Electric Actuators

Refer to pages starting with 181 for mounting. 380 480 580 680 780 880 360 460 560 660 760 860 500 600 700 800 900 1000 Positioning Time Guide Positioning time Positioning time (sec.) A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

LG1H

Refer to pages starting with 181 for mounting. 380 480 580 680 780 880 360 460 560 660 760 860 500 600 700 800 900 1000 Positioning Time Guide Positioning time Positioning time (sec.) A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

2/3 Port Valve

280 440 580 440 580 440 580 440 580 440 580 1/4 (8A) Water oil air 3.0 Steam 1.0 0.2 0.3 0.2 0.3 0.3 0.45 0.3 0.45 0.6 0.8 0.6 0.8 0.15 0.25 0.15 0.25 0.35 0.45 0.35 0.45 0.8 1.0 0.7 1.0 1.2 1.6 1.0 _ 4.5 0.61 11 5.0 6 1.05 19 Symbol 3 0.33 6 OUT 0.3 0.45 0.3 0.45 0.6 0.8 0.6 0.8 0.15 0.25 0.15 0.25 0.35 0.45 0.35 0.45 4.5 0.61 11 3/8 (10A) 6 1.05 19 IN Note 1) Weight of grommet style.

Integrated Controller

Dimensions [mm] Stroke [mm] L A B n D E G Without lock With lock 50, 100, 150 4 130 200, 250, 300 6 2 300 280 350, 400, 450 8 3 450 430 500, 550, 600 10 4 600 580 650, 700, 750 12 5 750 730 800, 850, 900 14 6 900 880 950, 1000 16 7 1050 1030 23 314.9 359.9 6 130 Easy to Operate Integrated Controller / Slider Type EQFSH Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line

Profile Design ISO/VDMA Air Cylinder Series CP95

Allowable theoretical strokes (mm) Mounting type Accessories Pressure Bore (mm) [MPa] 32 40 50 63 80 100b L F (front) G (rear) 0.2 680 980 1220 1410 0.3 540 1020 790 980 1140 L 0.4 460 700 880 680 840 980 0.5 410 630 780 610 750 880 F (front) 0.6 370 580 710 550 680 800 0.7 340 520 650 500 620 730 0.8 310 480 600 460 580 680 0.9 290 450 570 430 540 630 1 270 420 530 400 510 590 0.2 580

SQ1000/2000

26P 580 35 P kit: Flat ribbon cable 20P 1 to 9 stations SS5Q24-SQ240 SQ241 Option Direct outlet with built-in silencer J kit: Flat ribbon cable PC Wiring System compatible 580 35 1 to 8 stations L4 (for 4) L6 (for 6) L8 (for 8) Note 2) Top 1 to 12 stations 620 50 C kit: Connector kit Note 1) One-touch fittings in inch sizes are also available.

IDU/IDF

P N M L K J I H G F E D C A B Model Port size 70 65 580 580 470 317 289 363 157 77 405 (450) 131 (85) 152 630 570 260 620 R 3/4 IDF11C/11D 70 65 580 580 470 337 309 383 207 77 405 (450) 131 (85) 175 680 620 280 620 R 1 IDF15C/15C 70 30 700 700 600 351 323 398 199 642 405 (530) 98 183 760 680 295 750 R 1 IDF22C/22C1 70 30 776 780 680 376 348 423 249 722 405 (610) 98 208 810 730 320 830 R 1

0.4

F kit P. 572 P kit P. 574 T kit P. 576 L kit P. 578 M kit P. 580 Station 6 SOL.B Silencer (For EXH port) AN15-C08 Double check block VVQ1000-FPG-SOL.A 8 9 10 21 Station 7 SOL.B 22 SOL.A 6 19 SOL.B 23 24 11 Station 8 12 25 13 13 COM. to CYL port Connector terminal no.

