric Conductivity Control Function, Applicable to DI Water Piping)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option 1: DM (w/Electric Conductivity Control Function, Applicable to DI Water Piping)

Electric Actuator / Slider Type 《 AC Servo Motor 》

000(Non) / 002(LEC-MR-RB-032) 0(+ Counter motors side) 0(+ Counter motors side) 0(+ Counter motors side) 1(+ 1(+ 1(+ Rotation direction selection PA14 0 Counter Counter Counter motors motors motors side) side) side) Adaptive tuning mode PB01 000 002 000 Load to motor inertia moment ratio PB06 7 50 Machine resonance suppression filter 1 PB13 4500 400 4500 Notch shape selection 1 PB14 000 030

EXxx-OMP0004CN

110 (DIP SW-No.2) ON CC-Link Ver.1.00 130 1/2 W SI CC-Link SI 17 ON CC-Link Ver.1.00 130 -12No.EX-OMP0004CN-I PWR INM12 5 B codeSPEEDCON 1 SV24 V +24V 2 SV0 V 0 V 3 SI24 V +24 V 4 SI0 V 0 V 5 M12 SPEEDCON SPEEDCON SPEEDCON 1/2 SPEEDCON M12 -13No.EX-OMP0004CN-I SV SI DC24 V /28 SV DC24V SI DC24V A.

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: T (High-pressure Pump Mounted), Option 2: Y (w/Feet and No Rack Mounting Brackets)

EX500-GPR1A.eng

How to order: EX500-AP 050 S How to order: EX500-AC 030 SSPS How to order: EX500-AC000-S 1 How to order: EX9-AC 010 1 How to order: EX9-AP 010 7 Cable length (L) Connector specification 003 0.3 [m] 005 0.5 [m] 010 1 [m] 030 3 [m] 050 5 [m] Cable length (L) Connector specification 010 1 [m] 050 5 [m] Cable length (L) 010 1 [m] 030 3 [m] 050 5 [m] Cable length(L) 010 030 1[m] 3[m] S Straight

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: DM (w/Electric Conductivity Control Function, Applicable to DI Water Piping)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: Y (w/Feet and No Rack Mounting Brackets)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: M (Applicabe to DI Water Piping)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: Rc, Option 1: None, Option 2: Y (w/Feet and No Rack Mounting Brackets)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: None

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: DMT (DM + T)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: MT (M + T)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: T (High-pressure Pump Mounted)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option 1: M (Applicabe to DI Water Piping)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option 1: MT (M + T)

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l consumption (W) 100 VAC 200/40 Initial power / Power 200 VAC 800/40 Heater assembly number XLA25-60S-1 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. H 5 100 VAC 200/40 400/70 Initial power / Power consumption (W) 200 VAC 800/40 1600/80 Note 1) Initial power and power consumption are nominal values. The heaters are PTC thermistor type design.

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: w/Electric Conductivity Control Function, Applicable to DI Water Piping

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: w/Feet and No Rack Mounting Brackets