Rotary Actuator/Vane Type

CRB2 CRB2 W1 = L3 = L1 = CRB1 L4 = Y = L2 = MSU X = Applicable shaft types: J, K, T Applicable shaft type: K W2 = CRJ [mm] CRA1 CRB2, CRBU2 X W1 L1 max L3 max J K T J K T J K T J K T 10 6.5 to 14 0.5 to 2 X-3 L1-1 15 8 to 18 0.5 to 2.5 X-4 L1-1 20 9 to 20 0.5 to 3 X-4.5 L1-1 30 11.5 to 22 0.5 to 4 X-5 L1-2 40 15.5 to 30 0.5 to 5 X-5.5 L1-2 [mm] Size CRB2, CRBU2 Y W2 L2 max L4 max 10 4.5

Aluminum High Vacuum Angle Valve

83 7-1 90 u o K flange i 83 KF flange 2-1 0.2 112 q 114 90 O-ring Part No.

CA2

4 51 186 43 11.2 59 1/4 stroke 194 40 202 C95 50 90 3/8 58 206 52 11.2 66 1/4 stroke 214 222 63 98 3/8 58 214 52 11.2 66 1/4 stroke 222 230 CP95 80 116 1/2 71 258 65 12.5 80 1/4 stroke 267 276 100 126 1/2 72 270 65 14.0 81 1/4 stroke 279 288 NCM Axial Foot Style: CA2WLH NCA S + Stroke H H + Stroke 2-P (Rc, NPT, G) K A G G F K A F B1 4-J AL AL Width across flats KA With rod boot (One side)

Table of Contents

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

Table of Contents

X60 Stroke 1 LJ1H10 Horizontal Mount Specification Vertical Mount Specification X60 Stroke 2 H 1 F P K 2 LJ1H10 Refer to Table below.

Made to Order

-XC27 Note 1) The minimum order quantity includes 2 foot brackets and 1 mounting nut.

Table of Contents

color 76 41.5 29.5 12 3.2 12 14.2 L type: Black color 76 41.5 29.5 12 3.2 12 14.2 1 8 82 44.5 30.5 12 4.2 12 17.2 86 44.5 30.5 12 4.2 12 17.2 94.5 54 39 14 4.2 17 19.95 99.5 54 39 14 4.2 17 19.95 116.5 58.5 41 17 4.2 19 ZH15DS-02-03-03 22.45 116.5 58.5 41 17 4.2 19 ZH15DL-02-03-03 22.45 (Mounting hole) Model I J K L M N O P Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc

Table of Contents

CY3R32 CY3R40 P (Piping port) Model TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 8-15-20 20 Magnetically Coupled Rodless Cylinder Direct Mount Type Series CY3R Dimensions Centralized piping type: 15 to 40 HB HC N X MX W K MTS H MY 2-P (Piping port) HA CB 4-J x E T 4-counterbore dia.

Air Cylinder

L Axial foot (1 pc.) (1 pc.)Note 2) (1 pc.) (1 pc.)Note 2) (2 pcs.) F Rod flange (1 pc.) (1 pc.) (1 pc.) (1 pc.) G Head flange (1 pc.) (1 pc.) (1 pc.) (1 pc.) C Single clevis (1 pc.) Note 3) (1 pc.) (1 pc.) (Max. 3 pcs.) Note 3) D Double clevis (1 pc.) Note 3) (1 pc.) (1 pc.) (Max. 3 pcs.) Note 3) (1 pc.) U Rod trunnion (1 pc.) Note 4) (1 pc.) (1 pc.) (1 pc.)

Smooth Cylinder/Low Speed Cylinder

8 GA 12 P M5 x 0.8 11 12 12 77 11 114 Up to 200 11 12 12 77 11 119 12 1/8 12 M5 x 0.8 Up to 300 11 12 10 79 11 121 12 1/8 10 1/8 Up to 300 12 13 10 87 12 139 13 1/8 10 1/8 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 20 17 122 196 20 3/8 17 3/8 Up to 300 20 17 122 196 20 1/2 17 1/2 Up to 300 1206 Smooth Cylinder Series CG1Y With Mounting

AR20-B to AR60-B

Applicable Model Model AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 30 AR B 03 X406 q e w y r t 0.4 MPa setting Option/Semi-standard: Select one each for a to f. Option/Semi-standard symbol: When more than one specification is required, indicate in alphabetic order.

modular-press-e

Description Material ARG40(K) AR40P-410S AR40P-150AS AR40P-050AS ARG40P-400S GB4-10AS ARG40P-420S ARG30(K) AR30P-410S AR30P-150AS AR30P-050AS ARG30P-400S GB3-10AS ARG30P-420S Valve Diaphragm assembly Valve guide assembly Pressure gauge cover Pressure gauge Note 1) 4 5 6 7 8 9 10 1 1 1 1 1 1 1 Brass, HNBR AR20P-410S AR30P-410S AR40P-410S Weather resistant NBR POM, NBR PC Stainless steel

Modular F.R.L. Pressure Control Equipment

Description Material ARG40(K) AR40P-410S AR40P-150AS AR40P-050AS ARG40P-400S GB4-10AS ARG40P-420S ARG30(K) AR30P-410S AR30P-150AS AR30P-050AS ARG30P-400S GB3-10AS ARG30P-420S Valve Diaphragm assembly Valve guide assembly Pressure gauge cover Pressure gauge Note 1) 4 5 6 7 8 9 10 1 1 1 1 1 1 1 Brass, HNBR AR20P-410S AR30P-410S AR40P-410S Weather resistant NBR POM, NBR PC Stainless steel

Table of Contents

1 !

Vacuum Unit

Voltage output type: 1 to 5 V Output impedance: Approx. 1 k Pilot valve for supply Pilot valve for supply + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k B C A B C A Coil + + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k Black For supply valve (,+)

ISO Cylinder

rod end fR [N] (40)1 (40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

Modular F.R.L. Unit

M K J H G E Q T N P K L B AC10B AC20B AC25B AC30B AC40B AC40B-06 AC50B AC55B AC60B 71 11 50 56 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 7 4.5 20 27 25 28 0 26 13.5 4.5 2.8 40 89 114 26.5 80 83 5.5 12 33 24 41.5 30 2 Note 1) 65 29.5 5.5 3.2 50 2.5 132 143 28 80 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 80 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

Series KDM Rectangular Multi-connector

O f o r e b m u N g n i t c e n n o c s e b u t h c n I h c n I h c n I c i r t e M c i r t e M c i r t e M 8 / 1 1 0 P 0 1 M D K 1 0 S 0 1 M D K 2 . 3 3 2 P 0 1 M D K 1 0 S 0 1 M D K e u l B 2 3 / 5 3 0 P 0 1 M D K 3 0 S 0 1 M D K 4 4 0 P 0 1 M D K 3 0 S 0 1 M D K 0 1 d e R 4 / 1 7 0 P 0 1 M D K 7 0 S 0 1 M D K 6 6 0 P 0 1 M D K 7 0 S 0 1 M D K 6 1 / 5 9 0 P 0 1 M D K 9 0 S 0 1 M