15

(Recommended height 5 mm) LEC Y Motorless Motorless Dimensions [mm] Stroke L A B n D E 50 238 56 180 4 100 288 106 230 4 150 338 156 280 4 200 388 206 330 6 2 300 250 438 256 380 6 2 300 300 488 306 430 6 2 300 350 538 356 480 8 3 450 400 588 406 530 8 3 450 450 638 456 580 8 3 450 500 688 506 630 10 4 600 550 738 556 680 10 4 600 600 788 606 730 10 4 600 650 838 656 780 12 5 750 700

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

1 to 12 stations C4 (For 4) C6 (For 6) C8 (For 8) Side P kit: Flat ribbon cable 26P 1 to 12 stations 35 580 20P 1 to 9 stations C10 (For 10) 10-SQ231 J kit: Flat ribbon cable PC wiring system compatible 10-SS5Q23-1 to 8 stations 35 580 C4 (For 4) C6 (For 6) C8 (For 8) Note 2) Top 1 to 12 stations L.

LEH_C

/LEHZ 2.1 LEHZ () 2.1.1 LEHZ10 LEHZ16 LEHZ20 LEHZ25 LEHZ32 LEHZ40 /(mm) 4 6 10 14 22 30 (mm) 251/73 249/77 246/53 243/48 242/39 254/43 614 1640 52130 84210 (N) 40100 1) 3) 26 38 1128 /(mm/s) 2)3) 580 /550 5100 /550 5120 /550 + () (mm) 4) 0.02 (mm)5) 0.05 /(mm) 6) 0.5 1.0 / (m/sec 2) 7) 150 / 30 (c.p.m) 60 () 540 (%RH) 90 () 165 220 430 585 1120 1760 (g) 135 190 365 520 20 28

Electric Actuator with Integrated Guide Series LTF

to 480 48 LTF8FNL 16 to 890 to 710 to 580 to 480 to 1000 71 34 LTF6EPF 2 to 300 to 230 38 LTF6ENF 6 to 300 to 230 42 LTF8FPH 10 to 500 to 440 to 350 to 290 to 240 46 LTF8FNH 14 to 500 to 440 to 350 to 290 to 240 52 LTF6EPH-K 20 to 500 to 390 56 24 LTF6ENH-K to 500 to 390 60 28 LTF8FPL-K to 1000 to 890 to 710 to 580 to 480 64 32 LTF8FNL-K to 890 to 710 to 580 to 480 to 1000 71 50 18 LTF6EPF-K

Type: 40 (Standard Type), Bar Length: 1480mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 07 (ø1/4"), Bracket: B (Bracket), Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X10 [Non-standard Bar Length (Not Required with Electrode

Type: 40 (Standard Type), Bar Length: 2500mm, Electrode Cartridge, Needle Material: J (Energy Saving De-Ionizing Cartridge, Tungsten), Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: Z (10m), One-Touch Fitting: 07 (ø1/4"), Bracket: B (Bracket), Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X14 (Electrode Cartridge Drop Prevention Cover

Type: 40 (Standard Type), Bar Length: 940mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 07 (ø1/4"), Bracket: B (Bracket), Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X14 (Electrode Cartridge Drop Prevention Cover, for Standard

Type: 40 (Standard Type), Bar Length: 520mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 07 (ø1/4"), Bracket: B (Bracket), Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X10 [Non-standard Bar Length (Not Required with Electrode

Type: 40 (Standard Type), Bar Length: 1540mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 07 (ø1/4"), Bracket: B (Bracket), Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X10 [Non-standard Bar Length (Not Required with Electrode

Type: 40 (Standard Type), Bar Length: 460mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 07 (ø1/4"), Bracket: B (Bracket), Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X14 (Electrode Cartridge Drop Prevention Cover, for Standard

Type: 40 (Standard Type), Bar Length: 460mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: N (w/o Cable), One-Touch Fitting: 07 (ø1/4"), Bracket: B (Bracket), Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X14 (Electrode Cartridge Drop Prevention Cover,

Type: 40 (Standard Type), Bar Length: 340mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 07 (ø1/4"), Bracket: B (Bracket), Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X14 (Electrode Cartridge Drop Prevention Cover, for Standard