High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 17.2 10.2 3.6 3.6 XLFV-25-2 46 21.4 10.2 3.6 3.6 XLFV-40-2 54.5 33.9 10.2 3.6 3.6 XLFV-50-2 71 35.3 12 4 2 XLFV-63-2 80.5 43.8 12 4 2 XLFV-80-2 90.5 59.8 12 4 2 13 A Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG

Electric Actuators

J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5BD-50B LXSH5BD-75B LXSH5BD-100B LXSH5BD-125B LXSH5BD-150B Refer to page 301 for mounting.

Best Pneumatics Vol. 14

Note 2) Drain guide is G 1/4 (applicable to AW30 to 40). 1 (4) AW20(K) to 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) AW20(K) AW30(K)/40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) PPA 2 6 8 C J (5) AL N R W Port size Z (6) AW20(K) to 40(K) Body size Symbol Port size When more than one specification is required, indicate in ascending alphanumeric order.

Hydraulic

118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5 140 112 35.5 80 35 27 19 M14 x 2 27 24 34 M27 x 2 35 1/2 77 140 12 20 16 100 340 34 160 42 9 174 140 45 100 38 36 22 M16 x 2 28 27 38 M33 x 2 40 3/4 94 159 12 24 20 108 375 43 108 Series CHAW Dimensions Foot type: CHAWL H + Stroke H K F T T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA

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2 2 2 2 4 2 2 1 1 6 2 No. !

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

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/Specifications K TFU 0805B-3 3 cores 4 6 8 2.5 4 5 TFU 0805B-2 2 cores TFU 0604B-3 3 cores TFU 0604B-2 2 cores TFU 0425B-3 3 cores TFU 0425B-2 2 cores Model M Burst Pressure Characteristics Curve and Operating Pressure Max. operating pressure (at 20C) Fluid Tubing I.D.

Rotary Actuator

V V K* K* K* -XA46 -XA51 Change of long shaft length (Without keyway) V V V V T, J, K* K* T, K* J* K* MSQ MSZ CRQ2X MSQX -XA52 Change of short shaft length (Without keyway) V V K* K* K* -XA53 Change of double shaft length (Both without keyway) V V V K* -XA54 Change of long shaft length (With four chamfers) V V V X, Z* X, Z* -XA55 Change of short shaft length (With four chamfers)

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R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

CA2

C85 126 21.5 26 17 M26 x 1.5 40 1/2 72 270 80 65 81 1/4 stroke 279 288 C95 Center Trunnion Style: CA2WT CP95 Z + 1/2 stroke NCM Width across flats KA 2-P (Rc, NPT, G) G G Z + l + 1/2 stroke Width across flats B1 MM Width across flats KA Width across flats B1 MM 4-J 2-cushion valve NCA TDe8 D DTY e D E E -X H1 H1 C B 9 f l AL AL F F TT N N K K A A h + l 20TX TZ H H + Stroke ZZ + l + 2 strokes

Aluminum High Vacuum Angle Valve

83 7-1 90 u o K flange i 83 KF flange 2-1 0.2 112 q 114 90 O-ring Part No.

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Brown Brown Load Load Switch 1 Switch 1 Blue Blue Brown Brown Switch 2 Switch 2 Blue Blue Load voltage at ON = Power supply voltage Residual voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Power supply is 24 VDC Internal voltage drop in switch is 4 V. Example: Load impedance is 3 k.

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2 LJ1H20 Vertical Mount Specification X70 Stroke 2 F P K A 1 2 LJ1H20 Dust seal specification Refer to Table below.

Made to Order

Through-hole/Both ends tapped (Standard): MK2TB MK2T-XC89 Lube-retainer Coil scraper 2 x P Cylinder port M A C G thread length H L N C A KA I KK 2 x J 4 x J K D 0.07 0.15 4 x F counterbore C S T AB AA MM KB Q R 2 x E through 2 x FF counterbore (mm) MM KB KK FF AB AA I N M L K J H G F E D C A KA Bore size 32 40 50 63 0.07 0.15 14 50 9 depth 11 9 depth 7 M10 x 1.5 8 4 46 45 34 6 M6 x 1.0 21

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Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

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W K HT HB HC N X A 2-Plug 4-Counterbore dia.

Smooth Cylinder/Low Speed Cylinder

(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

modular-press-e

Model Option Bracket assembly Note 1) AR10 AR25(K) AR20(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S AR50P-270AS Note 2) AR20P-270AS AR20P-260S AR10P-270AS AR10P-260S G27-10-R1 AR25P-270AS AR25P-260S G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L AR10P-270AS AR20P-270AS AR25P-270AS AR30P-270AS AR40P-270AS AR50P-270AS Note 3) Note 3) Set nut AR10P

Modular F.R.L. Pressure Control Equipment

Model Option Bracket assembly Note 1) AR10 AR25(K) AR20(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S AR50P-270AS Note 2) AR20P-270AS AR20P-260S AR10P-270AS AR10P-260S G27-10-R1 AR25P-270AS AR25P-260S G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L AR10P-270AS AR20P-270AS AR25P-270AS AR30P-270AS AR40P-270AS AR50P-270AS Note 3) Note 3) Set nut AR10P